FR2485718B1 - - Google Patents

Info

Publication number
FR2485718B1
FR2485718B1 FR8111314A FR8111314A FR2485718B1 FR 2485718 B1 FR2485718 B1 FR 2485718B1 FR 8111314 A FR8111314 A FR 8111314A FR 8111314 A FR8111314 A FR 8111314A FR 2485718 B1 FR2485718 B1 FR 2485718B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8111314A
Other languages
French (fr)
Other versions
FR2485718A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of FR2485718A1 publication Critical patent/FR2485718A1/fr
Application granted granted Critical
Publication of FR2485718B1 publication Critical patent/FR2485718B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8111314A 1980-06-30 1981-06-09 Interferometre a deux etages Granted FR2485718A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD80222233A DD158187A3 (de) 1980-06-30 1980-06-30 Zweistufeninterferometer

Publications (2)

Publication Number Publication Date
FR2485718A1 FR2485718A1 (fr) 1981-12-31
FR2485718B1 true FR2485718B1 (cs) 1985-03-29

Family

ID=5525028

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8111314A Granted FR2485718A1 (fr) 1980-06-30 1981-06-09 Interferometre a deux etages

Country Status (6)

Country Link
JP (1) JPS5714703A (cs)
DD (1) DD158187A3 (cs)
DE (1) DE3112633A1 (cs)
FR (1) FR2485718A1 (cs)
GB (1) GB2079000B (cs)
SU (1) SU1168800A1 (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD209263A1 (de) * 1982-09-01 1984-04-25 Univ Ernst Moritz Arndt Interferometrische anordnung zur optoelektrischen distanzmessung
JP3351527B2 (ja) * 1991-11-08 2002-11-25 ブリテイッシュ・テクノロジー・グループ・リミテッド 計測装置
FR2712691B1 (fr) * 1993-11-19 1995-12-22 Bernard Fondeur Dispositif de mesure par interférométrie laser.
DE19613303C3 (de) * 1996-04-03 2002-07-04 Zeiss Carl Jena Gmbh Verfahren und Einrichtung zur absoluten Distanzmessung
JP4910838B2 (ja) * 2007-03-30 2012-04-04 サクサ株式会社 筺体の開閉検知構造

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD111993A1 (cs) * 1974-05-13 1975-03-12

Also Published As

Publication number Publication date
JPS5714703A (en) 1982-01-26
DE3112633A1 (de) 1982-04-15
DD158187A3 (de) 1983-01-05
GB2079000B (en) 1984-03-07
GB2079000A (en) 1982-01-13
FR2485718A1 (fr) 1981-12-31
SU1168800A1 (ru) 1985-07-23

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Legal Events

Date Code Title Description
ST Notification of lapse