JP3161173U - ガスケット - Google Patents
ガスケット Download PDFInfo
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- JP3161173U JP3161173U JP2010003065U JP2010003065U JP3161173U JP 3161173 U JP3161173 U JP 3161173U JP 2010003065 U JP2010003065 U JP 2010003065U JP 2010003065 U JP2010003065 U JP 2010003065U JP 3161173 U JP3161173 U JP 3161173U
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
- F16J15/0825—Flat gaskets laminated
- F16J15/0831—Flat gaskets laminated with mounting aids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0887—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/121—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal reinforcement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32605—Removable or replaceable electrodes or electrode systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
- F16J2015/0856—Flat gaskets with a non-metallic coating or strip
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
Abstract
Description
102A、102B 熱制御プレート
104A、104B 上方プレート、上部プレート
106A、106B ガス注入穴
108A 位置合わせピン
108B 位置合わせリング
109A 位置合わせピン
110A、110B 上方電極
120A、120B 内側電極
120aa、120ba プラズマ暴露される表面
120ab、120bb 設置表面
130A、130B 外側電極
140A、140B 受け板
150A、150B クランプリング
160A ボルト
160B カムロック
170A、170B 圧縮リング
190 環状シュラウド
205 スタッド、ロックピン
207A カムシャフト
207B 細長カムシャフト
209 カムシャフト軸受
211A、211B 受け板ボア
213 ソケット
215 円板ばねスタック
301 スタッド/円板ばねアセンブリ
303 スタッド/ソケットアセンブリ
400A 分解図
401 キーイングピン
402 キースタッド
403A、403B 六角開口
420A 側部立面図
440A、440B カッターパス縁部
R1、R2 半径
520A、520B ねじ山付き止まり穴
530aa、530ab、530ac、530ba、530bb、530bc 止まり穴
532a、532b 内方段部
532aa、532ba 垂直方向表面
532ab、532bb 水平方向表面
534a、534b 外方段部
534aa、534ba 垂直方向表面
534ab、534bb 水平方向表面
540A、540Ba、540Bb 平滑な止まり穴
550A、550B 環状溝
610A プラスチックインサート
7100 内側ガスケット
7200 環状中間ガスケット
7300 環状外方ガスケット
701 第1のリング
702 第2のリング
703 第3のリング
703x、703y 円形穴
704 第4のリング
704s、704t、704u、704v、704w、704x、704y、704z 円形穴
705 第5のリング
706 第6のリング
707 第7のリング
708a、708b、708c 小径切欠部
708x、708y、708z 大径円形外向切欠部
709a 半円形外向切欠部
709b 円形内向切欠部
712 スポーク
723a、723b、723c、723d スポーク
723ah、723bh 丸角矩形開口
734 スポーク
745a、745b、745c、745d スポーク
745ah、745bh 丸角矩形開口
756 スポーク
756h 矩形開口
767a、767b、767c、767d スポーク
767ah、767bh 矩形開口
7400 内側ガスケット
7401 第1のリング
7402 第2のリング
7403 第3のリング
7403x、7403y 円形穴
7404 第4のリング
7405 第5のリング
7406 第6のリング
7407 第7のリング
7407ah、7407bh 切欠部
7412 スポーク
7423a、7423b、7423c、7423d スポーク
7423ah、7423bh 丸角矩形開口
7434 スポーク
7445a、7445b スポーク
7456 スポーク
7467a、7467b スポーク
7500 第1の環状ガスケット
7508a、7508b、7508c 小径切欠部
7508x、7508y、7508z 大径円形外向切欠部
7609a 円形穴
7610、7620、7630 円形穴
7600 第2の環状ガスケット
7700 第3の環状ガスケット
7701 円形外向切欠部
7800 内側ガスケット
Claims (5)
- シャワーヘッド電極アセンブリ中に設置されるように構成されたガスケットセットにおける熱伝導性および導電性のガスケットであって、前記シャワーヘッド電極アセンブリは、8列の円形列のガス注入穴と、複数の位置合わせピン穴と、固定機構を受容するための位置合わせリング溝および/または複数のねじ穴とを有する内側電極、固定機構を受容するための複数のねじ穴を有する外側電極、ならびに固定機構を受容するための複数のねじ穴を有する環状シュラウドを備え、
前記ガスケットセットは、
複数のスポークにより連結された複数の同心平坦リングを備え、前記内側電極の上に設置されるように構成された内側ガスケットと、
複数の切欠部を有する平坦環状リングを備え、前記内側ガスケットを囲み、前記内側ガスケットと同心であり、前記内側電極の上に設置されるように構成された第1の環状ガスケットと、
複数の切欠部を有する平坦環状リングを備え、前記第1の環状ガスケットを囲み、前記第1の環状ガスケットと同心であり、前記外側電極の上に設置されるように構成された第2の環状ガスケットと、
複数の切欠部を有する平坦環状リングを備え、前記第2の環状ガスケットを囲み、前記第2の環状ガスケットと同心であり、前記環状シュラウドの上に設置されるように構成された第3の環状ガスケットと
から構成され、前記ガスケットは、ガス注入穴、位置合わせピン穴、前記位置合わせリング溝、および/または前記ねじ穴に対応することを特徴とする、ガスケット。 - 前記内側ガスケット中の前記同心平坦リングは、連続的である、または分節されることを特徴とする請求項1に記載のガスケット。
