FR2495835A1 - Dispositif a circuits integres a reseau metallique d'interconnexion, et procede de fabrication de ce dispositif - Google Patents
Dispositif a circuits integres a reseau metallique d'interconnexion, et procede de fabrication de ce dispositif Download PDFInfo
- Publication number
- FR2495835A1 FR2495835A1 FR8025860A FR8025860A FR2495835A1 FR 2495835 A1 FR2495835 A1 FR 2495835A1 FR 8025860 A FR8025860 A FR 8025860A FR 8025860 A FR8025860 A FR 8025860A FR 2495835 A1 FR2495835 A1 FR 2495835A1
- Authority
- FR
- France
- Prior art keywords
- conductors
- supply
- metal
- network
- terminals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 41
- 239000002184 metal Substances 0.000 title claims description 41
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000000034 method Methods 0.000 title claims description 6
- 239000004020 conductor Substances 0.000 claims abstract description 64
- 239000011810 insulating material Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Layout of the interconnection structure
- H01L23/5286—Arrangements of power or ground buses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8025860A FR2495835A1 (fr) | 1980-12-05 | 1980-12-05 | Dispositif a circuits integres a reseau metallique d'interconnexion, et procede de fabrication de ce dispositif |
| GB8122774A GB2089121B (en) | 1980-12-05 | 1981-07-23 | Integrated circuit interconnection network |
| NL8103541A NL8103541A (nl) | 1980-12-05 | 1981-07-27 | Inrichting met geintegreerde schakelingen en met een metalen verbindingsnetwerk, en een werkwijze voor het vervaardigen van deze inrichting. |
| JP56177773A JPS57113259A (en) | 1980-12-05 | 1981-11-05 | Integrated circuit device |
| IT25429/81A IT1139897B (it) | 1980-12-05 | 1981-12-03 | Dispositivo a circuito integrati a rete metallica di interconnnessione e procedimento di fabbricazione di tale dispositivo |
| DE19813147948 DE3147948A1 (de) | 1980-12-05 | 1981-12-03 | "anordnung mit integrierten schaltungen" |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8025860A FR2495835A1 (fr) | 1980-12-05 | 1980-12-05 | Dispositif a circuits integres a reseau metallique d'interconnexion, et procede de fabrication de ce dispositif |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2495835A1 true FR2495835A1 (fr) | 1982-06-11 |
| FR2495835B1 FR2495835B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-04-12 |
Family
ID=9248719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8025860A Granted FR2495835A1 (fr) | 1980-12-05 | 1980-12-05 | Dispositif a circuits integres a reseau metallique d'interconnexion, et procede de fabrication de ce dispositif |
Country Status (6)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS594050A (ja) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | 半導体装置 |
| JPH0290651A (ja) * | 1988-09-28 | 1990-03-30 | Nec Corp | 半導体集積回路 |
| GB2263018B (en) * | 1991-03-23 | 1995-06-21 | Sony Corp | Static random access memories |
| GB2254487B (en) * | 1991-03-23 | 1995-06-21 | Sony Corp | Full CMOS type static random access memories |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3312871A (en) * | 1964-12-23 | 1967-04-04 | Ibm | Interconnection arrangement for integrated circuits |
| DE2165844C2 (de) * | 1971-12-31 | 1983-02-17 | Elena Vadimovna Moskva Chrenova | Integrierte Schaltung |
| JPS50134385A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-04-09 | 1975-10-24 | ||
| DE2822011C3 (de) * | 1978-05-19 | 1987-09-10 | Fujitsu Ltd., Kawasaki, Kanagawa | Halbleiteranordnung und Verfahren zu deren Herstellung |
-
1980
- 1980-12-05 FR FR8025860A patent/FR2495835A1/fr active Granted
-
1981
- 1981-07-23 GB GB8122774A patent/GB2089121B/en not_active Expired
- 1981-07-27 NL NL8103541A patent/NL8103541A/nl not_active Application Discontinuation
- 1981-11-05 JP JP56177773A patent/JPS57113259A/ja active Pending
- 1981-12-03 DE DE19813147948 patent/DE3147948A1/de not_active Ceased
- 1981-12-03 IT IT25429/81A patent/IT1139897B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| FR2495835B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-04-12 |
| GB2089121B (en) | 1985-02-27 |
| NL8103541A (nl) | 1982-07-01 |
| DE3147948A1 (de) | 1982-07-08 |
| IT8125429A0 (it) | 1981-12-03 |
| GB2089121A (en) | 1982-06-16 |
| JPS57113259A (en) | 1982-07-14 |
| IT1139897B (it) | 1986-09-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |