FR2457620A1 - Machine de formation d'une image d'un ouvrage a circuits imprimes sur un support de sortie a partir de donnees representatives de l'ouvrage - Google Patents

Machine de formation d'une image d'un ouvrage a circuits imprimes sur un support de sortie a partir de donnees representatives de l'ouvrage

Info

Publication number
FR2457620A1
FR2457620A1 FR8011697A FR8011697A FR2457620A1 FR 2457620 A1 FR2457620 A1 FR 2457620A1 FR 8011697 A FR8011697 A FR 8011697A FR 8011697 A FR8011697 A FR 8011697A FR 2457620 A1 FR2457620 A1 FR 2457620A1
Authority
FR
France
Prior art keywords
work
machine
image
printed circuits
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8011697A
Other languages
English (en)
Other versions
FR2457620B1 (fr
Inventor
Don Barker Neumann
Lyle K Norton
Eric Verne Olson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eocom Corp
Original Assignee
Eocom Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eocom Corp filed Critical Eocom Corp
Publication of FR2457620A1 publication Critical patent/FR2457620A1/fr
Application granted granted Critical
Publication of FR2457620B1 publication Critical patent/FR2457620B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0002Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/02Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
    • G06K15/12Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
    • G06K15/1204Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers involving the fast moving of an optical beam in the main scanning direction
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/02Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
    • G06K15/12Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
    • G06K15/1204Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers involving the fast moving of an optical beam in the main scanning direction
    • G06K15/1219Detection, control or error compensation of scanning velocity or position, e.g. synchronisation
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047Detection, control or error compensation of scanning velocity or position
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047Detection, control or error compensation of scanning velocity or position
    • H04N1/053Detection, control or error compensation of scanning velocity or position in main scanning direction, e.g. synchronisation of line start or picture elements in a line
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/10Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces
    • H04N1/1008Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces with sub-scanning by translatory movement of the picture-bearing surface
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/32Circuits or arrangements for control or supervision between transmitter and receiver or between image input and image output device, e.g. between a still-image camera and its memory or between a still-image camera and a printer device
    • H04N1/36Circuits or arrangements for control or supervision between transmitter and receiver or between image input and image output device, e.g. between a still-image camera and its memory or between a still-image camera and a printer device for synchronising or phasing transmitter and receiver
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/40Picture signal circuits
    • H04N1/401Compensating positionally unequal response of the pick-up or reproducing head
    • H04N1/4015Compensating positionally unequal response of the pick-up or reproducing head of the reproducing head
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H04N1/1135Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors for the main-scan only
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406Arrangements for positioning elements within a head
    • H04N2201/02416Rotational positioning, i.e. with respect to an axis
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/02439Positioning method
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
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    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
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    • H04N2201/02439Positioning method
    • H04N2201/02443Positioning method using adhesive
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/028Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted for picture information pick-up
    • H04N2201/03Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted for picture information pick-up deleted
    • H04N2201/031Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted for picture information pick-up deleted deleted
    • H04N2201/03104Integral pick-up heads, i.e. self-contained heads whose basic elements are a light source, a lens and a photodetector supported by a single-piece frame
    • H04N2201/03108Components of integral heads
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/0471Detection of scanning velocity or position using dedicated detectors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/04715Detection of scanning velocity or position by detecting marks or the like, e.g. slits
    • H04N2201/04724Detection of scanning velocity or position by detecting marks or the like, e.g. slits on a separate encoder wheel
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/04715Detection of scanning velocity or position by detecting marks or the like, e.g. slits
    • H04N2201/04724Detection of scanning velocity or position by detecting marks or the like, e.g. slits on a separate encoder wheel
    • H04N2201/04725Detection of scanning velocity or position by detecting marks or the like, e.g. slits on a separate encoder wheel connected to the sub-scanning drive means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/04729Detection of scanning velocity or position in the main-scan direction
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/04731Detection of scanning velocity or position in the sub-scan direction
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/04Scanning arrangements
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    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/04734Detecting at frequent intervals, e.g. once per line for sub-scan control
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    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/04734Detecting at frequent intervals, e.g. once per line for sub-scan control
    • H04N2201/04736Detecting at frequent intervals, e.g. once per line for sub-scan control with varying intervals between consecutive detections
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
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    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701Detection of scanning velocity or position
    • H04N2201/04744Detection of scanning velocity or position by detecting the scanned beam or a reference beam
    • H04N2201/04746Detection of scanning velocity or position by detecting the scanned beam or a reference beam after modulation by a grating, mask or the like
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753Control or error compensation of scanning position or velocity
    • H04N2201/04755Control or error compensation of scanning position or velocity by controlling the position or movement of a scanning element or carriage, e.g. of a polygonal mirror, of a drive motor
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753Control or error compensation of scanning position or velocity
    • H04N2201/04756Control or error compensation of scanning position or velocity by controlling the position or movement of the sheet, the sheet support or the photoconductive surface
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753Control or error compensation of scanning position or velocity
    • H04N2201/04758Control or error compensation of scanning position or velocity by controlling the position of the scanned image area
    • H04N2201/04767Control or error compensation of scanning position or velocity by controlling the position of the scanned image area by controlling the timing of the signals, e.g. by controlling the frequency o phase of the pixel clock
    • H04N2201/04768Controlling the frequency of the signals
    • H04N2201/04772Controlling the frequency of the signals using a phase-locked loop
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    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
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    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753Control or error compensation of scanning position or velocity
    • H04N2201/04789Control or error compensation of scanning position or velocity in the main-scan direction
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753Control or error compensation of scanning position or velocity
    • H04N2201/04791Control or error compensation of scanning position or velocity in the sub-scan direction
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753Control or error compensation of scanning position or velocity
    • H04N2201/04794Varying the control or compensation during the scan, e.g. using continuous feedback or from line to line
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04Scanning arrangements
    • H04N2201/047Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753Control or error compensation of scanning position or velocity
    • H04N2201/04794Varying the control or compensation during the scan, e.g. using continuous feedback or from line to line
    • H04N2201/04798Varying the main-scan control during the main-scan, e.g. facet tracking
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0548Masks
    • H05K2203/056Using an artwork, i.e. a photomask for exposing photosensitive layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107Using laser light
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/107Using laser light
    • H05K2203/108Using a plurality of lasers or laser light with a plurality of wavelengths

