GB8615590D0 - Treating of workpieces - Google Patents

Treating of workpieces

Info

Publication number
GB8615590D0
GB8615590D0 GB868615590A GB8615590A GB8615590D0 GB 8615590 D0 GB8615590 D0 GB 8615590D0 GB 868615590 A GB868615590 A GB 868615590A GB 8615590 A GB8615590 A GB 8615590A GB 8615590 D0 GB8615590 D0 GB 8615590D0
Authority
GB
United Kingdom
Prior art keywords
workpieces
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB868615590A
Other versions
GB2178228A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of GB8615590D0 publication Critical patent/GB8615590D0/en
Publication of GB2178228A publication Critical patent/GB2178228A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
GB08615590A 1985-07-01 1986-06-26 An arrangement for the treating of workpieces Withdrawn GB2178228A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH280685 1985-07-01

Publications (2)

Publication Number Publication Date
GB8615590D0 true GB8615590D0 (en) 1986-07-30
GB2178228A GB2178228A (en) 1987-02-04

Family

ID=4242008

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08615590A Withdrawn GB2178228A (en) 1985-07-01 1986-06-26 An arrangement for the treating of workpieces

Country Status (7)

Country Link
JP (1) JPS624876A (en)
DE (1) DE3614398A1 (en)
ES (1) ES8703938A1 (en)
FR (1) FR2584099A1 (en)
GB (1) GB2178228A (en)
IT (1) IT1190648B (en)
SE (1) SE8602907L (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4029270C1 (en) * 1990-09-14 1992-04-09 Balzers Ag, Balzers, Li
DE4029268C2 (en) * 1990-09-14 1995-07-06 Balzers Hochvakuum Process for DC voltage-assisted, reactive treatment of material and vacuum treatment system for implementation
JPH04326725A (en) * 1991-04-26 1992-11-16 Tokyo Electron Ltd Plasma apparatus
CH687111A5 (en) * 1992-05-26 1996-09-13 Balzers Hochvakuum A method for generating a low voltage discharge, vacuum treatment system here, as well as for application of the method.
US5868878A (en) * 1993-08-27 1999-02-09 Hughes Electronics Corporation Heat treatment by plasma electron heating and solid/gas jet cooling
DE19750909C1 (en) * 1997-11-17 1999-04-15 Bosch Gmbh Robert Rotating unit for plasma immersion aided treatment of substrates
DE10149588B4 (en) 2001-10-08 2017-09-07 Oerlikon Trading Ag, Trübbach Process for diamond coating of substrates
ES2344981B1 (en) * 2010-03-01 2011-05-06 Asociacion De La Industria Navarra (Ain) PROCEDURE FOR THE NITRURATION OF METAL ALLOYS AND DEVICE TO CARRY OUT THIS PROCEDURE.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT364899A (en) * 1937-08-27
CH310968A (en) * 1953-02-17 1955-11-15 Berghaus Elektrophysik Anst Process for the thermal, metallurgical or chemical treatment of metallic objects by means of electrical glow discharges
BE569245A (en) * 1953-12-09
DE1204047B (en) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Process for the diffusion treatment of bodies
DE2811942C2 (en) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Furnace for the ionic nitriding treatment of metallic workpieces
FR2403645A2 (en) * 1977-09-14 1979-04-13 Vide & Traitement Sa Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge
FR2385290A1 (en) * 1977-03-23 1978-10-20 Vide & Traitement Sa Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge
JPS5576057A (en) * 1978-11-30 1980-06-07 Nippon Denshi Kogyo Kk Ion treating apparatus
JPS5798669A (en) * 1980-12-08 1982-06-18 Nippon Denshi Kogyo Kk Glow discharge heat treatment processor
CA1269950C (en) * 1984-06-22 1990-06-05 Glow-discharge decomposition apparatus

Also Published As

Publication number Publication date
SE8602907L (en) 1987-01-02
ES8703938A1 (en) 1987-03-01
DE3614398A1 (en) 1987-01-08
IT1190648B (en) 1988-02-16
IT8620958A0 (en) 1986-06-27
ES554903A0 (en) 1987-03-01
SE8602907D0 (en) 1986-06-30
FR2584099A1 (en) 1987-01-02
IT8620958A1 (en) 1987-12-27
JPS624876A (en) 1987-01-10
GB2178228A (en) 1987-02-04

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)