FR2785614B1 - Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium - Google Patents

Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium

Info

Publication number
FR2785614B1
FR2785614B1 FR9814073A FR9814073A FR2785614B1 FR 2785614 B1 FR2785614 B1 FR 2785614B1 FR 9814073 A FR9814073 A FR 9814073A FR 9814073 A FR9814073 A FR 9814073A FR 2785614 B1 FR2785614 B1 FR 2785614B1
Authority
FR
France
Prior art keywords
chemical polishing
mechanical chemical
silicon oxide
silicon nitride
oxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9814073A
Other languages
English (en)
French (fr)
Other versions
FR2785614A1 (fr
Inventor
Eric Jacquinot
Pascal Letourneau
Maurice Rivoire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Merck Patent GmbH
Original Assignee
Clariant France SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clariant France SA filed Critical Clariant France SA
Priority to FR9814073A priority Critical patent/FR2785614B1/fr
Priority to US09/427,675 priority patent/US7144814B2/en
Priority to SG9905375A priority patent/SG82027A1/en
Priority to EP99811011A priority patent/EP1000995B1/en
Priority to ES99811011T priority patent/ES2192029T3/es
Priority to AT99811011T priority patent/ATE232895T1/de
Priority to DE69905441T priority patent/DE69905441T2/de
Priority to MYPI99004834A priority patent/MY121115A/en
Priority to JP31614599A priority patent/JP4287002B2/ja
Priority to IDP991027D priority patent/ID23760A/id
Priority to CNB991234774A priority patent/CN1137232C/zh
Priority to KR1019990049347A priority patent/KR100562243B1/ko
Priority to TW088119539A priority patent/TW502060B/zh
Publication of FR2785614A1 publication Critical patent/FR2785614A1/fr
Priority to HK00107232.3A priority patent/HK1028254B/en
Application granted granted Critical
Publication of FR2785614B1 publication Critical patent/FR2785614B1/fr
Priority to US11/594,079 priority patent/US7252695B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
FR9814073A 1998-11-09 1998-11-09 Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium Expired - Lifetime FR2785614B1 (fr)

Priority Applications (15)

Application Number Priority Date Filing Date Title
FR9814073A FR2785614B1 (fr) 1998-11-09 1998-11-09 Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium
US09/427,675 US7144814B2 (en) 1998-11-09 1999-10-27 Abrasive composition for the integrated circuits electronics industry
SG9905375A SG82027A1 (en) 1998-11-09 1999-10-29 New abrasive composition for the integrated circuits electronics industry
EP99811011A EP1000995B1 (en) 1998-11-09 1999-11-04 Abrasive composition for the electronics industry
ES99811011T ES2192029T3 (es) 1998-11-09 1999-11-04 Composicion abrasiva para la industria electronica.
AT99811011T ATE232895T1 (de) 1998-11-09 1999-11-04 Schleifmittelzusammensetzung zur verwendung in der elektronikindustrie
DE69905441T DE69905441T2 (de) 1998-11-09 1999-11-04 Schleifmittelzusammensetzung zur Verwendung in der Elektronikindustrie
MYPI99004834A MY121115A (en) 1998-11-09 1999-11-05 Abrasive composition for the electronics industry
JP31614599A JP4287002B2 (ja) 1998-11-09 1999-11-08 集積回路電子産業のための新しい研磨組成物
IDP991027D ID23760A (id) 1998-11-09 1999-11-08 Komposisi abrasif baru untuk industri elektronik sirkuit terintegrasi
CNB991234774A CN1137232C (zh) 1998-11-09 1999-11-09 用于集成电路电子工业的新型磨料组合物
KR1019990049347A KR100562243B1 (ko) 1998-11-09 1999-11-09 집적회로 전자공업용 신규 연마 조성물
TW088119539A TW502060B (en) 1998-11-09 1999-11-09 New abrasive composition for the integrated circuits electronics industry
HK00107232.3A HK1028254B (en) 1998-11-09 2000-11-13 Abrasive composition for the electronics industry
US11/594,079 US7252695B2 (en) 1998-11-09 2006-11-08 Abrasive composition for the integrated circuit electronics industry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9814073A FR2785614B1 (fr) 1998-11-09 1998-11-09 Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium

Publications (2)

