JPS57191543A - Focus adjusting method of ultrasonic microscope - Google Patents

Focus adjusting method of ultrasonic microscope

Info

Publication number
JPS57191543A
JPS57191543A JP56075630A JP7563081A JPS57191543A JP S57191543 A JPS57191543 A JP S57191543A JP 56075630 A JP56075630 A JP 56075630A JP 7563081 A JP7563081 A JP 7563081A JP S57191543 A JPS57191543 A JP S57191543A
Authority
JP
Japan
Prior art keywords
acoustic lens
axis
sample
found
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56075630A
Other languages
Japanese (ja)
Inventor
Junichi Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP56075630A priority Critical patent/JPS57191543A/en
Publication of JPS57191543A publication Critical patent/JPS57191543A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To automatically adjust the focus of an ultrasonic mirocsope by applying the focus detecting method employed by conventional optical equipment. CONSTITUTION:When a reflected-wave detection signal at some movement position in the X-axis direction of a sample table 7 is Vn, the evaluated value D of an ultrasonic image of one X-axis line at each position in the Z-axis direction is found by the evaluation function equation in the figure, so that the value D is maximized when an acoustic lens 4 at a focusing Zf for a sample 8. The acoustic lens 4 is moved intermittently to the sampele 8 in the 1st direction on the Z axis and the evaluated values D of the ultrasonic image of one X-axis line at successive positions are found and compared; when their great-small relation is inverted, the acoustic lens 4 is moved in the 2nd direction opposite to the 1st direction until the position where the last evaluated value is obtained, thus placing the acoustic lens 4 at the focusing position for the sample.
JP56075630A 1981-05-21 1981-05-21 Focus adjusting method of ultrasonic microscope Pending JPS57191543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56075630A JPS57191543A (en) 1981-05-21 1981-05-21 Focus adjusting method of ultrasonic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56075630A JPS57191543A (en) 1981-05-21 1981-05-21 Focus adjusting method of ultrasonic microscope

Publications (1)

Publication Number Publication Date
JPS57191543A true JPS57191543A (en) 1982-11-25

Family

ID=13581749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56075630A Pending JPS57191543A (en) 1981-05-21 1981-05-21 Focus adjusting method of ultrasonic microscope

Country Status (1)

Country Link
JP (1) JPS57191543A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563898A (en) * 1983-03-07 1986-01-14 Hitachi, Ltd. Acoustic microscope
US5301552A (en) * 1989-01-20 1994-04-12 Canon Kabushiki Kaisha Ultrasonic apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563898A (en) * 1983-03-07 1986-01-14 Hitachi, Ltd. Acoustic microscope
US5301552A (en) * 1989-01-20 1994-04-12 Canon Kabushiki Kaisha Ultrasonic apparatus

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