IT1190648B - Dispositivo per il trattamento di pezzi con camera evacuabile - Google Patents

Dispositivo per il trattamento di pezzi con camera evacuabile

Info

Publication number
IT1190648B
IT1190648B IT20958/86A IT2095886A IT1190648B IT 1190648 B IT1190648 B IT 1190648B IT 20958/86 A IT20958/86 A IT 20958/86A IT 2095886 A IT2095886 A IT 2095886A IT 1190648 B IT1190648 B IT 1190648B
Authority
IT
Italy
Prior art keywords
pieces
treatment
evacuable
room
evacuable room
Prior art date
Application number
IT20958/86A
Other languages
English (en)
Italian (it)
Other versions
IT8620958A0 (it
IT8620958A1 (it
Inventor
Roland Schmid
Helmut Kaufmann
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of IT8620958A0 publication Critical patent/IT8620958A0/it
Publication of IT8620958A1 publication Critical patent/IT8620958A1/it
Application granted granted Critical
Publication of IT1190648B publication Critical patent/IT1190648B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
IT20958/86A 1985-07-01 1986-06-27 Dispositivo per il trattamento di pezzi con camera evacuabile IT1190648B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH280685 1985-07-01

Publications (3)

Publication Number Publication Date
IT8620958A0 IT8620958A0 (it) 1986-06-27
IT8620958A1 IT8620958A1 (it) 1987-12-27
IT1190648B true IT1190648B (it) 1988-02-16

Family

ID=4242008

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20958/86A IT1190648B (it) 1985-07-01 1986-06-27 Dispositivo per il trattamento di pezzi con camera evacuabile

Country Status (7)

Country Link
JP (1) JPS624876A (ja)
DE (1) DE3614398A1 (ja)
ES (1) ES8703938A1 (ja)
FR (1) FR2584099A1 (ja)
GB (1) GB2178228A (ja)
IT (1) IT1190648B (ja)
SE (1) SE8602907L (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4029270C1 (ja) * 1990-09-14 1992-04-09 Balzers Ag, Balzers, Li
DE4029268C2 (de) * 1990-09-14 1995-07-06 Balzers Hochvakuum Verfahren zur gleichspannungs-bogenentladungs-unterstützten, reaktiven Behandlung von Gut und Vakuumbehandlungsanlage zur Durchführung
JPH04326725A (ja) * 1991-04-26 1992-11-16 Tokyo Electron Ltd プラズマ装置
CH687111A5 (de) * 1992-05-26 1996-09-13 Balzers Hochvakuum Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens.
US5868878A (en) * 1993-08-27 1999-02-09 Hughes Electronics Corporation Heat treatment by plasma electron heating and solid/gas jet cooling
DE19750909C1 (de) * 1997-11-17 1999-04-15 Bosch Gmbh Robert Drehvorrichtung zur plasma-immersions-gestützten Behandlung von Substraten
DE10149588B4 (de) 2001-10-08 2017-09-07 Oerlikon Trading Ag, Trübbach Verfahren zur Diamantbeschichtung von Substraten
ES2344981B1 (es) * 2010-03-01 2011-05-06 Asociacion De La Industria Navarra (Ain) Procedimiento para la nitruracion de aleaciones metalicas y dispositivo para llevar a cabo dicho procedimiento.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT364899A (ja) * 1937-08-27
CH310968A (de) * 1953-02-17 1955-11-15 Berghaus Elektrophysik Anst Verfahren zur thermischen, metallurgischen oder chemischen Behandlung von metallischen Gegenständen mittels elektrischer Glimmentladungen
BE569245A (ja) * 1953-12-09
DE1204047B (de) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Verfahren zur Diffusionsbehandlung von Koerpern
DE2811942C2 (de) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Ofen zur ionischen Nitrierbehandlung von metallischen Werkstücken
FR2403645A2 (fr) * 1977-09-14 1979-04-13 Vide & Traitement Sa Four pour le traitement thermochimique, en continu, de pieces metalliques, par bombardement ionique
FR2385290A1 (fr) * 1977-03-23 1978-10-20 Vide & Traitement Sa Four pour traitement thermo-ionique a multicathodes
JPS5576057A (en) * 1978-11-30 1980-06-07 Nippon Denshi Kogyo Kk Ion treating apparatus
JPS5798669A (en) * 1980-12-08 1982-06-18 Nippon Denshi Kogyo Kk Glow discharge heat treatment processor
CA1269950C (en) * 1984-06-22 1990-06-05 DEVICE FOR DECOMPOSITION BY GLOWING DISCHARGE

Also Published As

Publication number Publication date
SE8602907L (sv) 1987-01-02
ES8703938A1 (es) 1987-03-01
DE3614398A1 (de) 1987-01-08
IT8620958A0 (it) 1986-06-27
ES554903A0 (es) 1987-03-01
SE8602907D0 (sv) 1986-06-30
GB8615590D0 (en) 1986-07-30
FR2584099A1 (fr) 1987-01-02
IT8620958A1 (it) 1987-12-27
JPS624876A (ja) 1987-01-10
GB2178228A (en) 1987-02-04

Similar Documents

Publication Publication Date Title
IT1188424B (it) Dispositivo di raffreddamento
IT1149166B (it) Procedimento per la fabbricazione di pannelli di circuito
IT8967853A0 (it) Apparecchiatura per il trattamento di cellule
KR890015763U (ko) 나사가공장치
KR860005739A (ko) 진공 처리장치
IT1190323B (it) Dispositivo di spalmatura
KR860009497U (ko) 피난용 완강 장치
IT8620056A1 (it) Dispositivo per il trasferimento contemporaneo ribaltamento di articoli
MX162254A (es) Mejoras en circuito para el procesamiento de senales analogicas
DE3855896D1 (de) Plasmavorrichtung
IT1190648B (it) Dispositivo per il trattamento di pezzi con camera evacuabile
IT8120941V0 (it) Dispositivo per la tesatura ed il fissaggio di fogli di rivestimento impermeabili.
IT8768036A0 (it) Dispositivo di applicazione
IT8619464A1 (it) Dispositivo di spalmatura
FI871994A (fi) Laite huoneen lämpötilan säätämiseksi
IT1194531B (it) Circuito per la elaborazione e la utilizzazione di segnali
IT1153185B (it) Composizione per il trattamento della aterosclerosi
IT8219344A0 (it) Procedimento e dispositivo per lapreparazione di blocchi muniti di placcatura.
IT1130480B (it) Telescrivente elettronica per il trattamento di messaggi
NO168340C (no) Kapsling
GR3000306T3 (en) Composition for the treatment of infections
JPS55145807A (en) Joiner device of systematic ceiling
KR870001482U (ko) 판상형 튀김물의 다단식 냉각장치
KR870004179U (ko) 냉각장치
ATA300085A (de) Gattereinhang