FR3008986B1 - Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs - Google Patents

Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs

Info

Publication number
FR3008986B1
FR3008986B1 FR1357333A FR1357333A FR3008986B1 FR 3008986 B1 FR3008986 B1 FR 3008986B1 FR 1357333 A FR1357333 A FR 1357333A FR 1357333 A FR1357333 A FR 1357333A FR 3008986 B1 FR3008986 B1 FR 3008986B1
Authority
FR
France
Prior art keywords
polymer
blocks
mixture
controlling
block copolymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1357333A
Other languages
English (en)
French (fr)
Other versions
FR3008986A1 (fr
Inventor
Christophe Navarro
Xavier Chevalier
Celia Nicolet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arkema France SA
Original Assignee
Arkema France SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arkema France SA filed Critical Arkema France SA
Priority to FR1357333A priority Critical patent/FR3008986B1/fr
Priority to FR1451490A priority patent/FR3008987B1/fr
Priority to CN201480052279.6A priority patent/CN105579498B/zh
Priority to EP14177577.5A priority patent/EP2829567B1/en
Priority to PCT/EP2014/065468 priority patent/WO2015011035A1/en
Priority to SG11201600564SA priority patent/SG11201600564SA/en
Priority to TW103124911A priority patent/TWI595533B/zh
Priority to JP2014149212A priority patent/JP5911534B2/ja
Priority to US14/340,075 priority patent/US9296014B2/en
Priority to KR1020140094663A priority patent/KR101540883B1/ko
Publication of FR3008986A1 publication Critical patent/FR3008986A1/fr
Priority to JP2015090880A priority patent/JP2015187273A/ja
Application granted granted Critical
Publication of FR3008986B1 publication Critical patent/FR3008986B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0433—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a reactive gas
    • B05D3/0453—After-treatment
    • B05D3/046—Curing or evaporating the solvent
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/001—Multistage polymerisation processes characterised by a change in reactor conditions without deactivating the intermediate polymer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
    • C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
    • C08F297/026—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type polymerising acrylic acid, methacrylic acid or derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Inorganic Chemistry (AREA)
  • Graft Or Block Polymers (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
FR1357333A 2013-07-25 2013-07-25 Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs Expired - Fee Related FR3008986B1 (fr)

Priority Applications (11)

Application Number Priority Date Filing Date Title
FR1357333A FR3008986B1 (fr) 2013-07-25 2013-07-25 Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs
FR1451490A FR3008987B1 (fr) 2013-07-25 2014-02-25 Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs
EP14177577.5A EP2829567B1 (en) 2013-07-25 2014-07-18 Process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of (co) polymers of one of the blocks
PCT/EP2014/065468 WO2015011035A1 (en) 2013-07-25 2014-07-18 Process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of (co) polymers of one of the blocks
SG11201600564SA SG11201600564SA (en) 2013-07-25 2014-07-18 Process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of (co) polymers of one of the blocks
CN201480052279.6A CN105579498B (zh) 2013-07-25 2014-07-18 用于控制表征由嵌段共聚物和嵌段之一的(共)聚合物的共混物获得的形态的周期的方法
TW103124911A TWI595533B (zh) 2013-07-25 2014-07-21 用於控制使得自嵌段共聚物類和該等嵌段之一的（共）聚合物之摻合物的形態表徵化之期間的方法
JP2014149212A JP5911534B2 (ja) 2013-07-25 2014-07-22 ブロックコポリマーとブロックの一つの（コ）ポリマーのブレンドから得られる形態を特徴付ける周期の制御方法
US14/340,075 US9296014B2 (en) 2013-07-25 2014-07-24 Process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of co(polymers) of one of the blocks
KR1020140094663A KR101540883B1 (ko) 2013-07-25 2014-07-25 블록 공중합체 및 블록 중 하나의 (공)중합체의 배합물에서 수득한 형태를 특정화하는 구간을 제어하는 방법
JP2015090880A JP2015187273A (ja) 2013-07-25 2015-04-27 ブロックコポリマーとブロックの一つの（コ）ポリマーのブレンドから得られる形態を特徴付ける周期の制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1357333A FR3008986B1 (fr) 2013-07-25 2013-07-25 Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs

Publications (2)

Publication Number Publication Date
FR3008986A1 FR3008986A1 (fr) 2015-01-30
FR3008986B1 true FR3008986B1 (fr) 2016-12-30

