FR2913116B1 - Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees - Google Patents

Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees

Info

Publication number
FR2913116B1
FR2913116B1 FR0753483A FR0753483A FR2913116B1 FR 2913116 B1 FR2913116 B1 FR 2913116B1 FR 0753483 A FR0753483 A FR 0753483A FR 0753483 A FR0753483 A FR 0753483A FR 2913116 B1 FR2913116 B1 FR 2913116B1
Authority
FR
France
Prior art keywords
reflective
abrasion resistance
resistance properties
optical article
improved adhesion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0753483A
Other languages
English (en)
French (fr)
Other versions
FR2913116A1 (fr
Inventor
Philippe Roisin
Michele Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EssilorLuxottica SA
Original Assignee
Essilor International Compagnie Generale dOptique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Essilor International Compagnie Generale dOptique SA filed Critical Essilor International Compagnie Generale dOptique SA
Priority to FR0753483A priority Critical patent/FR2913116B1/fr
Priority to US11/762,952 priority patent/US20080206470A1/en
Priority to PCT/EP2008/052212 priority patent/WO2008107325A1/fr
Priority to CA2679745A priority patent/CA2679745C/fr
Priority to US12/036,060 priority patent/US8318245B2/en
Priority to CN2008800057977A priority patent/CN101617248B/zh
Priority to EP08709189.8A priority patent/EP2122392B1/fr
Priority to KR1020097017474A priority patent/KR101478635B1/ko
Priority to AU2008223906A priority patent/AU2008223906B2/en
Priority to JP2009550725A priority patent/JP6022743B2/ja
Publication of FR2913116A1 publication Critical patent/FR2913116A1/fr
Application granted granted Critical
Publication of FR2913116B1 publication Critical patent/FR2913116B1/fr
Priority to US13/657,569 priority patent/US8846140B2/en
Priority to JP2014224612A priority patent/JP6143729B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Eyeglasses (AREA)
  • Laminated Bodies (AREA)
FR0753483A 2007-02-23 2007-02-23 Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees Active FR2913116B1 (fr)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR0753483A FR2913116B1 (fr) 2007-02-23 2007-02-23 Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees
US11/762,952 US20080206470A1 (en) 2007-02-23 2007-06-14 Method for Producing an Optical Article Coated with an Antireflection or a Reflective Coating Having Improved Adhesion and Abrasion Resistance Properties
JP2009550725A JP6022743B2 (ja) 2007-02-23 2008-02-22 接着性および耐摩耗性が改善された非反射または反射コーティングで被覆された光学製品の製造方法
US12/036,060 US8318245B2 (en) 2007-02-23 2008-02-22 Method for producing an optical article coated with an antireflection or a reflective coating having improved adhesion and abrasion resistance properties
CN2008800057977A CN101617248B (zh) 2007-02-23 2008-02-22 制造具有抗反射涂层或反光涂层的光学制品的方法
EP08709189.8A EP2122392B1 (fr) 2007-02-23 2008-02-22 Procede de fabrication d'un article d'optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees
PCT/EP2008/052212 WO2008107325A1 (fr) 2007-02-23 2008-02-22 Procede de fabrication d'un article d'optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees
AU2008223906A AU2008223906B2 (en) 2007-02-23 2008-02-22 Process for manufacturing an optical article coated with an antireflection or reflective coating having improved adhesion and abrasion-resistance properties
CA2679745A CA2679745C (fr) 2007-02-23 2008-02-22 Procede de fabrication d'un article d'optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees
KR1020097017474A KR101478635B1 (ko) 2007-02-23 2008-02-22 향상된 부착성 및 내마모성을 갖는 반사방지 코팅 또는 반사 코팅이 피복된 광학 물품의 제조 방법
US13/657,569 US8846140B2 (en) 2007-02-23 2012-10-22 Method for producing an optical article coated with an antireflection or a reflective coating having improved adhesion and abrasion resistance properties
JP2014224612A JP6143729B2 (ja) 2007-02-23 2014-11-04 接着性および耐摩耗性が改善された非反射または反射コーティングで被覆された光学製品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0753483A FR2913116B1 (fr) 2007-02-23 2007-02-23 Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees

Publications (2)

Publication Number Publication Date
FR2913116A1 FR2913116A1 (fr) 2008-08-29
FR2913116B1 true FR2913116B1 (fr) 2009-08-28

Family

ID=38515865

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0753483A Active FR2913116B1 (fr) 2007-02-23 2007-02-23 Procede de fabrication d'un article optique revetu d'un revetement anti-reflets ou reflechissant ayant des proprietes d'adhesion et de resistance a l'abrasion ameliorees

Country Status (9)

Country Link
US (1) US20080206470A1 (https=)
EP (1) EP2122392B1 (https=)
JP (2) JP6022743B2 (https=)
KR (1) KR101478635B1 (https=)
CN (1) CN101617248B (https=)
AU (1) AU2008223906B2 (https=)
CA (1) CA2679745C (https=)
FR (1) FR2913116B1 (https=)
WO (1) WO2008107325A1 (https=)

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FR2913116A1 (fr) 2008-08-29
US20080206470A1 (en) 2008-08-28
CN101617248A (zh) 2009-12-30
CA2679745C (fr) 2014-04-08
JP6143729B2 (ja) 2017-06-07
AU2008223906B2 (en) 2013-09-05
EP2122392A1 (fr) 2009-11-25
EP2122392B1 (fr) 2019-12-18
JP6022743B2 (ja) 2016-11-09
CN101617248B (zh) 2012-01-25
JP2010519586A (ja) 2010-06-03
JP2015035000A (ja) 2015-02-19
KR101478635B1 (ko) 2015-01-05
WO2008107325A1 (fr) 2008-09-12
CA2679745A1 (fr) 2008-09-12
KR20100014819A (ko) 2010-02-11
AU2008223906A1 (en) 2008-09-12

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