FR2592031A1 - Procede et dispositif pour former un revetement sur du verre - Google Patents

Procede et dispositif pour former un revetement sur du verre

Info

Publication number
FR2592031A1
FR2592031A1 FR8615819A FR8615819A FR2592031A1 FR 2592031 A1 FR2592031 A1 FR 2592031A1 FR 8615819 A FR8615819 A FR 8615819A FR 8615819 A FR8615819 A FR 8615819A FR 2592031 A1 FR2592031 A1 FR 2592031A1
Authority
FR
France
Prior art keywords
coating
chamber
oxidizing gas
reactant
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8615819A
Other languages
English (en)
Other versions
FR2592031B1 (fr
Inventor
Jean-Francois Thomas
Robert Terneu
Albert Van Cauter
Robert Van Laethem
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Glass Europe SA
Original Assignee
Glaverbel Belgium SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel Belgium SA filed Critical Glaverbel Belgium SA
Publication of FR2592031A1 publication Critical patent/FR2592031A1/fr
Application granted granted Critical
Publication of FR2592031B1 publication Critical patent/FR2592031B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/405—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)

Abstract

Procédé et dispositif pour déposer, par voie pyrolytique, un revêtement d'oxyde sur un substrat de verre chaud 1 (feuille ou ruban) qui se déplace sous une chambre de traitement 6 ouverte vers le bas. Le revêtement est formé à partir de réactif et de gaz oxydant qui sont introduits dans une zone de mélange 7 de la chambre adjacente à un passage 11 le long duquel un mélange de gaz oxydant et de vapeur de réactif s'écoule, en contact avec la face du substrat à revêtir. L'invention convient par exemple à la formation de couches d'oxydes d'étain. (CF DESSIN DANS BOPI)
FR868615819A 1985-12-20 1986-11-12 Procede et dispositif pour former un revetement sur du verre Expired - Lifetime FR2592031B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858531424A GB8531424D0 (en) 1985-12-20 1985-12-20 Coating glass

Publications (2)

Publication Number Publication Date
FR2592031A1 true FR2592031A1 (fr) 1987-06-26
FR2592031B1 FR2592031B1 (fr) 1992-06-05

Family

ID=10590074

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868615819A Expired - Lifetime FR2592031B1 (fr) 1985-12-20 1986-11-12 Procede et dispositif pour former un revetement sur du verre

Country Status (15)