Family

ID=49322637

Family Applications (2)

Application Number Title Priority Date Filing Date
FR1357333A Expired - Fee Related FR3008986B1 (fr) 2013-07-25 2013-07-25 Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs
FR1451490A Expired - Fee Related FR3008987B1 (fr) 2013-07-25 2014-02-25 Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR1451490A Expired - Fee Related FR3008987B1 (fr) 2013-07-25 2014-02-25 Procede de controle de la periode caracterisant la morphologie obtenue a partir d'un melange de copolymere a blocs et de (co) polymeres de l'un des blocs

Country Status (8)

Country Link
US (1) US9296014B2 (enExample)
JP (2) JP5911534B2 (enExample)
KR (1) KR101540883B1 (enExample)
CN (1) CN105579498B (enExample)
FR (2) FR3008986B1 (enExample)
SG (1) SG11201600564SA (enExample)
TW (1) TWI595533B (enExample)
WO (1) WO2015011035A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6243213B2 (ja) * 2013-12-13 2017-12-06 東邦化学工業株式会社 ブロック共重合体の製造方法
JP6122906B2 (ja) 2014-06-27 2017-04-26 ダウ グローバル テクノロジーズ エルエルシー ブロックコポリマーを製造するための方法およびそれから製造される物品
JP6356096B2 (ja) * 2014-06-27 2018-07-11 ダウ グローバル テクノロジーズ エルエルシー ブロックコポリマーを製造するための方法およびそれから製造される物品
FR3025616A1 (fr) * 2014-09-10 2016-03-11 Arkema France Procede de controle du taux de defauts dans des films obtenus avec des melanges de copolymeres a blocs et de polymeres
FR3029921B1 (fr) * 2014-12-16 2018-06-29 Arkema France Procede de controle de la synthese d'un copolymere a blocs contenant au moins un bloc apolaire et au moins un bloc polaire et utilisation d'un tel copolymere a blocs dans des applications de nano-lithographie par auto-assemblage direct.
FR3031751B1 (fr) * 2015-01-21 2018-10-05 Arkema France Procede de reduction des defauts dans un film ordonne de copolymere a blocs
FR3045643A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymere a blocs
FR3045642A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede de reduction du temps de structuration de films ordonnes de copolymere a blocs
FR3045645B1 (fr) * 2015-12-18 2019-07-05 Arkema France Procede de reduction des defauts dans un film ordonne de copolymeres a blocs
FR3045644A1 (fr) * 2015-12-18 2017-06-23 Arkema France Procede d'obtention de films ordonnes epais et de periodes elevees comprenant un copolymere a blocs
FR3075800B1 (fr) * 2017-12-21 2020-10-09 Arkema France Couches anti adhesives pour les procedes d'impression par transfert
CN113286833B (zh) * 2019-01-17 2025-03-07 默克专利股份有限公司 在低Tg低聚物的存在下用于形成图案的增强定向自组装
FR3101354A1 (fr) * 2019-10-01 2021-04-02 Arkema France Sous-couche neutre pour copolymère à blocs et empilement polymérique comprenant une telle sous-couche recouverte d’un film de copolymère à blocs
FR3101355A1 (fr) * 2019-10-01 2021-04-02 Arkema France Sous-couche neutre pour copolymère à blocs et empilement polymérique comprenant une telle sous-couche recouverte d’un film de copolymère à blocs
WO2024170492A1 (en) * 2023-02-14 2024-08-22 Merck Patent Gmbh Block copolymer formulation for the improvement of self-assembled morphology in directed self-assembly application

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Also Published As

Publication number Publication date
US20150030971A1 (en) 2015-01-29
CN105579498B (zh) 2019-06-04
TWI595533B (zh) 2017-08-11
KR101540883B1 (ko) 2015-07-30
JP2015187273A (ja) 2015-10-29
WO2015011035A1 (en) 2015-01-29
KR20150013070A (ko) 2015-02-04
TW201517117A (zh) 2015-05-01
FR3008987B1 (fr) 2017-06-16
JP5911534B2 (ja) 2016-04-27
FR3008986A1 (fr) 2015-01-30
SG11201600564SA (en) 2016-03-30
CN105579498A (zh) 2016-05-11
FR3008987A1 (fr) 2015-01-30
US9296014B2 (en) 2016-03-29
JP2015044981A (ja) 2015-03-12

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