Publication Number Publication Date
FR2785614A1 FR2785614A1 (fr) 2000-05-12
FR2785614B1 true FR2785614B1 (fr) 2001-01-26

Family

ID=9532529

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9814073A Expired - Lifetime FR2785614B1 (fr) 1998-11-09 1998-11-09 Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium

Country Status (13)

Country Link
US (2) US7144814B2 (enExample)
EP (1) EP1000995B1 (enExample)
JP (1) JP4287002B2 (enExample)
KR (1) KR100562243B1 (enExample)
CN (1) CN1137232C (enExample)
AT (1) ATE232895T1 (enExample)
DE (1) DE69905441T2 (enExample)
ES (1) ES2192029T3 (enExample)
FR (1) FR2785614B1 (enExample)
ID (1) ID23760A (enExample)
MY (1) MY121115A (enExample)
SG (1) SG82027A1 (enExample)
TW (1) TW502060B (enExample)

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* Cited by examiner, † Cited by third party
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FR2785614B1 (fr) * 1998-11-09 2001-01-26 Clariant France Sa Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium
FR2792643B1 (fr) 1999-04-22 2001-07-27 Clariant France Sa Composition de polissage mecano-chimique de couches en un materiau isolant a base de polymere a faible constante dielectrique
JP4507141B2 (ja) * 2000-05-22 2010-07-21 隆章 徳永 研磨用組成物、その製造方法およびそれを用いた研磨方法
JP2001347450A (ja) * 2000-06-08 2001-12-18 Promos Technologies Inc 化学機械研磨装置
GB0118348D0 (en) * 2001-07-27 2001-09-19 Ghoshouni Amir A S Surface treatment of aluminium-based materials
US7077880B2 (en) 2004-01-16 2006-07-18 Dupont Air Products Nanomaterials Llc Surface modified colloidal abrasives, including stable bimetallic surface coated silica sols for chemical mechanical planarization
US6743267B2 (en) 2001-10-15 2004-06-01 Dupont Air Products Nanomaterials Llc Gel-free colloidal abrasive polishing compositions and associated methods
DE10152993A1 (de) * 2001-10-26 2003-05-08 Bayer Ag Zusammensetzung für das chemisch-mechanische Polieren von Metall- und Metall/Dielektrikastrukturen mit hoher Selektivität
DE10164262A1 (de) * 2001-12-27 2003-07-17 Bayer Ag Zusammensetzung für das chemisch-mechanische Polieren von Metall- und Metall/Dielektrikastrukturen
KR100444307B1 (ko) * 2001-12-28 2004-08-16 주식회사 하이닉스반도체 반도체소자의 금속배선 콘택플러그 형성방법
US20040077295A1 (en) * 2002-08-05 2004-04-22 Hellring Stuart D. Process for reducing dishing and erosion during chemical mechanical planarization
US6964600B2 (en) 2003-11-21 2005-11-15 Praxair Technology, Inc. High selectivity colloidal silica slurry
US20050288397A1 (en) 2004-06-29 2005-12-29 Matthew Piazza Viscous materials and method for producing
US8163049B2 (en) 2006-04-18 2012-04-24 Dupont Air Products Nanomaterials Llc Fluoride-modified silica sols for chemical mechanical planarization
FR2910180A1 (fr) * 2006-12-15 2008-06-20 St Microelectronics Procede de fabrication d'un transistor cmos a grilles metalliques duales.
US7691287B2 (en) * 2007-01-31 2010-04-06 Dupont Air Products Nanomaterials Llc Method for immobilizing ligands and organometallic compounds on silica surface, and their application in chemical mechanical planarization
CN102268224B (zh) * 2010-06-01 2013-12-04 中国科学院上海微系统与信息技术研究所 可控氧化硅去除速率的化学机械抛光液
TWI542678B (zh) 2011-05-24 2016-07-21 可樂麗股份有限公司 化學機械研磨用侵蝕防止劑、化學機械研磨用漿液及化學機械研磨方法
CN103943491B (zh) * 2014-04-28 2016-08-24 华进半导体封装先导技术研发中心有限公司 在转接板工艺中采用cmp对基板表面进行平坦化的方法
CN105081996A (zh) * 2014-05-21 2015-11-25 浙江师范大学 一种软弹性抛光磨具的制备工艺
US10037889B1 (en) 2017-03-29 2018-07-31 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Cationic particle containing slurries and methods of using them for CMP of spin-on carbon films
JP7141837B2 (ja) * 2018-03-23 2022-09-26 株式会社フジミインコーポレーテッド 研磨用組成物、研磨用組成物の製造方法、研磨方法、および半導体基板の製造方法
US10759970B2 (en) * 2018-12-19 2020-09-01 Fujifilm Electronic Materials U.S.A., Inc. Polishing compositions and methods of using same
US10763119B2 (en) * 2018-12-19 2020-09-01 Fujifilm Electronic Materials U.S.A., Inc. Polishing compositions and methods of using same

