FR2951317B1 - Electrode interne fixee par le bord et attachee mecaniquement d'un ensemble a electrode en pomme de douche - Google Patents
Electrode interne fixee par le bord et attachee mecaniquement d'un ensemble a electrode en pomme de douche Download PDFInfo
- Publication number
- FR2951317B1 FR2951317B1 FR1058302A FR1058302A FR2951317B1 FR 2951317 B1 FR2951317 B1 FR 2951317B1 FR 1058302 A FR1058302 A FR 1058302A FR 1058302 A FR1058302 A FR 1058302A FR 2951317 B1 FR2951317 B1 FR 2951317B1
- Authority
- FR
- France
- Prior art keywords
- edge
- mechanically attached
- electrode assembly
- showerhead
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 abstract 1
- 238000001020 plasma etching Methods 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
- F16J15/0825—Flat gaskets laminated
- F16J15/0831—Flat gaskets laminated with mounting aids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0887—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/121—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal reinforcement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32605—Removable or replaceable electrodes or electrode systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
- F16J2015/0856—Flat gaskets with a non-metallic coating or strip
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
Abstract
Un ensemble (100A) à électrode en pomme de douche utilisable pour la gravure au plasma comporte des éléments assurant une précision de positionnement améliorée et une diminution de la déformation, qui conduit à une meilleure uniformité de la vitesse de traitement au plasma. L'ensemble (100A) peut comporter un jeu de douilles thermiques et d'attaches comme des boulons ou des verrous à came (160A) situés sur un rayon correspondant à 1/4 à 1/2 du rayon de l'électrode intérieure (120A). L'invention concerne également un procédé d'assemblage de l'électrode intérieure (120A) et du jeu de douilles sur un élément de support (150A).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25117709P | 2009-10-13 | 2009-10-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2951317A1 FR2951317A1 (fr) | 2011-04-15 |
FR2951317B1 true FR2951317B1 (fr) | 2023-11-24 |
Family
ID=43794874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1058302A Active FR2951317B1 (fr) | 2009-10-13 | 2010-10-12 | Electrode interne fixee par le bord et attachee mecaniquement d'un ensemble a electrode en pomme de douche |
Country Status (8)
Country | Link |
---|---|
US (2) | US9245716B2 (fr) |
JP (2) | JP3160877U (fr) |
KR (1) | KR200464037Y1 (fr) |
CN (1) | CN201781676U (fr) |
DE (1) | DE202010014257U1 (fr) |
FR (1) | FR2951317B1 (fr) |
SG (1) | SG170697A1 (fr) |
TW (1) | TWM396561U (fr) |
Families Citing this family (33)
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US8161906B2 (en) * | 2008-07-07 | 2012-04-24 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8272346B2 (en) * | 2009-04-10 | 2012-09-25 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
JP3160877U (ja) * | 2009-10-13 | 2010-07-15 | ラム リサーチ コーポレーションLam Research Corporation | シャワーヘッド電極アセンブリの端部クランプ留めおよび機械固定される内側電極 |
US8573152B2 (en) * | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
US8470127B2 (en) | 2011-01-06 | 2013-06-25 | Lam Research Corporation | Cam-locked showerhead electrode and assembly |
US9245717B2 (en) * | 2011-05-31 | 2016-01-26 | Lam Research Corporation | Gas distribution system for ceramic showerhead of plasma etch reactor |
