GB2079000B - Two-stage interferometer - Google Patents
Two-stage interferometerInfo
- Publication number
- GB2079000B GB2079000B GB8119729A GB8119729A GB2079000B GB 2079000 B GB2079000 B GB 2079000B GB 8119729 A GB8119729 A GB 8119729A GB 8119729 A GB8119729 A GB 8119729A GB 2079000 B GB2079000 B GB 2079000B
- Authority
- GB
- United Kingdom
- Prior art keywords
- stage interferometer
- interferometer
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD80222233A DD158187A3 (en) | 1980-06-30 | 1980-06-30 | ZWEISTUFENINTERFEROMETER |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2079000A GB2079000A (en) | 1982-01-13 |
GB2079000B true GB2079000B (en) | 1984-03-07 |
Family
ID=5525028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8119729A Expired GB2079000B (en) | 1980-06-30 | 1981-06-26 | Two-stage interferometer |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5714703A (en) |
DD (1) | DD158187A3 (en) |
DE (1) | DE3112633A1 (en) |
FR (1) | FR2485718A1 (en) |
GB (1) | GB2079000B (en) |
SU (1) | SU1168800A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD209263A1 (en) * | 1982-09-01 | 1984-04-25 | Univ Ernst Moritz Arndt | INTERFEROMETRIC ARRANGEMENT FOR OPTOELECTRIC DISTANCE MEASUREMENT |
EP0611438B1 (en) * | 1991-11-08 | 1996-07-03 | British Technology Group Ltd | Optical measuring instruments |
FR2712691B1 (en) * | 1993-11-19 | 1995-12-22 | Bernard Fondeur | Laser interferometry measurement device. |
DE19613303C3 (en) * | 1996-04-03 | 2002-07-04 | Zeiss Carl Jena Gmbh | Method and device for absolute distance measurement |
JP4910838B2 (en) * | 2007-03-30 | 2012-04-04 | サクサ株式会社 | Open / close detection structure of the housing |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD111993A1 (en) * | 1974-05-13 | 1975-03-12 |
-
1980
- 1980-06-30 DD DD80222233A patent/DD158187A3/en unknown
-
1981
- 1981-03-30 DE DE19813112633 patent/DE3112633A1/en not_active Withdrawn
- 1981-04-14 SU SU817771750A patent/SU1168800A1/en active
- 1981-05-08 JP JP6839681A patent/JPS5714703A/en active Pending
- 1981-06-09 FR FR8111314A patent/FR2485718A1/en active Granted
- 1981-06-26 GB GB8119729A patent/GB2079000B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2485718B1 (en) | 1985-03-29 |
FR2485718A1 (en) | 1981-12-31 |
SU1168800A1 (en) | 1985-07-23 |
DD158187A3 (en) | 1983-01-05 |
JPS5714703A (en) | 1982-01-26 |
GB2079000A (en) | 1982-01-13 |
DE3112633A1 (en) | 1982-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |