FR2432767A1 - Procede de programmation en fin de fabrication de circuits integres a semi-conducteurs - Google Patents
Procede de programmation en fin de fabrication de circuits integres a semi-conducteursInfo
- Publication number
- FR2432767A1 FR2432767A1 FR7910373A FR7910373A FR2432767A1 FR 2432767 A1 FR2432767 A1 FR 2432767A1 FR 7910373 A FR7910373 A FR 7910373A FR 7910373 A FR7910373 A FR 7910373A FR 2432767 A1 FR2432767 A1 FR 2432767A1
- Authority
- FR
- France
- Prior art keywords
- manufacture
- programming
- integrated semiconductor
- programming method
- semiconductor circuits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 238000002161 passivation Methods 0.000 abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- 238000002513 implantation Methods 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 230000015654 memory Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1041—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface
- H01L29/1045—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface the doping structure being parallel to the channel length, e.g. DMOS like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
- H10B20/27—ROM only
- H10B20/30—ROM only having the source region and the drain region on the same level, e.g. lateral transistors
- H10B20/38—Doping programmed, e.g. mask ROM
- H10B20/387—Source region or drain region doping programmed
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/091—Laser beam processing of fets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/143—Shadow masking
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Memories (AREA)
- Element Separation (AREA)
- Non-Volatile Memory (AREA)
Abstract
L'invention concerne un procédé de programmation en fin de fabrication de circuits intégrés à semi-conducteurs. Une couche photorésistante est déposé sur la couche de passivation qui protège la plaquette presque terminée. Des ouvertures étroites sont ménagées dans cette couche photorésistante au-dessus des composants qui doivent être programmés par implantation d'ions et des ouvertures larges sont ménagées au-dessus des contacts. L'implantation est faite perpendiculairement avec des ions de haute énergie, et l'élimination de la couche de passivation sur les contacts est faite obliquement avec des ions de faible énergie qui n'atteignent pas le fond des ouvertures étroites. Application à la programmation des mémoires permanentes MOS.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/930,739 US4208780A (en) | 1978-08-03 | 1978-08-03 | Last-stage programming of semiconductor integrated circuits including selective removal of passivation layer |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2432767A1 true FR2432767A1 (fr) | 1980-02-29 |
FR2432767B3 FR2432767B3 (fr) | 1982-01-22 |
Family
ID=25459689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7910373A Granted FR2432767A1 (fr) | 1978-08-03 | 1979-04-24 | Procede de programmation en fin de fabrication de circuits integres a semi-conducteurs |
Country Status (6)
Country | Link |
---|---|
US (1) | US4208780A (fr) |
JP (1) | JPS5522890A (fr) |
DE (1) | DE2916843A1 (fr) |
FR (1) | FR2432767A1 (fr) |
GB (1) | GB2028581B (fr) |
NL (1) | NL7905381A (fr) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4294001A (en) * | 1979-01-08 | 1981-10-13 | Texas Instruments Incorporated | Method of making implant programmable metal gate MOS read only memory |
US4342100A (en) * | 1979-01-08 | 1982-07-27 | Texas Instruments Incorporated | Implant programmable metal gate MOS read only memory |
US4294002A (en) * | 1979-05-21 | 1981-10-13 | International Business Machines Corp. | Making a short-channel FET |
US4282646A (en) * | 1979-08-20 | 1981-08-11 | International Business Machines Corporation | Method of making a transistor array |
US4514897A (en) * | 1979-09-04 | 1985-05-07 | Texas Instruments Incorporated | Electrically programmable floating gate semiconductor memory device |
US4364167A (en) * | 1979-11-28 | 1982-12-21 | General Motors Corporation | Programming an IGFET read-only-memory |
US4336647A (en) * | 1979-12-21 | 1982-06-29 | Texas Instruments Incorporated | Method of making implant programmable N-channel read only memory |