Country Link
US (1) US4878934A (fr)
JP (1) JP2527543B2 (fr)
AT (1) AT397498B (fr)
BE (1) BE905731A (fr)
CA (1) CA1300438C (fr)
CH (1) CH670819A5 (fr)
DE (1) DE3638426C2 (fr)
ES (1) ES2002550A6 (fr)
FR (1) FR2592031B1 (fr)
GB (2) GB8531424D0 (fr)
IT (1) IT1195833B (fr)
LU (1) LU86666A1 (fr)
NL (1) NL193943C (fr)
NO (1) NO168764C (fr)
SE (1) SE463767B (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8824102D0 (en) * 1988-10-14 1988-11-23 Pilkington Plc Apparatus for coating glass
FR2677639B1 (fr) * 1991-06-14 1994-02-25 Saint Gobain Vitrage Internal Technique de formation par pyrolyse en voie gazeuse d'un revetement essentiellement a base d'oxygene et de silicium.
US5393563A (en) * 1991-10-29 1995-02-28 Ellis, Jr.; Frank B. Formation of tin oxide films on glass substrates
US5749931A (en) * 1993-07-08 1998-05-12 Libbey-Owens-Ford Co. Coatings on glass
US6238738B1 (en) 1996-08-13 2001-05-29 Libbey-Owens-Ford Co. Method for depositing titanium oxide coatings on flat glass
US6027766A (en) 1997-03-14 2000-02-22 Ppg Industries Ohio, Inc. Photocatalytically-activated self-cleaning article and method of making same
US7096692B2 (en) 1997-03-14 2006-08-29 Ppg Industries Ohio, Inc. Visible-light-responsive photoactive coating, coated article, and method of making same
KR100291482B1 (ko) 1997-06-24 2001-06-01 시부키 유키오 이산화티탄 결정배향막을 갖는 재료 및 그 제조방법
EP1010676A1 (fr) * 1998-12-14 2000-06-21 VENJAKOB MASCHINENBAU GmbH & Co.KG Dispositif de revêtement par pyrolyse de verre plat
GB9913315D0 (en) 1999-06-08 1999-08-11 Pilkington Plc Improved process for coating glass
DE102005023582B4 (de) * 2005-05-18 2009-04-16 Schott Ag Verfahren zur Herstellung von innenvergüteten Glasrohren
US7654010B2 (en) * 2006-02-23 2010-02-02 Tokyo Electron Limited Substrate processing system, substrate processing method, and storage medium
US20090214770A1 (en) * 2008-02-21 2009-08-27 Dilip Kumar Chatterjee Conductive film formation during glass draw
US20100126227A1 (en) * 2008-11-24 2010-05-27 Curtis Robert Fekety Electrostatically depositing conductive films during glass draw
FI20080675A0 (fi) * 2008-12-23 2008-12-23 Beneq Oy Lasinpinnoitusmenetelmä ja -laite
FI20105719A0 (fi) * 2010-06-21 2010-06-21 Beneq Oy Pinnoituslaite
KR101509864B1 (ko) * 2012-11-07 2015-04-06 (주)엘지하우시스 비산 파우더 크리닝 장치
WO2015169331A1 (fr) * 2014-05-05 2015-11-12 Masdar Pv Gmbh Procédé pour appliquer un matériau semi-conducteur, module à semi-conducteurs et installation de fabrication de substrat
GB201512625D0 (en) * 2015-07-17 2015-08-26 Pilkington Group Ltd And University Of Bath The Metal oxide deposition
GB201513339D0 (en) * 2015-07-29 2015-09-09 Pilkington Group Ltd Coating apparatus

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH337310A (fr) * 1954-12-10 1959-03-31 Pittsburgh Plate Glass Co Procédé pour revêtir une surface de plaque de verre d'une couche uniforme d'une matière de protection finement divisée, par dépôt de celle-ci, et appareil pour la mise en oeuvre de ce procédé
FR2214246A5 (fr) * 1972-12-15 1974-08-09 Ppg Industries Inc
FR2456077A1 (fr) * 1978-07-20 1980-12-05 Bfg Glassgroup Procede de formation d'un revetement d'oxyde d'etain sur une face d'un support de verre
GB2119360A (en) * 1982-04-30 1983-11-16 Glaverbel Coating vitreous substrates
GB2131792A (en) * 1982-12-10 1984-06-27 Glaverbel Vitreous material bearing a multi-layer coating and method and apparatus for forming such coating
EP0188962A1 (fr) * 1985-01-07 1986-07-30 Saint Gobain Vitrage International Perfectionnement au procédé de revêtement d'un substrat tel un ruban de verre, par un produit pulvérulent, et dispositif pour la mise en oeuvre de ce procédé
FR2605307A1 (fr) * 1986-10-16 1988-04-22 Glaverbel Vitrage a couche pour vehicule, procede de fabrication d'un tel vitrage et vehicule equipe d'un tel vitrage

