FR2584099A1 - Agencement pour traiter des pieces dans une chambre a vide - Google Patents

Agencement pour traiter des pieces dans une chambre a vide Download PDF

Info

Publication number
FR2584099A1
FR2584099A1 FR8608853A FR8608853A FR2584099A1 FR 2584099 A1 FR2584099 A1 FR 2584099A1 FR 8608853 A FR8608853 A FR 8608853A FR 8608853 A FR8608853 A FR 8608853A FR 2584099 A1 FR2584099 A1 FR 2584099A1
Authority
FR
France
Prior art keywords
parts
discharge
arrangement
heating
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR8608853A
Other languages
English (en)
French (fr)
Inventor
Roland Schmid
Helmut Kaufmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2584099A1 publication Critical patent/FR2584099A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
  • Furnace Details (AREA)
  • Chemical Vapour Deposition (AREA)
FR8608853A 1985-07-01 1986-06-19 Agencement pour traiter des pieces dans une chambre a vide Pending FR2584099A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH280685 1985-07-01

Publications (1)

Publication Number Publication Date
FR2584099A1 true FR2584099A1 (fr) 1987-01-02

Family

ID=4242008

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8608853A Pending FR2584099A1 (fr) 1985-07-01 1986-06-19 Agencement pour traiter des pieces dans une chambre a vide

Country Status (7)

Country Link
JP (1) JPS624876A (ja)
DE (1) DE3614398A1 (ja)
ES (1) ES8703938A1 (ja)
FR (1) FR2584099A1 (ja)
GB (1) GB2178228A (ja)
IT (1) IT1190648B (ja)
SE (1) SE8602907L (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4029268C2 (de) * 1990-09-14 1995-07-06 Balzers Hochvakuum Verfahren zur gleichspannungs-bogenentladungs-unterstützten, reaktiven Behandlung von Gut und Vakuumbehandlungsanlage zur Durchführung
DE4029270C1 (ja) * 1990-09-14 1992-04-09 Balzers Ag, Balzers, Li
JPH04326725A (ja) * 1991-04-26 1992-11-16 Tokyo Electron Ltd プラズマ装置
CH687111A5 (de) * 1992-05-26 1996-09-13 Balzers Hochvakuum Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens.
US5868878A (en) * 1993-08-27 1999-02-09 Hughes Electronics Corporation Heat treatment by plasma electron heating and solid/gas jet cooling
DE19750909C1 (de) * 1997-11-17 1999-04-15 Bosch Gmbh Robert Drehvorrichtung zur plasma-immersions-gestützten Behandlung von Substraten
DE10149588B4 (de) * 2001-10-08 2017-09-07 Oerlikon Trading Ag, Trübbach Verfahren zur Diamantbeschichtung von Substraten
ES2344981B1 (es) * 2010-03-01 2011-05-06 Asociacion De La Industria Navarra (Ain) Procedimiento para la nitruracion de aleaciones metalicas y dispositivo para llevar a cabo dicho procedimiento.

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE704254C (de) * 1937-08-27 1941-03-26 Bernhard Berghaus Verfahren und Vorrichtung zur Herstellung von Metallkoerpern aus Metallpulvern
FR1153552A (fr) * 1953-12-09 1958-03-12 Berghaus Elektrophysik Anst Procédé et dispositif pour la commande et le contrôle automatiques du démarrage et du fonctionnement de processus à effluves électriques
DE1177900B (de) * 1953-02-17 1964-09-10 Berghaus Elektrophysik Anst Verfahren zur Behandlung von Gegenstaenden mittels Glimmentladung in technischen Prozessen
DE1204047B (de) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Verfahren zur Diffusionsbehandlung von Koerpern
FR2385290A1 (fr) * 1977-03-23 1978-10-20 Vide & Traitement Sa Four pour traitement thermo-ionique a multicathodes
FR2403645A2 (fr) * 1977-09-14 1979-04-13 Vide & Traitement Sa Four pour le traitement thermochimique, en continu, de pieces metalliques, par bombardement ionique
JPS5576057A (en) * 1978-11-30 1980-06-07 Nippon Denshi Kogyo Kk Ion treating apparatus
JPS5798669A (en) * 1980-12-08 1982-06-18 Nippon Denshi Kogyo Kk Glow discharge heat treatment processor
EP0165618A2 (en) * 1984-06-22 1985-12-27 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Glow-discharge decomposition apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2811942C2 (de) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Ofen zur ionischen Nitrierbehandlung von metallischen Werkstücken

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE704254C (de) * 1937-08-27 1941-03-26 Bernhard Berghaus Verfahren und Vorrichtung zur Herstellung von Metallkoerpern aus Metallpulvern
DE1177900B (de) * 1953-02-17 1964-09-10 Berghaus Elektrophysik Anst Verfahren zur Behandlung von Gegenstaenden mittels Glimmentladung in technischen Prozessen
FR1153552A (fr) * 1953-12-09 1958-03-12 Berghaus Elektrophysik Anst Procédé et dispositif pour la commande et le contrôle automatiques du démarrage et du fonctionnement de processus à effluves électriques
DE1204047B (de) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Verfahren zur Diffusionsbehandlung von Koerpern
FR2385290A1 (fr) * 1977-03-23 1978-10-20 Vide & Traitement Sa Four pour traitement thermo-ionique a multicathodes
FR2403645A2 (fr) * 1977-09-14 1979-04-13 Vide & Traitement Sa Four pour le traitement thermochimique, en continu, de pieces metalliques, par bombardement ionique
JPS5576057A (en) * 1978-11-30 1980-06-07 Nippon Denshi Kogyo Kk Ion treating apparatus
JPS5798669A (en) * 1980-12-08 1982-06-18 Nippon Denshi Kogyo Kk Glow discharge heat treatment processor
EP0165618A2 (en) * 1984-06-22 1985-12-27 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Glow-discharge decomposition apparatus

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENTS ABSTRACTS OF JAPAN, vol. 4, no. 119 (C-22) [601], 23 août 1980, page 152 C 22; & JP-A-55 76 057 (NIPPON DENSHI KOGYO K.K.) 07-06-1980 *
PATENTS ABSTRACTS OF JAPAN, vol. 6, no. 186 (C-126)[1064], 22 septembre 1982; & JP-A-57 98 669 (NIHON DENSHI KOGYO K.K.) 18-06-1982 *

Also Published As

Publication number Publication date
ES554903A0 (es) 1987-03-01
GB8615590D0 (en) 1986-07-30
GB2178228A (en) 1987-02-04
IT8620958A0 (it) 1986-06-27
DE3614398A1 (de) 1987-01-08
SE8602907L (sv) 1987-01-02
IT8620958A1 (it) 1987-12-27
SE8602907D0 (sv) 1986-06-30
IT1190648B (it) 1988-02-16
JPS624876A (ja) 1987-01-10
ES8703938A1 (es) 1987-03-01

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