FR2493348B1 - Procede et dispositif de depot physique par vapeur de produits de revetement durs, notamment pour outils - Google Patents

Procede et dispositif de depot physique par vapeur de produits de revetement durs, notamment pour outils

Info

Publication number
FR2493348B1
FR2493348B1 FR8120807A FR8120807A FR2493348B1 FR 2493348 B1 FR2493348 B1 FR 2493348B1 FR 8120807 A FR8120807 A FR 8120807A FR 8120807 A FR8120807 A FR 8120807A FR 2493348 B1 FR2493348 B1 FR 2493348B1
Authority
FR
France
Prior art keywords
tools
vapor deposition
physical vapor
hard coating
coating products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8120807A
Other languages
English (en)
Other versions
FR2493348A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of FR2493348A1 publication Critical patent/FR2493348A1/fr
Application granted granted Critical
Publication of FR2493348B1 publication Critical patent/FR2493348B1/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
FR8120807A 1980-11-06 1981-11-06 Procede et dispositif de depot physique par vapeur de produits de revetement durs, notamment pour outils Expired FR2493348B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55156584A JPS5779169A (en) 1980-11-06 1980-11-06 Physical vapor deposition method

Publications (2)

Publication Number Publication Date
FR2493348A1 FR2493348A1 (fr) 1982-05-07
FR2493348B1 true FR2493348B1 (fr) 1985-10-04

Family

ID=15630952

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8120807A Expired FR2493348B1 (fr) 1980-11-06 1981-11-06 Procede et dispositif de depot physique par vapeur de produits de revetement durs, notamment pour outils

Country Status (5)

Country Link
US (1) US4507189A (fr)
JP (1) JPS5779169A (fr)
DE (1) DE3144192C2 (fr)
FR (1) FR2493348B1 (fr)
GB (1) GB2086943B (fr)