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1307361A (en) * 1969-04-23 1973-02-21 Pilkington Brothers Ltd Treating glass
US3679386A (en) * 1969-06-30 1972-07-25 Nippon Sheet Glass Co Ltd Process and apparatus for forming a metal oxide coating on flat glass
GB1516032A (en) * 1976-04-13 1978-06-28 Bfg Glassgroup Coating of glass
GB1524326A (en) * 1976-04-13 1978-09-13 Bfg Glassgroup Coating of glass
BE879189A (fr) * 1978-10-19 1980-04-04 Bfg Glassgroup Procede de formation d'un revetement d'oxyde d'etain sur un support de verre chaud et produits ainsi obtenus
JPS6018090B2 (ja) * 1979-10-03 1985-05-08 日本板硝子株式会社 導電薄膜の形成方法
GB2068934B (en) * 1980-01-31 1984-04-26 Bfg Glassgroup Coating hot glass with metals or metal compounds especially oxides
IT1143301B (it) * 1980-01-31 1986-10-22 Bfg Glassgroup Procedimento e dispositivo per ricoprire il vetro
IT1143300B (it) * 1980-01-31 1986-10-22 Bfg Glassgroup Procedimento e dispositivo per ricoprire il vetro
GB2068935B (en) * 1980-01-31 1983-11-30 Bfg Glassgroup Coating hot glass with metals or metal compounds especially oxides
GB2068937B (en) * 1980-01-31 1984-02-29 Bfg Glassgroup Coating hot glass with metals or metal compounds especially oxides
JPS56169153A (en) * 1980-05-28 1981-12-25 Nippon Sheet Glass Co Ltd Manufacture of glass with stuck thin metallic oxide film
IT1144219B (it) * 1980-06-20 1986-10-29 Bfg Glassgroup Procedimento e dispositivo per formare un rivestimento di metallo o di un composto metallico
DE3226900C2 (de) * 1982-07-17 1985-11-28 Veba-Glas Ag, 4300 Essen Verfahren und Vorrichtung zum Beschichten von Glasbehältern mit Titanoxid als Vergütungsmittel
GB2139612B (en) * 1983-05-13 1987-03-11 Glaverbel Coating a hot vitreous substrate
GB2142621B (en) * 1983-06-17 1987-03-18 Glaverbel Coating hot glass with metals or metal compounds especially oxides

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH337310A (fr) * 1954-12-10 1959-03-31 Pittsburgh Plate Glass Co Procédé pour revêtir une surface de plaque de verre d'une couche uniforme d'une matière de protection finement divisée, par dépôt de celle-ci, et appareil pour la mise en oeuvre de ce procédé
FR2214246A5 (fr) * 1972-12-15 1974-08-09 Ppg Industries Inc
FR2456077A1 (fr) * 1978-07-20 1980-12-05 Bfg Glassgroup Procede de formation d'un revetement d'oxyde d'etain sur une face d'un support de verre
GB2119360A (en) * 1982-04-30 1983-11-16 Glaverbel Coating vitreous substrates
GB2131792A (en) * 1982-12-10 1984-06-27 Glaverbel Vitreous material bearing a multi-layer coating and method and apparatus for forming such coating
EP0188962A1 (fr) * 1985-01-07 1986-07-30 Saint Gobain Vitrage International Perfectionnement au procédé de revêtement d'un substrat tel un ruban de verre, par un produit pulvérulent, et dispositif pour la mise en oeuvre de ce procédé
FR2605307A1 (fr) * 1986-10-16 1988-04-22 Glaverbel Vitrage a couche pour vehicule, procede de fabrication d'un tel vitrage et vehicule equipe d'un tel vitrage

Also Published As

Publication number Publication date
SE8604888L (sv) 1987-06-21
DE3638426C2 (de) 1999-01-07
ATA304186A (de) 1993-09-15
SE463767B (sv) 1991-01-21
CA1300438C (fr) 1992-05-12
IT8667824A0 (it) 1986-11-05
GB8624828D0 (en) 1986-11-19
BE905731A (fr) 1987-05-12
CH670819A5 (fr) 1989-07-14
NO168764C (no) 1992-04-01
NO168764B (no) 1991-12-23
SE8604888D0 (sv) 1986-11-14
FR2592031B1 (fr) 1992-06-05
NO864095L (no) 1987-06-22
US4878934A (en) 1989-11-07
NL193943C (nl) 2001-03-02
NO864095D0 (no) 1986-10-14
JP2527543B2 (ja) 1996-08-28
IT1195833B (it) 1988-10-27
GB2184748B (en) 1989-10-18
ES2002550A6 (es) 1988-08-16
GB2184748A (en) 1987-07-01
LU86666A1 (fr) 1987-06-26
JPS62158138A (ja) 1987-07-14
DE3638426A1 (de) 1987-07-02
AT397498B (de) 1994-04-25
GB8531424D0 (en) 1986-02-05
NL193943B (nl) 2000-11-01
NL8602905A (nl) 1987-07-16

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