FR2853454B1 - Transistor mos haute densite - Google Patents

Transistor mos haute densite

Info

Publication number
FR2853454B1
FR2853454B1 FR0304143A FR0304143A FR2853454B1 FR 2853454 B1 FR2853454 B1 FR 2853454B1 FR 0304143 A FR0304143 A FR 0304143A FR 0304143 A FR0304143 A FR 0304143A FR 2853454 B1 FR2853454 B1 FR 2853454B1
Authority
FR
France
Prior art keywords
high density
transistor mos
mos high
transistor
density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0304143A
Other languages
English (en)
Other versions
FR2853454A1 (fr
Inventor
Philippe Coronel
Yves Morand
Thomas Skotnicki
Robin Cerutti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0304143A priority Critical patent/FR2853454B1/fr
Priority to US10/817,147 priority patent/US7141837B2/en
Publication of FR2853454A1 publication Critical patent/FR2853454A1/fr
Application granted granted Critical
Publication of FR2853454B1 publication Critical patent/FR2853454B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
    • H01L29/42392—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor fully surrounding the channel, e.g. gate-all-around
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
    • H01L29/78648—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate arranged on opposing sides of the channel

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
FR0304143A 2003-04-03 2003-04-03 Transistor mos haute densite Expired - Fee Related FR2853454B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0304143A FR2853454B1 (fr) 2003-04-03 2003-04-03 Transistor mos haute densite
US10/817,147 US7141837B2 (en) 2003-04-03 2004-04-02 High-density MOS transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0304143A FR2853454B1 (fr) 2003-04-03 2003-04-03 Transistor mos haute densite

Publications (2)

Publication Number Publication Date
FR2853454A1 FR2853454A1 (fr) 2004-10-08
FR2853454B1 true FR2853454B1 (fr) 2005-07-15

Family

ID=32982204

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0304143A Expired - Fee Related FR2853454B1 (fr) 2003-04-03 2003-04-03 Transistor mos haute densite

Country Status (2)

Country Link
US (1) US7141837B2 (fr)
FR (1) FR2853454B1 (fr)

