DE69840004D1 - Silizium-Halbleiterwafer mit idealem Sauerstoff-Ablagerungsverhalten - Google Patents
Silizium-Halbleiterwafer mit idealem Sauerstoff-AblagerungsverhaltenInfo
- Publication number
- DE69840004D1 DE69840004D1 DE69840004T DE69840004T DE69840004D1 DE 69840004 D1 DE69840004 D1 DE 69840004D1 DE 69840004 T DE69840004 T DE 69840004T DE 69840004 T DE69840004 T DE 69840004T DE 69840004 D1 DE69840004 D1 DE 69840004D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor wafers
- silicon semiconductor
- oxygen deposition
- deposition behavior
- ideal oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
- H01L21/3225—Thermally inducing defects using oxygen present in the silicon body for intrinsic gettering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/913—Active solid-state devices, e.g. transistors, solid-state diodes with means to absorb or localize unwanted impurities or defects from semiconductors, e.g. heavy metal gettering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249967—Inorganic matrix in void-containing component
- Y10T428/249969—Of silicon-containing material [e.g., glass, etc.]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/806,436 US5994761A (en) | 1997-02-26 | 1997-02-26 | Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69840004D1 true DE69840004D1 (de) | 2008-10-23 |
Family
ID=25194044
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69840004T Expired - Lifetime DE69840004D1 (de) | 1997-02-26 | 1998-02-25 | Silizium-Halbleiterwafer mit idealem Sauerstoff-Ablagerungsverhalten |
DE1998617365 Expired - Lifetime DE69817365T2 (de) | 1997-02-26 | 1998-02-25 | Sauerstoffausdiffusionsloses sauerstoff-ausfällungsverfahren in siliziumwafer |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1998617365 Expired - Lifetime DE69817365T2 (de) | 1997-02-26 | 1998-02-25 | Sauerstoffausdiffusionsloses sauerstoff-ausfällungsverfahren in siliziumwafer |
Country Status (9)
Country | Link |
---|---|
US (7) | US5994761A (de) |
EP (3) | EP1300879B1 (de) |
JP (1) | JP3288721B2 (de) |
KR (2) | KR100395391B1 (de) |
CN (1) | CN1158696C (de) |
DE (2) | DE69840004D1 (de) |
MY (1) | MY132868A (de) |
TW (1) | TW528815B (de) |
WO (1) | WO1998038675A1 (de) |
Families Citing this family (116)
Publication number | Priority date | Publication date | Assignee | Title |
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US6503594B2 (en) * | 1997-02-13 | 2003-01-07 | Samsung Electronics Co., Ltd. | Silicon wafers having controlled distribution of defects and slip |
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US5994761A (en) | 1997-02-26 | 1999-11-30 | Memc Electronic Materials Spa | Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
US6379642B1 (en) * | 1997-04-09 | 2002-04-30 | Memc Electronic Materials, Inc. | Vacancy dominated, defect-free silicon |
TW577939B (en) * | 1997-04-09 | 2004-03-01 | Memc Electronic Materials | A process for growing a single crystal silicon ingot |
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DE69928434T2 (de) * | 1998-09-02 | 2006-07-27 | Memc Electronic Materials, Inc. | Wärmebehandelte siliziumplättchen mit verbesserter eigengetterung |
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-
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-
1998
- 1998-02-25 DE DE69840004T patent/DE69840004D1/de not_active Expired - Lifetime
- 1998-02-25 EP EP20020027280 patent/EP1300879B1/de not_active Expired - Lifetime
- 1998-02-25 TW TW87102740A patent/TW528815B/zh not_active IP Right Cessation
- 1998-02-25 KR KR10-1999-7007814A patent/KR100395391B1/ko not_active IP Right Cessation
- 1998-02-25 MY MYPI98000816A patent/MY132868A/en unknown
- 1998-02-25 EP EP98906703A patent/EP1002335B1/de not_active Expired - Lifetime
- 1998-02-25 EP EP20080015848 patent/EP2028682A1/de not_active Withdrawn
- 1998-02-25 JP JP53781498A patent/JP3288721B2/ja not_active Expired - Lifetime
- 1998-02-25 WO PCT/US1998/003686 patent/WO1998038675A1/en active IP Right Grant
- 1998-02-25 CN CNB988036959A patent/CN1158696C/zh not_active Expired - Fee Related
- 1998-02-25 US US09/030,110 patent/US6180220B1/en not_active Expired - Lifetime
- 1998-02-25 KR KR1020027009772A patent/KR20030097601A/ko not_active Application Discontinuation
- 1998-02-25 DE DE1998617365 patent/DE69817365T2/de not_active Expired - Lifetime
-
1999
- 1999-06-30 US US09/340,489 patent/US6204152B1/en not_active Expired - Lifetime
-
2000
- 2000-07-27 US US09/626,635 patent/US6306733B1/en not_active Expired - Lifetime
- 2000-11-02 US US09/704,893 patent/US6586068B1/en not_active Expired - Lifetime
-
2001
- 2001-08-13 US US09/928,739 patent/US6537368B2/en not_active Expired - Lifetime
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2003
- 2003-05-06 US US10/430,798 patent/US6849119B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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KR20030097601A (ko) | 2003-12-31 |
EP1002335B1 (de) | 2003-08-20 |
WO1998038675A1 (en) | 1998-09-03 |
EP1002335A4 (de) | 2000-05-24 |
CN1251206A (zh) | 2000-04-19 |
US20030196586A1 (en) | 2003-10-23 |
MY132868A (en) | 2007-10-31 |
EP1002335A1 (de) | 2000-05-24 |
KR100395391B1 (ko) | 2003-08-25 |
US6180220B1 (en) | 2001-01-30 |
EP1300879B1 (de) | 2008-09-10 |
KR20000075744A (ko) | 2000-12-26 |
CN1158696C (zh) | 2004-07-21 |
US6306733B1 (en) | 2001-10-23 |
DE69817365T2 (de) | 2004-06-24 |
JP2001509319A (ja) | 2001-07-10 |
EP1300879A3 (de) | 2005-03-16 |
US5994761A (en) | 1999-11-30 |
US6537368B2 (en) | 2003-03-25 |
DE69817365D1 (de) | 2003-09-25 |
JP3288721B2 (ja) | 2002-06-04 |
US6204152B1 (en) | 2001-03-20 |
EP2028682A1 (de) | 2009-02-25 |
EP1300879A2 (de) | 2003-04-09 |
US20020026893A1 (en) | 2002-03-07 |
US6586068B1 (en) | 2003-07-01 |
US6849119B2 (en) | 2005-02-01 |
TW528815B (en) | 2003-04-21 |
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