FR2485718A1 - Interferometre a deux etages - Google Patents

Interferometre a deux etages Download PDF

Info

Publication number
FR2485718A1
FR2485718A1 FR8111314A FR8111314A FR2485718A1 FR 2485718 A1 FR2485718 A1 FR 2485718A1 FR 8111314 A FR8111314 A FR 8111314A FR 8111314 A FR8111314 A FR 8111314A FR 2485718 A1 FR2485718 A1 FR 2485718A1
Authority
FR
France
Prior art keywords
measurement
interference
plane
interferometer
prisms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8111314A
Other languages
English (en)
French (fr)
Other versions
FR2485718B1 (cs
Inventor
Karlheinz Bechstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of FR2485718A1 publication Critical patent/FR2485718A1/fr
Application granted granted Critical
Publication of FR2485718B1 publication Critical patent/FR2485718B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8111314A 1980-06-30 1981-06-09 Interferometre a deux etages Granted FR2485718A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD80222233A DD158187A3 (de) 1980-06-30 1980-06-30 Zweistufeninterferometer

Publications (2)

Publication Number Publication Date
FR2485718A1 true FR2485718A1 (fr) 1981-12-31
FR2485718B1 FR2485718B1 (cs) 1985-03-29

Family

ID=5525028

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8111314A Granted FR2485718A1 (fr) 1980-06-30 1981-06-09 Interferometre a deux etages

Country Status (6)

Country Link
JP (1) JPS5714703A (cs)
DD (1) DD158187A3 (cs)
DE (1) DE3112633A1 (cs)
FR (1) FR2485718A1 (cs)
GB (1) GB2079000B (cs)
SU (1) SU1168800A1 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532417A1 (fr) * 1982-09-01 1984-03-02 Zeiss Jena Veb Carl Disposition interferometrique pour la mesure de distances opto-electriques

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3351527B2 (ja) * 1991-11-08 2002-11-25 ブリテイッシュ・テクノロジー・グループ・リミテッド 計測装置
FR2712691B1 (fr) * 1993-11-19 1995-12-22 Bernard Fondeur Dispositif de mesure par interférométrie laser.
DE19613303C3 (de) * 1996-04-03 2002-07-04 Zeiss Carl Jena Gmbh Verfahren und Einrichtung zur absoluten Distanzmessung
JP4910838B2 (ja) * 2007-03-30 2012-04-04 サクサ株式会社 筺体の開閉検知構造

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2271539A1 (cs) * 1974-05-13 1975-12-12 Zeiss Jena Veb Carl

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2271539A1 (cs) * 1974-05-13 1975-12-12 Zeiss Jena Veb Carl

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532417A1 (fr) * 1982-09-01 1984-03-02 Zeiss Jena Veb Carl Disposition interferometrique pour la mesure de distances opto-electriques

Also Published As

Publication number Publication date
JPS5714703A (en) 1982-01-26
DE3112633A1 (de) 1982-04-15
FR2485718B1 (cs) 1985-03-29
DD158187A3 (de) 1983-01-05
GB2079000B (en) 1984-03-07
GB2079000A (en) 1982-01-13
SU1168800A1 (ru) 1985-07-23

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