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US4773928A (en) * 1987-08-03 1988-09-27 Gte Products Corporation Plasma spray powders and process for producing same
JPH0722018B2 (ja) * 1988-03-04 1995-03-08 シャープ株式会社 黒鉛電極の製造方法
US5169508A (en) * 1988-03-04 1992-12-08 Sharp Kabushiki Kaisha Graphite electrode
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US5039570A (en) * 1990-04-12 1991-08-13 Planar Circuit Technologies, Inc. Resistive laminate for printed circuit boards, method and apparatus for forming the same
DE4034842A1 (de) * 1990-11-02 1992-05-07 Thyssen Edelstahlwerke Ag Verfahren zur plasmachemischen reinigung fuer eine anschliessende pvd oder pecvd beschichtung
DE4126852A1 (de) * 1991-08-14 1993-02-18 Krupp Widia Gmbh Werkzeug mit verschleissfester diamantschneide, verfahren zu dessen herstellung sowie dessen verwendung
DE4126851A1 (de) * 1991-08-14 1993-02-18 Krupp Widia Gmbh Werkzeug mit verschleissfester schneide aus kubischem bornitrid oder polykristallinem kubischem bornitrid, verfahren zu dessen herstellung sowie dessen verwendung
DE4128547A1 (de) * 1991-08-28 1993-03-04 Leybold Ag Verfahren und vorrichtung fuer die herstellung einer entspiegelungsschicht auf linsen
EP0608409B1 (fr) * 1992-08-14 1997-05-07 Hughes Aircraft Company PREPARATION D'UNE SURFACE ET PROCEDE DE DEPOT DE NITRURE DE TITANE SUR FER de FONTE
US5356474A (en) * 1992-11-27 1994-10-18 General Electric Company Apparatus and method for making aligned Hi-Tc tape superconductors
JP2793773B2 (ja) * 1994-05-13 1998-09-03 神鋼コベルコツール株式会社 耐摩耗性に優れた硬質皮膜、硬質皮膜被覆工具及び硬質皮膜被覆部材
DE4437269C1 (de) * 1994-10-18 1996-02-22 Balzers Hochvakuum Verfahren zum Reinigen einer Werkstückoberfläche und seine Verwendung
JP3866305B2 (ja) * 1994-10-27 2007-01-10 住友電工ハードメタル株式会社 工具用複合高硬度材料
JPH09112448A (ja) * 1995-10-18 1997-05-02 Matsushita Electric Ind Co Ltd スクロール圧縮機
DE19546826C1 (de) * 1995-12-15 1997-04-03 Fraunhofer Ges Forschung Verfahren und Einrichtung zur Vorbehandlung von Substraten
BE1009839A3 (fr) * 1995-12-20 1997-10-07 Cockerill Rech & Dev Procede et dispositif pour le nettoyage d'un substrat metallique.
US6656329B1 (en) 1996-08-28 2003-12-02 Premark Rwp Holdings, Inc. Coated pressing surfaces for abrasion resistant laminate and making laminates therefrom
US5855950A (en) * 1996-12-30 1999-01-05 Implant Sciences Corporation Method for growing an alumina surface on orthopaedic implant components
US5985468A (en) * 1997-04-30 1999-11-16 Masco Corporation Article having a multilayer protective and decorative coating
US5922478A (en) * 1997-04-30 1999-07-13 Masco Corporation Article having a decorative and protective coating
US6004684A (en) * 1997-04-30 1999-12-21 Masco Corporation Article having a protective and decorative multilayer coating
US6010750A (en) 1997-05-08 2000-01-04 Georgia Tech Research Corporation Method and apparatus for lithiating alloys
US5885665A (en) * 1997-05-09 1999-03-23 The United States Of America As Represented By The United States Department Of Energy VO2 precipitates for self-protected optical surfaces
US6190514B1 (en) 1997-12-30 2001-02-20 Premark Rwp Holdings, Inc. Method for high scan sputter coating to produce coated, abrasion resistant press plates with reduced built-in thermal stress
DE19803423C2 (de) * 1998-01-29 2001-02-08 Siemens Ag Substrathalterung für SiC-Epitaxie und Verfahren zum Herstellen eines Einsatzes für einen Suszeptor
DE19809408A1 (de) * 1998-03-05 1999-09-09 Leybold Systems Gmbh Messingfarbige Beschichtung mit einer farbgebenden nitridischen Schicht
JP2002513855A (ja) * 1998-05-05 2002-05-14 コーニング インコーポレイテッド 保護塗膜を有するガラス成形装置および保護塗膜の施工法
US6440895B1 (en) * 1998-07-27 2002-08-27 Battelle Memorial Institute Catalyst, method of making, and reactions using the catalyst
US6338879B1 (en) * 1998-12-09 2002-01-15 Nachi-Fujikoshi Corp. Solid lubricant film for coated cutting tool and method for manufacturing same
US6706448B1 (en) 1999-08-30 2004-03-16 Georgia Tech Research Corp. Method and apparatus for lithiating alloys
US8470019B1 (en) * 2001-11-30 2013-06-25 Advanced Cardiovascular Systems, Inc. TiNxOy modified surface for an implantable device and a method of producing the same
JP5250321B2 (ja) * 2008-07-04 2013-07-31 昭和電工株式会社 炭化珪素単結晶成長用種結晶の製造方法並びに炭化珪素単結晶の製造方法
US8440328B2 (en) 2011-03-18 2013-05-14 Kennametal Inc. Coating for improved wear resistance
JP6528936B2 (ja) * 2014-03-27 2019-06-12 日立金属株式会社 被覆工具の製造方法
EP3282036B1 (fr) 2016-02-09 2023-03-29 Wilsonart LLC Procédé de revêtement de plaques de presse en acier inoxydable

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FR841904A (fr) * 1937-08-26 1939-06-01 Procédé pour métalliser ou revêtir des articles d'une matière vaporisée thermiquement
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AT336905B (de) * 1975-02-10 1977-06-10 Plansee Metallwerk Verschleissteil fur die spanabhebende und spanlose formgebung
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Also Published As

Publication number Publication date
JPS5779169A (en) 1982-05-18
DE3144192A1 (de) 1982-07-29
DE3144192C2 (de) 1983-12-29
GB2086943B (en) 1985-09-25
GB2086943A (en) 1982-05-19
US4507189A (en) 1985-03-26
FR2493348A1 (fr) 1982-05-07

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