FR2363193A1 - Procede de realisation d'un dispositif semi-conducteur et dispositif ainsi obtenu - Google Patents

Procede de realisation d'un dispositif semi-conducteur et dispositif ainsi obtenu

Info

Publication number
FR2363193A1
FR2363193A1 FR7625494A FR7625494A FR2363193A1 FR 2363193 A1 FR2363193 A1 FR 2363193A1 FR 7625494 A FR7625494 A FR 7625494A FR 7625494 A FR7625494 A FR 7625494A FR 2363193 A1 FR2363193 A1 FR 2363193A1
Authority
FR
France
Prior art keywords
auxiliary layer
metal film
semiconductor device
configuration
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7625494A
Other languages
English (en)
French (fr)
Other versions
FR2363193B1 (OSRAM
Inventor
Jean-Pierre Rioult
Raymond Fabie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7625494A priority Critical patent/FR2363193A1/fr
Publication of FR2363193A1 publication Critical patent/FR2363193A1/fr
Application granted granted Critical
Publication of FR2363193B1 publication Critical patent/FR2363193B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • H10W20/058—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches by depositing on sacrificial masks, e.g. using lift-off
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
FR7625494A 1976-08-23 1976-08-23 Procede de realisation d'un dispositif semi-conducteur et dispositif ainsi obtenu Granted FR2363193A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7625494A FR2363193A1 (fr) 1976-08-23 1976-08-23 Procede de realisation d'un dispositif semi-conducteur et dispositif ainsi obtenu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7625494A FR2363193A1 (fr) 1976-08-23 1976-08-23 Procede de realisation d'un dispositif semi-conducteur et dispositif ainsi obtenu

Publications (2)

Publication Number Publication Date
FR2363193A1 true FR2363193A1 (fr) 1978-03-24
FR2363193B1 FR2363193B1 (OSRAM) 1979-03-02

Family

ID=9177066

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7625494A Granted FR2363193A1 (fr) 1976-08-23 1976-08-23 Procede de realisation d'un dispositif semi-conducteur et dispositif ainsi obtenu

Country Status (1)

Country Link
FR (1) FR2363193A1 (OSRAM)

Also Published As

Publication number Publication date
FR2363193B1 (OSRAM) 1979-03-02

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Legal Events

Date Code Title Description
ST Notification of lapse