GB1461169A - Device for generating masks for microcircuits - Google Patents

Abstract

1461169 Copying by scanning G WESTERBERG 11 March 1974 10820/74 Heading H4F A photo-sensitive layer 141, Fig. 1, on a glass plate 14 is scanned by radiation from a radiation source focused thereon by a lens 13 by relatively rapid reciprocating movement of a first slide 11 carrying the lens 13 and relatively slow movement at right-angles thereto of a second slide 12 carrying the plate 14. Alternatively the second slide 12 may be reciprocated rapidly and the first slide 11 may be moved slowly. An acousto-optical modulator (403, Fig. 8, not shown) may be included to intensity modulate the radiation beam and may also deflect this beam at right-angles to the line scan direction so that lines may be recorded between already recorded lines, or so as to replace each line by a densely zig-zag line, or to record several lines at a time. To check a recorded plate 14, the plate is scanned by uniform intensity radiation, one or more photodetectors (71, 73, Fig. 4; 74, 75, Fig. 7, not shown) being provided to detect the radiation transmitted or reflected by the plate. A laser interferometer including a prism 16 attached to the first slide 11 may be included to determine the position of this slide and control the application of signals to the modulator. In the embodiment shown beams 20 and 18 are spring-biased towards slides 12 and 11 respectively; in an alternative embodiment (Figs. 4-6, not shown) each of the beams 17-20 is provided with a replaceable rib abutting bearings supported in V-grooves in the ribs and slides, two of these ribs being spring-biased towards the respective slides.