- 前記内側ガスケットは、約0.006インチ(0.15mm)の厚さおよび少なくとも0.1インチ(2.5mm)の幅を有する少なくとも6つの同心平坦リングを含み、第1のリングが、少なくとも0.44インチ(11mm)の内径および最大で1.35インチ(34.3mm)の外径を有し、第2のリングが、少なくとも1.35インチ(34.3mm)の内径および最大で2.68インチ(68.1mm)の外径を有し、第3のリングが、少なくとも2.68インチ(68.1mm)の内径および最大で4.23インチ(107mm)の外径を有し、第4のリングが、少なくとも4.23インチ(107mm)の内径および最大で5.79インチ(147mm)の外径を有し、第5のリングが、少なくとも5.79インチ(147mm)の内径および最大で7.34インチ(186mm)の外径を有し、第6のリングが、少なくとも7.34インチ(186mm)の内径および最大で8.89インチ(226mm)の外径を有することを特徴とする請求項1に記載のガスケット。
- (a)前記第1の環状ガスケットは、固定機構に対応するように構成された外周部の上の3つの切欠部と、位置合わせピンに対応するように構成された内周部の上の3つの切欠部とを有し、
(b)前記第2の環状ガスケットは、内周部の上の1つの切欠部と、固定機構に対応するように構成された第1の8個穴のセットと、ツールのアクセスを可能にするように構成された第2の3個穴のセットとを有し、前記第1の8個穴のセット中の前記穴の直径が、前記第2の3個穴のセット中の前記穴の直径よりも大きく、
(c)前記第3の環状ガスケットは、固定機構に対応するように構成された外周部の上の8つの切欠部を有し、内周部の上には切欠部を有さないことを特徴とする請求項1に記載のガスケット。 - (a)前記第1の環状ガスケットは、約0.006インチ(0.15mm)の厚さ、少なくとも0.1インチの幅、約11.95インチ(303.5mm)の内径、および約12.47インチ(316.7mm)の外径を有し、
(b)前記第2の環状ガスケットは、約0.006インチ(0.15mm)の厚さ、少なくとも0.1インチ(2.5mm)の幅、約13.90インチ(353.0mm)の内径、および約16.75インチの外径を有し、
(c)前記第3の環状ガスケットは、約0.006インチ(0.15mm)の厚さ、少なくとも0.1インチ(2.5mm)の幅、17.29インチ(439.2mm)の内径、および約18.69インチ(474.7mm)の外径を有することを特徴とする請求項1に記載のガスケット。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25117709P | 2009-10-13 | 2009-10-13 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010000333U Division JP3160877U (ja) | 2009-10-13 | 2010-01-21 | シャワーヘッド電極アセンブリの端部クランプ留めおよび機械固定される内側電極 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP3161173U true JP3161173U (ja) | 2010-07-22 |
Family
ID=43794874
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010000333U Expired - Lifetime JP3160877U (ja) | 2009-10-13 | 2010-01-21 | シャワーヘッド電極アセンブリの端部クランプ留めおよび機械固定される内側電極 |
JP2010003065U Expired - Lifetime JP3161173U (ja) | 2009-10-13 | 2010-05-11 | ガスケット |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010000333U Expired - Lifetime JP3160877U (ja) | 2009-10-13 | 2010-01-21 | シャワーヘッド電極アセンブリの端部クランプ留めおよび機械固定される内側電極 |
Country Status (8)
Country | Link |
---|---|
US (2) | US9245716B2 (ja) |
JP (2) | JP3160877U (ja) |
KR (1) | KR200464037Y1 (ja) |
CN (1) | CN201781676U (ja) |
DE (1) | DE202010014257U1 (ja) |
FR (1) | FR2951317B1 (ja) |
SG (1) | SG170697A1 (ja) |
TW (1) | TWM396561U (ja) |
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JP3160877U (ja) * | 2009-10-13 | 2010-07-15 | ラム リサーチ コーポレーションLam Research Corporation | シャワーヘッド電極アセンブリの端部クランプ留めおよび機械固定される内側電極 |
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- 2010-01-21 KR KR2020100000703U patent/KR200464037Y1/ko active IP Right Grant
- 2010-01-22 CN CN2010201141288U patent/CN201781676U/zh not_active Expired - Lifetime
- 2010-01-22 TW TW099201343U patent/TWM396561U/zh not_active IP Right Cessation
- 2010-05-11 JP JP2010003065U patent/JP3161173U/ja not_active Expired - Lifetime
- 2010-10-12 FR FR1058302A patent/FR2951317B1/fr active Active
- 2010-10-13 SG SG201007631-3A patent/SG170697A1/en unknown
- 2010-10-13 US US12/903,412 patent/US9245716B2/en active Active
- 2010-10-13 DE DE202010014257U patent/DE202010014257U1/de not_active Expired - Lifetime
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SG170697A1 (en) | 2011-05-30 |
US9245716B2 (en) | 2016-01-26 |
US10262834B2 (en) | 2019-04-16 |
US20160086776A1 (en) | 2016-03-24 |
FR2951317A1 (fr) | 2011-04-15 |
US20110083809A1 (en) | 2011-04-14 |
CN201781676U (zh) | 2011-03-30 |
TWM396561U (en) | 2011-01-11 |
DE202010014257U1 (de) | 2011-03-17 |
KR20110003902U (ko) | 2011-04-20 |
KR200464037Y1 (ko) | 2012-12-07 |
FR2951317B1 (fr) | 2023-11-24 |
JP3160877U (ja) | 2010-07-15 |
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