Abstract

L'INVENTION CONCERNE UNE MACHINE QUI UTILISE UN FAISCEAU LASER POUR PRODUIRE UN OUVRAGE DESTINE A DES PLAQUETTES A CIRCUITS IMPRIMES. LE FAISCEAU LASER EST MODULE CONFORMEMENT A L'OUVRAGE A REALISER ET IL EXECUTE UN MOUVEMENT D'ANALYSE SUR UN SUPPORT DE SORTIE POUR FORMER SUR CE DERNIER UNE IMAGE DUDIT OUVRAGE. L'ABERRATION CHROMATIQUE ET LES DEFAUTS DE LINEARITE QUI NUISENT AUTREMENT A LA QUALITE ET A LA PRECISION DE L'IMAGE SONT CORRIGES. DOMAINE D'APPLICATION: FABRICATION DE CIRCUITS IMPRIMES.
FR8011697A 1979-05-24 1980-05-27 Machine de formation d'une image d'un ouvrage a circuits imprimes sur un support de sortie a partir de donnees representatives de l'ouvrage Granted FR2457620A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/042,133 US4419675A (en) 1979-05-24 1979-05-24 Imaging system and method for printed circuit artwork and the like

Publications (2)

Publication Number Publication Date
FR2457620A1 true FR2457620A1 (fr) 1980-12-19
FR2457620B1 FR2457620B1 (fr) 1985-03-29

Family

ID=21920218

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8011697A Granted FR2457620A1 (fr) 1979-05-24 1980-05-27 Machine de formation d'une image d'un ouvrage a circuits imprimes sur un support de sortie a partir de donnees representatives de l'ouvrage