TW201317372A (zh) * | 2011-10-31 | 2013-05-01 | Hon Hai Prec Ind Co Ltd | 鍍膜修正板及鍍膜裝置 |
CN102601873B (zh) * | 2012-03-28 | 2014-09-03 | 长春光华微电子设备工程中心有限公司 | 精密机械用绝缘垫板及其制作方法 |
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US9058960B2 (en) | 2012-05-09 | 2015-06-16 | Lam Research Corporation | Compression member for use in showerhead electrode assembly |
US9267205B1 (en) * | 2012-05-30 | 2016-02-23 | Alta Devices, Inc. | Fastener system for supporting a liner plate in a gas showerhead reactor |
KR101482630B1 (ko) * | 2012-11-07 | 2015-01-14 | 삼성디스플레이 주식회사 | 기상 증착 장치 |
US9610591B2 (en) * | 2013-01-25 | 2017-04-04 | Applied Materials, Inc. | Showerhead having a detachable gas distribution plate |
US8883029B2 (en) * | 2013-02-13 | 2014-11-11 | Lam Research Corporation | Method of making a gas distribution member for a plasma processing chamber |
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JP6375163B2 (ja) * | 2014-07-11 | 2018-08-15 | 東京エレクトロン株式会社 | プラズマ処理装置および上部電極アセンブリ |
JP6298373B2 (ja) * | 2014-07-11 | 2018-03-20 | 東京エレクトロン株式会社 | プラズマ処理装置および上部電極アセンブリ |
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KR102398067B1 (ko) * | 2014-11-05 | 2022-05-13 | 삼성디스플레이 주식회사 | 정전 척 |
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US11110425B2 (en) | 2018-07-27 | 2021-09-07 | Applied Materials, Inc. | Gas distribution plate for thermal deposition |
KR102198929B1 (ko) * | 2019-02-28 | 2021-01-06 | 세메스 주식회사 | 기판 처리 장치의 가스 공급 유닛 |
KR102168313B1 (ko) * | 2019-09-09 | 2020-10-21 | 김홍석 | 플라즈마챔버 전극 체결부재 |
US20210238746A1 (en) * | 2020-02-03 | 2021-08-05 | Applied Materials, Inc. | Showerhead assembly |
KR20230030576A (ko) * | 2020-06-06 | 2023-03-06 | 램 리써치 코포레이션 | 반도체 프로세싱 툴들을 위한 제거 가능한 샤워헤드 대면 플레이트 (removable showerhead faceplate) |
JP2023544116A (ja) * | 2020-09-25 | 2023-10-20 | ラム リサーチ コーポレーション | 高温プロセスのための軸方向に冷却される金属シャワーヘッド |
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-
2010
- 2010-01-21 JP JP2010000333U patent/JP3160877U/ja not_active Expired - Lifetime
- 2010-01-21 KR KR2020100000703U patent/KR200464037Y1/ko active IP Right Grant
- 2010-01-22 TW TW099201343U patent/TWM396561U/zh not_active IP Right Cessation
- 2010-01-22 CN CN2010201141288U patent/CN201781676U/zh not_active Expired - Lifetime
- 2010-05-11 JP JP2010003065U patent/JP3161173U/ja not_active Expired - Lifetime
- 2010-10-12 FR FR1058302A patent/FR2951317B1/fr active Active
- 2010-10-13 SG SG201007631-3A patent/SG170697A1/en unknown
- 2010-10-13 US US12/903,412 patent/US9245716B2/en active Active
- 2010-10-13 DE DE202010014257U patent/DE202010014257U1/de not_active Expired - Lifetime
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- 2015-12-09 US US14/964,103 patent/US10262834B2/en active Active
Also Published As
Publication number | Publication date |
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US20160086776A1 (en) | 2016-03-24 |
JP3160877U (ja) | 2010-07-15 |
SG170697A1 (en) | 2011-05-30 |
DE202010014257U1 (de) | 2011-03-17 |
US20110083809A1 (en) | 2011-04-14 |
TWM396561U (en) | 2011-01-11 |
KR20110003902U (ko) | 2011-04-20 |
US9245716B2 (en) | 2016-01-26 |
KR200464037Y1 (ko) | 2012-12-07 |
US10262834B2 (en) | 2019-04-16 |
FR2951317A1 (fr) | 2011-04-15 |
CN201781676U (zh) | 2011-03-30 |
JP3161173U (ja) | 2010-07-22 |
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