IT8620958A0 - DEVICE FOR TREATMENT OF PARTS WITH AN EVACUABLE CHAMBER. - Google Patents

DEVICE FOR TREATMENT OF PARTS WITH AN EVACUABLE CHAMBER.

Info

Publication number
IT8620958A0
IT8620958A0 IT8620958A IT2095886A IT8620958A0 IT 8620958 A0 IT8620958 A0 IT 8620958A0 IT 8620958 A IT8620958 A IT 8620958A IT 2095886 A IT2095886 A IT 2095886A IT 8620958 A0 IT8620958 A0 IT 8620958A0
Authority
IT
Italy
Prior art keywords
treatment
parts
evacuable chamber
evacuable
chamber
Prior art date
Application number
IT8620958A
Other languages
Italian (it)
Other versions
IT8620958A1 (en
IT1190648B (en
Inventor
Roland Schmid
Helmut Kaufmann
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of IT8620958A0 publication Critical patent/IT8620958A0/en
Publication of IT8620958A1 publication Critical patent/IT8620958A1/en
Application granted granted Critical
Publication of IT1190648B publication Critical patent/IT1190648B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
  • Furnace Details (AREA)
  • Chemical Vapour Deposition (AREA)
IT20958/86A 1985-07-01 1986-06-27 DEVICE FOR THE TREATMENT OF PIECES WITH EVACUABLE ROOM IT1190648B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH280685 1985-07-01

Publications (3)

Publication Number Publication Date
IT8620958A0 true IT8620958A0 (en) 1986-06-27
IT8620958A1 IT8620958A1 (en) 1987-12-27
IT1190648B IT1190648B (en) 1988-02-16

Family

ID=4242008

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20958/86A IT1190648B (en) 1985-07-01 1986-06-27 DEVICE FOR THE TREATMENT OF PIECES WITH EVACUABLE ROOM

Country Status (7)

Country Link
JP (1) JPS624876A (en)
DE (1) DE3614398A1 (en)
ES (1) ES8703938A1 (en)
FR (1) FR2584099A1 (en)
GB (1) GB2178228A (en)
IT (1) IT1190648B (en)
SE (1) SE8602907L (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4029270C1 (en) * 1990-09-14 1992-04-09 Balzers Ag, Balzers, Li
DE4029268C2 (en) * 1990-09-14 1995-07-06 Balzers Hochvakuum Process for DC voltage-assisted, reactive treatment of material and vacuum treatment system for implementation
JPH04326725A (en) * 1991-04-26 1992-11-16 Tokyo Electron Ltd Plasma apparatus
CH687111A5 (en) * 1992-05-26 1996-09-13 Balzers Hochvakuum A method for generating a low voltage discharge, vacuum treatment system here, as well as for application of the method.
US5868878A (en) * 1993-08-27 1999-02-09 Hughes Electronics Corporation Heat treatment by plasma electron heating and solid/gas jet cooling
DE19750909C1 (en) * 1997-11-17 1999-04-15 Bosch Gmbh Robert Rotating unit for plasma immersion aided treatment of substrates
DE10149588B4 (en) 2001-10-08 2017-09-07 Oerlikon Trading Ag, Trübbach Process for diamond coating of substrates
ES2344981B1 (en) * 2010-03-01 2011-05-06 Asociacion De La Industria Navarra (Ain) PROCEDURE FOR THE NITRURATION OF METAL ALLOYS AND DEVICE TO CARRY OUT THIS PROCEDURE.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT364899A (en) * 1937-08-27
CH310968A (en) * 1953-02-17 1955-11-15 Berghaus Elektrophysik Anst Process for the thermal, metallurgical or chemical treatment of metallic objects by means of electrical glow discharges
BE569243A (en) * 1953-12-09
DE1204047B (en) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Process for the diffusion treatment of bodies
FR2403645A2 (en) * 1977-09-14 1979-04-13 Vide & Traitement Sa Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge
DE2811942C2 (en) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Furnace for the ionic nitriding treatment of metallic workpieces
FR2385290A1 (en) * 1977-03-23 1978-10-20 Vide & Traitement Sa Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge
JPS5576057A (en) * 1978-11-30 1980-06-07 Nippon Denshi Kogyo Kk Ion treating apparatus
JPS5798669A (en) * 1980-12-08 1982-06-18 Nippon Denshi Kogyo Kk Glow discharge heat treatment processor
US4664890A (en) * 1984-06-22 1987-05-12 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Glow-discharge decomposition apparatus

Also Published As

Publication number Publication date
SE8602907D0 (en) 1986-06-30
GB2178228A (en) 1987-02-04
DE3614398A1 (en) 1987-01-08
GB8615590D0 (en) 1986-07-30
ES554903A0 (en) 1987-03-01
IT8620958A1 (en) 1987-12-27
JPS624876A (en) 1987-01-10
ES8703938A1 (en) 1987-03-01
FR2584099A1 (en) 1987-01-02
IT1190648B (en) 1988-02-16
SE8602907L (en) 1987-01-02

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