Country Status (10)

Country Link
US (1) US4419675A (fr)
JP (5) JPS55166643A (fr)
AU (2) AU540855B2 (fr)
CA (1) CA1149080A (fr)
DE (3) DE3050986C2 (fr)
FR (1) FR2457620A1 (fr)
GB (5) GB2050750B (fr)
IT (1) IT1130659B (fr)
NL (1) NL8003018A (fr)
SE (1) SE8003860L (fr)

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US5254435A (en) * 1985-06-10 1993-10-19 The Foxboro Company Method of patterning resist
DE3650597T2 (de) * 1985-08-15 1997-06-12 Canon Kk Gerät zur Bildererzeugung aus einem digitalen Videosignal
GB8531830D0 (en) * 1985-12-30 1986-02-05 Davies H J Photo fabrication
DE3603544A1 (de) * 1986-02-05 1987-08-06 Sick Optik Elektronik Erwin Optische abtastvorrichtung
US5057861A (en) * 1987-11-28 1991-10-15 Dainippon Screen Mfg. Co. Ltd. Color image recorder and image projector useful therefor
JPH01180509A (ja) * 1988-01-13 1989-07-18 Nec Corp レーザ走査装置
US5070026A (en) * 1989-06-26 1991-12-03 Spire Corporation Process of making a ferroelectric electronic component and product
JP2799080B2 (ja) * 1991-03-18 1998-09-17 株式会社日立製作所 レーザ加工方法とその装置並びに透過型液晶素子、配線パターン欠陥修正方法とその装置
AU687717B3 (en) * 1997-06-04 1998-02-26 Umax Data Systems Inc. Document moving transmission system for an optical scanner
BE1011569A5 (nl) * 1997-11-25 1999-11-09 Lvd Co Lasersnij-inrichting.
DE19829986C1 (de) * 1998-07-04 2000-03-30 Lis Laser Imaging Systems Gmbh Verfahren zur Direktbelichtung von Leiterplattensubstraten
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DE102006017629A1 (de) * 2006-02-22 2007-08-30 Lpkf Laser & Electronics Ag Verfahren und Vorrichtung zur Laserbearbeitung
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Publication number Publication date
NL8003018A (nl) 1980-11-26
US4419675A (en) 1983-12-06
CA1149080A (fr) 1983-06-28
GB2126835A (en) 1984-03-28
JPS6323463A (ja) 1988-01-30
GB2050750B (en) 1984-05-02
GB2126833B (en) 1984-09-05
GB2127253A (en) 1984-04-04
IT8022260A0 (it) 1980-05-22
AU2747684A (en) 1984-08-16
GB2050750A (en) 1981-01-07
IT1130659B (it) 1986-06-18
AU551136B2 (en) 1986-04-17
JPH0414326B2 (fr) 1992-03-12
GB2126835B (en) 1984-09-12
AU5851880A (en) 1980-11-27
DE3019869C2 (fr) 1988-09-29
JPS6323123A (ja) 1988-01-30
DE3019869A1 (de) 1980-12-04
JPS6323122A (ja) 1988-01-30
JPH0261023B2 (fr) 1990-12-18
GB8325705D0 (en) 1983-10-26
DE3050984C2 (fr) 1992-07-02
DE3050986C2 (fr) 1988-03-17
JPS6345086B2 (fr) 1988-09-08
DE3050986A1 (fr) 1985-06-13
GB2127253B (en) 1984-09-19
GB8325704D0 (en) 1983-10-26
FR2457620B1 (fr) 1985-03-29
GB8325706D0 (en) 1983-10-26
JPS55166643A (en) 1980-12-25
GB2126834B (en) 1984-09-05
AU540855B2 (en) 1984-12-06
GB2126833A (en) 1984-03-28
JPS6323462A (ja) 1988-01-30
GB8325707D0 (en) 1983-10-26
SE8003860L (sv) 1980-11-25
GB2126834A (en) 1984-03-28

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