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FR2558827B1 (fr) 1984-01-27 1986-06-27 Azote & Prod Chim Procede de fabrication de nitromethane et installation
JPS61195183A (ja) * 1985-02-22 1986-08-29 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 研磨粉固定型ポリウレタン研磨材料
JPH04291723A (ja) * 1991-03-20 1992-10-15 Asahi Denka Kogyo Kk シリコンウェハー用研摩剤
US5527423A (en) * 1994-10-06 1996-06-18 Cabot Corporation Chemical mechanical polishing slurry for metal layers
JP3192968B2 (ja) 1995-06-08 2001-07-30 株式会社東芝 銅系金属用研磨液および半導体装置の製造方法
US6046110A (en) 1995-06-08 2000-04-04 Kabushiki Kaisha Toshiba Copper-based metal polishing solution and method for manufacturing a semiconductor device
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5624303A (en) * 1996-01-22 1997-04-29 Micron Technology, Inc. Polishing pad and a method for making a polishing pad with covalently bonded particles
US5733176A (en) * 1996-05-24 1998-03-31 Micron Technology, Inc. Polishing pad and method of use
US5769691A (en) * 1996-06-14 1998-06-23 Speedfam Corp Methods and apparatus for the chemical mechanical planarization of electronic devices
US5738800A (en) * 1996-09-27 1998-04-14 Rodel, Inc. Composition and method for polishing a composite of silica and silicon nitride
FR2754937B1 (fr) * 1996-10-23 1999-01-15 Hoechst France Nouveau procede de polissage mecano-chimique de couches de materiaux isolants a base de derives du silicium ou de silicium
US5759917A (en) * 1996-12-30 1998-06-02 Cabot Corporation Composition for oxide CMP
DE69830676D1 (de) * 1997-01-10 2005-08-04 Texas Instruments Inc CMP Suspension mit hoher Selektivität
FR2761629B1 (fr) * 1997-04-07 1999-06-18 Hoechst France Nouveau procede de polissage mecano-chimique de couches de materiaux semi-conducteurs a base de polysilicium ou d'oxyde de silicium dope
FR2772777B1 (fr) 1997-12-23 2000-03-10 Clariant Chimie Sa Compositions silico-acryliques, procede de preparation et application pour l'obtention de revetements durcissables thermiquement ou par rayonnement
FR2785614B1 (fr) * 1998-11-09 2001-01-26 Clariant France Sa Nouveau procede de polissage mecano-chimique selectif entre une couche d'oxyde de silicium et une couche de nitrure de silicium

Also Published As

Publication number Publication date
MY121115A (en) 2005-12-30
KR20000035309A (ko) 2000-06-26
SG82027A1 (en) 2001-07-24
ATE232895T1 (de) 2003-03-15
KR100562243B1 (ko) 2006-03-22
ES2192029T3 (es) 2003-09-16
US20020142600A1 (en) 2002-10-03
US20070051918A1 (en) 2007-03-08
JP4287002B2 (ja) 2009-07-01
US7252695B2 (en) 2007-08-07
FR2785614A1 (fr) 2000-05-12
CN1137232C (zh) 2004-02-04
ID23760A (id) 2000-05-11
EP1000995A1 (en) 2000-05-17
JP2000144111A (ja) 2000-05-26
US7144814B2 (en) 2006-12-05
TW502060B (en) 2002-09-11
CN1253160A (zh) 2000-05-17
EP1000995B1 (en) 2003-02-19
DE69905441D1 (de) 2003-03-27
HK1028254A1 (en) 2001-02-09
DE69905441T2 (de) 2003-11-27

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Owner name: MERCK PATENT GMBH, DE

Effective date: 20150204

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Year of fee payment: 19

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