FR2712691B1 - Laser interferometry measurement device. - Google Patents

Laser interferometry measurement device.

Info

Publication number
FR2712691B1
FR2712691B1 FR9313886A FR9313886A FR2712691B1 FR 2712691 B1 FR2712691 B1 FR 2712691B1 FR 9313886 A FR9313886 A FR 9313886A FR 9313886 A FR9313886 A FR 9313886A FR 2712691 B1 FR2712691 B1 FR 2712691B1
Authority
FR
France
Prior art keywords
parallel
reflecting
targets
separating
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9313886A
Other languages
French (fr)
Other versions
FR2712691A1 (en
Inventor
Bernard Fondeur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR9313886A priority Critical patent/FR2712691B1/en
Priority to PCT/FR1994/001340 priority patent/WO1995014210A1/en
Publication of FR2712691A1 publication Critical patent/FR2712691A1/en
Application granted granted Critical
Publication of FR2712691B1 publication Critical patent/FR2712691B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Device for laser interferometric measurement of the variation of the distance separating a stationary point and a moving point in space each having a reflecting target (8, 9). The device comprises a source (2) of a coherent light beam (1), a separating surface (3) arranged on the path (1) of the beam for dividing the latter into a through beam (4) and a diverted beam (5) and comprising a surface for reflecting the diverted beam (5) in a parallel direction to the through beam (4), a tracking optical device (7) receiving, firstly, at the input the two parallel beams (4 and 5) and pointing them while holding them parallel in the direction of the two targets (8, 9) so that one of the beams (4, 5) is continually pointed toward the respective targets (8) and, secondly, the parallel beams reflected by the same targets (8, 9) in order to point them, while holding them parallel, towards the separating (3) and reflecting (6) surfaces.
FR9313886A 1993-11-19 1993-11-19 Laser interferometry measurement device. Expired - Fee Related FR2712691B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9313886A FR2712691B1 (en) 1993-11-19 1993-11-19 Laser interferometry measurement device.
PCT/FR1994/001340 WO1995014210A1 (en) 1993-11-19 1994-11-16 Laser interferometric measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9313886A FR2712691B1 (en) 1993-11-19 1993-11-19 Laser interferometry measurement device.

Publications (2)

Publication Number Publication Date
FR2712691A1 FR2712691A1 (en) 1995-05-24
FR2712691B1 true FR2712691B1 (en) 1995-12-22

Family

ID=9453058

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9313886A Expired - Fee Related FR2712691B1 (en) 1993-11-19 1993-11-19 Laser interferometry measurement device.

Country Status (2)

Country Link
FR (1) FR2712691B1 (en)
WO (1) WO1995014210A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH694343A5 (en) * 1999-07-28 2004-11-30 Leica Geosystems Ag Method and apparatus for distance measurement.
US8760786B2 (en) * 2012-06-25 2014-06-24 Oracle International Corporation Lateral tape motion detector

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1251040B (en) * 1967-09-28
FR1300514A (en) * 1961-09-14 1962-08-03 Zeiss Jena Veb Carl Device for the formation of an experimental value by interference, applicable to measuring and control installations
US4278351A (en) * 1979-05-09 1981-07-14 Nasa Interferometer
DD158187A3 (en) * 1980-06-30 1983-01-05 Karlheinz Bechstein ZWEISTUFENINTERFEROMETER
EP0079981B1 (en) * 1981-11-25 1986-05-14 Ibm Deutschland Gmbh Phase balancing of an optical wave front

Also Published As

Publication number Publication date
FR2712691A1 (en) 1995-05-24
WO1995014210A1 (en) 1995-05-26

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Legal Events

Date Code Title Description
ST Notification of lapse