ES8703938A1 - Disposicion para el tratamiento de piezas de trabajo - Google Patents
Disposicion para el tratamiento de piezas de trabajoInfo
- Publication number
- ES8703938A1 ES8703938A1 ES554903A ES554903A ES8703938A1 ES 8703938 A1 ES8703938 A1 ES 8703938A1 ES 554903 A ES554903 A ES 554903A ES 554903 A ES554903 A ES 554903A ES 8703938 A1 ES8703938 A1 ES 8703938A1
- Authority
- ES
- Spain
- Prior art keywords
- workpieces
- gas discharge
- individual
- electrical
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Furnace Details (AREA)
Abstract
DISPOSITIVO PARA EL TRATAMIENTO DE PIEZAS DE TRABAJO. CONSISTE EN TRATAR PIEZAS MEDIANTE DESCARGAS ELECTRICAS DE GAS SOMETIDAS A UNA INTENSIDAD PREDETERMINADA LO MAS EXACTAMENTE POSIBLE SE DOTAN LAS PIEZAS INDIVIDUALES O LOS GRUPOS DE DISPOSITIVOS PROPIOS PARA AJUSTAR LA POTENCIA ELECTRICA ENTREGADA A ELLAS A TRAVES DE LA DESCARGA DE GAS. PARA ELLO SE HAN ACREDITADO APARATOS INDIVIDUALES DE ALIMENTACION DE CORRIENTE PARA CADA DERIVACION DE LA DESCARGA DE GAS.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH280685 | 1985-07-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
ES8703938A1 true ES8703938A1 (es) | 1987-03-01 |
ES554903A0 ES554903A0 (es) | 1987-03-01 |
Family
ID=4242008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES554903A Expired ES8703938A1 (es) | 1985-07-01 | 1986-05-13 | Disposicion para el tratamiento de piezas de trabajo |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPS624876A (es) |
DE (1) | DE3614398A1 (es) |
ES (1) | ES8703938A1 (es) |
FR (1) | FR2584099A1 (es) |
GB (1) | GB2178228A (es) |
IT (1) | IT1190648B (es) |
SE (1) | SE8602907L (es) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2344981A1 (es) * | 2010-03-01 | 2010-09-10 | Asociacion De La Industria Navarra (Ain) | Procedimiento para la nitruracion de aleaciones metalicas y dispositivo para llevar a cabo dicho procedimiento. |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4029270C1 (es) * | 1990-09-14 | 1992-04-09 | Balzers Ag, Balzers, Li | |
DE4029268C2 (de) * | 1990-09-14 | 1995-07-06 | Balzers Hochvakuum | Verfahren zur gleichspannungs-bogenentladungs-unterstützten, reaktiven Behandlung von Gut und Vakuumbehandlungsanlage zur Durchführung |
JPH04326725A (ja) * | 1991-04-26 | 1992-11-16 | Tokyo Electron Ltd | プラズマ装置 |
CH687111A5 (de) * | 1992-05-26 | 1996-09-13 | Balzers Hochvakuum | Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens. |
US5868878A (en) * | 1993-08-27 | 1999-02-09 | Hughes Electronics Corporation | Heat treatment by plasma electron heating and solid/gas jet cooling |
DE19750909C1 (de) * | 1997-11-17 | 1999-04-15 | Bosch Gmbh Robert | Drehvorrichtung zur plasma-immersions-gestützten Behandlung von Substraten |
DE10149588B4 (de) * | 2001-10-08 | 2017-09-07 | Oerlikon Trading Ag, Trübbach | Verfahren zur Diamantbeschichtung von Substraten |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT364899A (es) * | 1937-08-27 | |||
CH310968A (de) * | 1953-02-17 | 1955-11-15 | Berghaus Elektrophysik Anst | Verfahren zur thermischen, metallurgischen oder chemischen Behandlung von metallischen Gegenständen mittels elektrischer Glimmentladungen |
BE569245A (es) * | 1953-12-09 | |||
DE1204047B (de) * | 1957-04-10 | 1965-10-28 | Berghaus Elektrophysik Anst | Verfahren zur Diffusionsbehandlung von Koerpern |
FR2385290A1 (fr) * | 1977-03-23 | 1978-10-20 | Vide & Traitement Sa | Four pour traitement thermo-ionique a multicathodes |
FR2403645A2 (fr) * | 1977-09-14 | 1979-04-13 | Vide & Traitement Sa | Four pour le traitement thermochimique, en continu, de pieces metalliques, par bombardement ionique |
DE2811942C2 (de) * | 1977-03-23 | 1986-09-18 | Vide et Traitement S.A., Neuilly-en-Thelle | Ofen zur ionischen Nitrierbehandlung von metallischen Werkstücken |
JPS5576057A (en) * | 1978-11-30 | 1980-06-07 | Nippon Denshi Kogyo Kk | Ion treating apparatus |
JPS5798669A (en) * | 1980-12-08 | 1982-06-18 | Nippon Denshi Kogyo Kk | Glow discharge heat treatment processor |
US4664890A (en) * | 1984-06-22 | 1987-05-12 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Glow-discharge decomposition apparatus |
-
1986
- 1986-04-28 DE DE19863614398 patent/DE3614398A1/de not_active Withdrawn
- 1986-05-13 ES ES554903A patent/ES8703938A1/es not_active Expired
- 1986-06-19 FR FR8608853A patent/FR2584099A1/fr active Pending
- 1986-06-26 GB GB08615590A patent/GB2178228A/en not_active Withdrawn
- 1986-06-27 IT IT20958/86A patent/IT1190648B/it active
- 1986-06-30 JP JP61151843A patent/JPS624876A/ja active Pending
- 1986-06-30 SE SE8602907A patent/SE8602907L/ not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2344981A1 (es) * | 2010-03-01 | 2010-09-10 | Asociacion De La Industria Navarra (Ain) | Procedimiento para la nitruracion de aleaciones metalicas y dispositivo para llevar a cabo dicho procedimiento. |
Also Published As
Publication number | Publication date |
---|---|
IT8620958A1 (it) | 1987-12-27 |
SE8602907D0 (sv) | 1986-06-30 |
JPS624876A (ja) | 1987-01-10 |
GB2178228A (en) | 1987-02-04 |
FR2584099A1 (fr) | 1987-01-02 |
GB8615590D0 (en) | 1986-07-30 |
DE3614398A1 (de) | 1987-01-08 |
IT8620958A0 (it) | 1986-06-27 |
SE8602907L (sv) | 1987-01-02 |
IT1190648B (it) | 1988-02-16 |
ES554903A0 (es) | 1987-03-01 |
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