FR2435106A1 - Memoire a semi-conducteurs integree selon la technique mos et procede pour sa fabrication - Google Patents
Memoire a semi-conducteurs integree selon la technique mos et procede pour sa fabricationInfo
- Publication number
- FR2435106A1 FR2435106A1 FR7921664A FR7921664A FR2435106A1 FR 2435106 A1 FR2435106 A1 FR 2435106A1 FR 7921664 A FR7921664 A FR 7921664A FR 7921664 A FR7921664 A FR 7921664A FR 2435106 A1 FR2435106 A1 FR 2435106A1
- Authority
- FR
- France
- Prior art keywords
- mos
- manufacture
- integrated semiconductor
- semiconductor memory
- memory according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
- G11C11/404—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/35—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices with charge storage in a depletion layer, e.g. charge coupled devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
Mémoire à semi-conducteurs intégrée suivant la technique MOS et procédé pour sa fabrication. Dans cette mémoire, dans laquelle deux transistors MOS de deux cellules de mémoire sont commandés en commun par un conducteur de mots, et deux transistors MOS sont accouplés à un conducteur de bits et les grilles des transistors et une électrode de condensateurs de mémoire de cellules sont constituées par des couches respectives de polysilicium situées dans deux plans respectifs, les conducteurs de bits 37, 38 s'étendent dans un troisième plan sous la forme de voies en polysilicium, accouplées aux transistors MOS par des zones de raccordement, dans un substrat semi-conducteur contenant les cellules. Application notamment aux mémoires MOS.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19782837877 DE2837877A1 (de) | 1978-08-30 | 1978-08-30 | Mos-integrierter halbleiterspeicher sowie verfahren zu seiner herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2435106A1 true FR2435106A1 (fr) | 1980-03-28 |
FR2435106B1 FR2435106B1 (fr) | 1984-05-04 |
Family
ID=6048279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7921664A Granted FR2435106A1 (fr) | 1978-08-30 | 1979-08-29 | Memoire a semi-conducteurs integree selon la technique mos et procede pour sa fabrication |
Country Status (5)
Country | Link |
---|---|
US (1) | US4334236A (fr) |
JP (1) | JPS5534500A (fr) |
DE (1) | DE2837877A1 (fr) |
FR (1) | FR2435106A1 (fr) |
GB (1) | GB2029103B (fr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4240195A (en) * | 1978-09-15 | 1980-12-23 | Bell Telephone Laboratories, Incorporated | Dynamic random access memory |
EP0154685B1 (fr) * | 1980-01-25 | 1990-04-18 | Kabushiki Kaisha Toshiba | Dispositif de mémoire semi-conductrice |
US4536941A (en) * | 1980-03-21 | 1985-08-27 | Kuo Chang Kiang | Method of making high density dynamic memory cell |
US4883543A (en) * | 1980-06-05 | 1989-11-28 | Texas Instruments Incroporated | Shielding for implant in manufacture of dynamic memory |
JPS5718356A (en) * | 1980-07-07 | 1982-01-30 | Mitsubishi Electric Corp | Semiconductor memory storage |
JPS5793572A (en) * | 1980-12-03 | 1982-06-10 | Nec Corp | Manufacture of semiconductor device |
DE3046218C2 (de) * | 1980-12-08 | 1982-09-02 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Erzeugung einer Eintransistor-Speicherzelle in Doppelsilizium-Technik |
US4403394A (en) * | 1980-12-17 | 1983-09-13 | International Business Machines Corporation | Formation of bit lines for ram device |
JPS5831568A (ja) * | 1981-08-18 | 1983-02-24 | Nec Corp | 半導体メモリ |
US4453176A (en) * | 1981-12-31 | 1984-06-05 | International Business Machines Corporation | LSI Chip carrier with buried repairable capacitor with low inductance leads |
US4887135A (en) * | 1982-02-09 | 1989-12-12 | American Telephone And Telegraph Company, At&T Bell Laboratories | Dual level polysilicon single transistor-capacitor memory array |
US4574465A (en) * | 1982-04-13 | 1986-03-11 | Texas Instruments Incorporated | Differing field oxide thicknesses in dynamic memory device |
US4652898A (en) * | 1984-07-19 | 1987-03-24 | International Business Machines Corporation | High speed merged charge memory |
US4774203A (en) * | 1985-10-25 | 1988-09-27 | Hitachi, Ltd. | Method for making static random-access memory device |
JPH0831565B2 (ja) * | 1986-08-05 | 1996-03-27 | 三菱電機株式会社 | ランダムアクセスメモリ |
US5087951A (en) * | 1988-05-02 | 1992-02-11 | Micron Technology | Semiconductor memory device transistor and cell structure |
US10707296B2 (en) * | 2018-10-10 | 2020-07-07 | Texas Instruments Incorporated | LOCOS with sidewall spacer for different capacitance density capacitors |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2310609A1 (fr) * | 1975-05-05 | 1976-12-03 | Intel Corp | Cellule et paire de cellules de memoire a acces direct sans contact |
FR2371042A1 (fr) * | 1976-11-10 | 1978-06-09 | Texas Instruments Inc | Memoire dynamique a acces direct, avec des cellules de memoire de grande capacite |
DE2756855A1 (de) * | 1976-12-20 | 1978-07-06 | Texas Instruments Inc | Verfahren zum herstellen einer matrix aus speicherzellen mit hoher speicherkapazitaet |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2431079C3 (de) * | 1974-06-28 | 1979-12-13 | Ibm Deutschland Gmbh, 7000 Stuttgart | Dynamischer Halbleiterspeicher mit Zwei-Transistor-Speicherelementen |
JPS5853512B2 (ja) * | 1976-02-13 | 1983-11-29 | 株式会社東芝 | 半導体記憶装置の製造方法 |
JPS5390888A (en) | 1977-01-21 | 1978-08-10 | Nec Corp | Integrated circuit device |
US4240195A (en) * | 1978-09-15 | 1980-12-23 | Bell Telephone Laboratories, Incorporated | Dynamic random access memory |
-
1978
- 1978-08-30 DE DE19782837877 patent/DE2837877A1/de active Granted
-
1979
- 1979-08-20 US US06/067,926 patent/US4334236A/en not_active Expired - Lifetime
- 1979-08-28 GB GB7929716A patent/GB2029103B/en not_active Expired
- 1979-08-29 JP JP11015479A patent/JPS5534500A/ja active Pending
- 1979-08-29 FR FR7921664A patent/FR2435106A1/fr active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2310609A1 (fr) * | 1975-05-05 | 1976-12-03 | Intel Corp | Cellule et paire de cellules de memoire a acces direct sans contact |
FR2371042A1 (fr) * | 1976-11-10 | 1978-06-09 | Texas Instruments Inc | Memoire dynamique a acces direct, avec des cellules de memoire de grande capacite |
DE2756855A1 (de) * | 1976-12-20 | 1978-07-06 | Texas Instruments Inc | Verfahren zum herstellen einer matrix aus speicherzellen mit hoher speicherkapazitaet |
Non-Patent Citations (1)
Title |
---|
EXBK/79 * |
Also Published As
Publication number | Publication date |
---|---|
US4334236A (en) | 1982-06-08 |
GB2029103B (en) | 1983-03-09 |
DE2837877C2 (fr) | 1987-04-23 |
DE2837877A1 (de) | 1980-03-06 |
JPS5534500A (en) | 1980-03-11 |
FR2435106B1 (fr) | 1984-05-04 |
GB2029103A (en) | 1980-03-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |