FR2802700B1 - Structure d'inductance sur substrat semiconducteur - Google Patents

Structure d'inductance sur substrat semiconducteur

Info

Publication number
FR2802700B1
FR2802700B1 FR9915840A FR9915840A FR2802700B1 FR 2802700 B1 FR2802700 B1 FR 2802700B1 FR 9915840 A FR9915840 A FR 9915840A FR 9915840 A FR9915840 A FR 9915840A FR 2802700 B1 FR2802700 B1 FR 2802700B1
Authority
FR
France
Prior art keywords
semiconductor substrate
inductance structure
inductance
semiconductor
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9915840A
Other languages
English (en)
Other versions
FR2802700A1 (fr
Inventor
Frederic Lemaire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR9915840A priority Critical patent/FR2802700B1/fr
Priority to JP2000377431A priority patent/JP2001223116A/ja
Priority to US09/737,619 priority patent/US6462396B2/en
Priority to EP00410155A priority patent/EP1109179A1/fr
Publication of FR2802700A1 publication Critical patent/FR2802700A1/fr
Application granted granted Critical
Publication of FR2802700B1 publication Critical patent/FR2802700B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
    • H01F27/36—Electric or magnetic shields or screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
    • H01F27/36—Electric or magnetic shields or screens
    • H01F27/363—Electric or magnetic shields or screens made of electrically conductive material

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Waveguides (AREA)
FR9915840A 1999-12-15 1999-12-15 Structure d'inductance sur substrat semiconducteur Expired - Fee Related FR2802700B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9915840A FR2802700B1 (fr) 1999-12-15 1999-12-15 Structure d'inductance sur substrat semiconducteur
JP2000377431A JP2001223116A (ja) 1999-12-15 2000-12-12 半導体基板上のインダクタンス構造体
US09/737,619 US6462396B2 (en) 1999-12-15 2000-12-14 Inductance structure on semiconductor substrate
EP00410155A EP1109179A1 (fr) 1999-12-15 2000-12-15 Structure d'inductance sur substrat semiconducteur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9915840A FR2802700B1 (fr) 1999-12-15 1999-12-15 Structure d'inductance sur substrat semiconducteur

Publications (2)

Publication Number Publication Date
FR2802700A1 FR2802700A1 (fr) 2001-06-22
FR2802700B1 true FR2802700B1 (fr) 2002-07-19

Family

ID=9553303

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9915840A Expired - Fee Related FR2802700B1 (fr) 1999-12-15 1999-12-15 Structure d'inductance sur substrat semiconducteur

Country Status (4)

Country Link
US (1) US6462396B2 (fr)
EP (1) EP1109179A1 (fr)
JP (1) JP2001223116A (fr)
FR (1) FR2802700B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4776752B2 (ja) * 2000-04-19 2011-09-21 ルネサスエレクトロニクス株式会社 半導体装置
US7061072B2 (en) * 2002-12-26 2006-06-13 Jbcr Innovations, Llp Integrated circuit inductors using driven shields
US7340703B2 (en) * 2004-08-02 2008-03-04 Hazem Mahmoud Hegazy Test structures and method for interconnect impedance property extraction
US9780572B2 (en) * 2014-10-27 2017-10-03 Qualcomm Incorporated Wireless power multi-coil mutual induction cancellation methods and apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5760456A (en) * 1995-12-21 1998-06-02 Grzegorek; Andrew Z. Integrated circuit compatible planar inductors with increased Q
US5717243A (en) * 1996-04-24 1998-02-10 Harris Corporation Integrated circuit with an improved inductor structure and method of fabrication
DE69737411T2 (de) * 1997-02-28 2007-10-31 Telefonaktiebolaget Lm Ericsson (Publ) Verbesserter q-Induktor mit mehreren Metallisierungsschichten
US5936299A (en) * 1997-03-13 1999-08-10 International Business Machines Corporation Substrate contact for integrated spiral inductors
WO1998050956A1 (fr) * 1997-05-02 1998-11-12 The Board Of Trustees Of The Leland Stanford Junior University Blindages de masse a motifs geometriques pour inducteurs de circuits integres
US6310387B1 (en) * 1999-05-03 2001-10-30 Silicon Wave, Inc. Integrated circuit inductor with high self-resonance frequency

Also Published As

Publication number Publication date
US20010015473A1 (en) 2001-08-23
EP1109179A1 (fr) 2001-06-20
US6462396B2 (en) 2002-10-08
FR2802700A1 (fr) 2001-06-22
JP2001223116A (ja) 2001-08-17

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Legal Events

Date Code Title Description
ST Notification of lapse