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KR100471173B1 (ko) * 2003-05-15 2005-03-10 삼성전자주식회사 다층채널을 갖는 트랜지스터 및 그 제조방법
US7074657B2 (en) * 2003-11-14 2006-07-11 Advanced Micro Devices, Inc. Low-power multiple-channel fully depleted quantum well CMOSFETs
KR100625177B1 (ko) * 2004-05-25 2006-09-20 삼성전자주식회사 멀티-브리지 채널형 모오스 트랜지스터의 제조 방법
JP4796329B2 (ja) * 2004-05-25 2011-10-19 三星電子株式会社 マルチ−ブリッジチャンネル型ｍｏｓトランジスタの製造方法
FR2884052B1 (fr) * 2005-03-30 2007-06-22 St Microelectronics Crolles 2 Transistor imos
US7385234B2 (en) * 2005-04-27 2008-06-10 International Business Machines Corporation Memory and logic devices using electronically scannable multiplexing devices
CN101208804A (zh) * 2005-06-27 2008-06-25 Nxp股份有限公司 制造半导体器件的方法以及用该方法获得的半导体器件
US7566622B2 (en) * 2005-07-06 2009-07-28 International Rectifier Corporation Early contact, high cell density process
US7354831B2 (en) * 2005-08-08 2008-04-08 Freescale Semiconductor, Inc. Multi-channel transistor structure and method of making thereof
KR100630764B1 (ko) * 2005-08-30 2006-10-04 삼성전자주식회사 게이트 올어라운드 반도체소자 및 그 제조방법
KR100630763B1 (ko) * 2005-08-30 2006-10-04 삼성전자주식회사 다중 채널을 갖는 ｍｏｓ 트랜지스터의 제조방법
FR2895835B1 (fr) * 2005-12-30 2008-05-09 Commissariat Energie Atomique Realisation sur une structure de canal a plusieurs branches d'une grille de transistor et de moyens pour isoler cette grille des regions de source et de drain
FR2897201B1 (fr) * 2006-02-03 2008-04-25 Stmicroelectronics Crolles Sas Dispositif de transistor a doubles grilles planaires et procede de fabrication.
FR2897202B1 (fr) * 2006-02-08 2008-09-12 St Microelectronics Crolles 2 Transistor mos a barriere de schottky sur film semi-conducteur entierement appauvri et procede de fabrication d'un tel transistor.
US20070257322A1 (en) * 2006-05-08 2007-11-08 Freescale Semiconductor, Inc. Hybrid Transistor Structure and a Method for Making the Same
FR2921757B1 (fr) * 2007-09-28 2009-12-18 Commissariat Energie Atomique Structure de transistor double-grille dotee d'un canal a plusieurs branches.
WO2009081345A1 (fr) * 2007-12-21 2009-07-02 Nxp B.V. Procédé de fabrication amélioré pour des transistors à grille indépendante ou à grille enveloppante
FR2928028B1 (fr) * 2008-02-27 2011-07-15 St Microelectronics Crolles 2 Procede de fabrication d'un dispositif semi-conducteur a grille enterree et circuit integre correspondant.
FR2928029B1 (fr) 2008-02-27 2011-04-08 St Microelectronics Crolles 2 Procede de fabrication d'un dispositif semi-conducteur a grille enterree et circuit integre correspondant.
KR101471858B1 (ko) * 2008-09-05 2014-12-12 삼성전자주식회사 바 타입의 액티브 패턴을 구비하는 반도체 장치 및 그 제조방법
US8211759B2 (en) 2010-10-21 2012-07-03 International Business Machines Corporation Semiconductor structure and methods of manufacture
US8524545B2 (en) * 2010-10-22 2013-09-03 International Business Machines Corporation Simultaneous formation of FinFET and MUGFET
US8524546B2 (en) * 2010-10-22 2013-09-03 International Business Machines Corporation Formation of multi-height MUGFET
US8753942B2 (en) 2010-12-01 2014-06-17 Intel Corporation Silicon and silicon germanium nanowire structures
WO2013095651A1 (fr) 2011-12-23 2013-06-27 Intel Corporation Grille non planaire tout autour d'un dispositif et son procédé de fabrication
FR3005309B1 (fr) 2013-05-02 2016-03-11 Commissariat Energie Atomique Transistors a nanofils et planaires cointegres sur substrat soi utbox
US9306019B2 (en) * 2014-08-12 2016-04-05 GlobalFoundries, Inc. Integrated circuits with nanowires and methods of manufacturing the same
US9391163B2 (en) 2014-10-03 2016-07-12 International Business Machines Corporation Stacked planar double-gate lamellar field-effect transistor
US11152488B2 (en) * 2019-08-21 2021-10-19 Taiwan Semiconductor Manufacturing Co., Ltd. Gate-all-around structure with dummy pattern top in channel region and methods of forming the same
KR20220031321A (ko) 2020-09-04 2022-03-11 에스케이하이닉스 주식회사 메모리 장치

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KR960002088B1 (ko) * 1993-02-17 1996-02-10 삼성전자주식회사 에스오아이(SOI : silicon on insulator) 구조의 반도체 장치 제조방법
JPH118390A (ja) * 1997-06-18 1999-01-12 Mitsubishi Electric Corp 半導体装置及びその製造方法
US6207530B1 (en) * 1998-06-19 2001-03-27 International Business Machines Corporation Dual gate FET and process
DE19928564A1 (de) * 1999-06-22 2001-01-04 Infineon Technologies Ag Mehrkanal-MOSFET und Verfahren zu seiner Herstellung
FR2799305B1 (fr) * 1999-10-05 2004-06-18 St Microelectronics Sa Procede de fabrication d'un dispositif semi-conducteur a grille enveloppante et dispositif obtenu
FR2806833B1 (fr) * 2000-03-27 2002-06-14 St Microelectronics Sa Procede de fabrication d'un transistor mos a deux grilles, dont l'une est enterree, et transistor correspondant
TW490745B (en) * 2000-05-15 2002-06-11 Ibm Self-aligned double gate MOSFET with separate gates
US6396108B1 (en) * 2000-11-13 2002-05-28 Advanced Micro Devices, Inc. Self-aligned double gate silicon-on-insulator (SOI) device

Also Published As

Publication number Publication date
US20040262690A1 (en) 2004-12-30
FR2853454A1 (fr) 2004-10-08
US7141837B2 (en) 2006-11-28

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Effective date: 20081231