US4356042A (en) * | 1980-11-07 | 1982-10-26 | Mostek Corporation | Method for fabricating a semiconductor read only memory |
US4698899A (en) * | 1983-10-19 | 1987-10-13 | Gould Inc. | Field effect transistor |
WO1986001931A1 (fr) * | 1984-09-07 | 1986-03-27 | Pa Consulting Services Limited | Procede et appareil de chargement d'informations dans un dispositif semi-conducteur a circuit integre |
JPS62501597A (ja) * | 1985-08-27 | 1987-06-25 | ロツキイ−ド ミサイルズ アンド スペ−ス カンパニ−,インコ−ポレ−テツド | 半導体装置製造のさいのゲ−ト整合法 |
IT1186430B (it) * | 1985-12-12 | 1987-11-26 | Sgs Microelettrica Spa | Rpocedimento per la realizzazione di memorie a sola lettura in tecnologia nmos programmate mediante impiantazione ionica e memoria a sola lettura ottenuta mediante tale procedimento |
JPS62120127U (fr) * | 1986-01-22 | 1987-07-30 | ||
EP0449858B1 (fr) * | 1988-12-23 | 1993-05-05 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Transistor haute tension obtenu par technique cmos |
IT1239707B (it) * | 1990-03-15 | 1993-11-15 | St Microelectrics Srl | Processo per la realizzazione di una cella di memoria rom a bassa capacita' di drain |
JP2835216B2 (ja) * | 1991-09-12 | 1998-12-14 | 株式会社東芝 | 半導体装置の製造方法 |
JP2771057B2 (ja) * | 1991-10-21 | 1998-07-02 | シャープ株式会社 | 半導体装置の製造方法 |
EP0575688B1 (fr) * | 1992-06-26 | 1998-05-27 | STMicroelectronics S.r.l. | Programmation des cellules LDD-ROM |
US5306657A (en) * | 1993-03-22 | 1994-04-26 | United Microelectronics Corporation | Process for forming an FET read only memory device |
US5633202A (en) * | 1994-09-30 | 1997-05-27 | Intel Corporation | High tensile nitride layer |
US5459086A (en) * | 1994-11-07 | 1995-10-17 | United Microelectronics Corporation | Metal via sidewall tilt angle implant for SOG |
DE19505293A1 (de) * | 1995-02-16 | 1996-08-22 | Siemens Ag | Mehrwertige Festwertspeicherzelle mit verbessertem Störabstand |
TW335537B (en) * | 1996-11-25 | 1998-07-01 | United Microelectronics Corp | The ROM unit and manufacture method |
US6027978A (en) * | 1997-01-28 | 2000-02-22 | Advanced Micro Devices, Inc. | Method of making an IGFET with a non-uniform lateral doping profile in the channel region |
US6093951A (en) * | 1997-06-30 | 2000-07-25 | Sun Microsystems, Inc. | MOS devices with retrograde pocket regions |
US6249027B1 (en) | 1998-06-08 | 2001-06-19 | Sun Microsystems, Inc. | Partially depleted SOI device having a dedicated single body bias means |
JP3137077B2 (ja) * | 1998-06-16 | 2001-02-19 | 日本電気株式会社 | 半導体装置及びその製造方法 |
US6965165B2 (en) * | 1998-12-21 | 2005-11-15 | Mou-Shiung Lin | Top layers of metal for high performance IC's |
US6228777B1 (en) | 1999-06-08 | 2001-05-08 | Intel Corporation | Integrated circuit with borderless contacts |
US6960510B2 (en) * | 2002-07-01 | 2005-11-01 | International Business Machines Corporation | Method of making sub-lithographic features |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1047390A (fr) * | 1963-05-20 | 1900-01-01 | ||
BE759058A (fr) * | 1969-11-19 | 1971-05-17 | Philips Nv | |
US3775191A (en) * | 1971-06-28 | 1973-11-27 | Bell Canada Northern Electric | Modification of channel regions in insulated gate field effect transistors |
GB1534896A (en) * | 1975-05-19 | 1978-12-06 | Itt | Direct metal contact to buried layer |
US4080718A (en) * | 1976-12-14 | 1978-03-28 | Smc Standard Microsystems Corporation | Method of modifying electrical characteristics of MOS devices using ion implantation |
-
1978
- 1978-08-03 US US05/930,739 patent/US4208780A/en not_active Expired - Lifetime
-
1979
- 1979-04-24 FR FR7910373A patent/FR2432767A1/fr active Granted
- 1979-04-26 DE DE19792916843 patent/DE2916843A1/de active Granted
- 1979-04-27 JP JP5244779A patent/JPS5522890A/ja active Granted
- 1979-05-30 GB GB7918750A patent/GB2028581B/en not_active Expired
- 1979-07-10 NL NL7905381A patent/NL7905381A/nl not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE2916843A1 (de) | 1980-02-21 |
JPS5522890A (en) | 1980-02-18 |
GB2028581B (en) | 1983-01-12 |
NL7905381A (nl) | 1980-02-05 |
US4208780A (en) | 1980-06-24 |
DE2916843C2 (fr) | 1988-09-29 |
GB2028581A (en) | 1980-03-05 |
JPS6260817B2 (fr) | 1987-12-18 |
FR2432767B3 (fr) | 1982-01-22 |
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