FR2341054A1 - Pompe turbomoleculaire a vide pousse - Google Patents

Pompe turbomoleculaire a vide pousse

Info

Publication number
FR2341054A1
FR2341054A1 FR7703978A FR7703978A FR2341054A1 FR 2341054 A1 FR2341054 A1 FR 2341054A1 FR 7703978 A FR7703978 A FR 7703978A FR 7703978 A FR7703978 A FR 7703978A FR 2341054 A1 FR2341054 A1 FR 2341054A1
Authority
FR
France
Prior art keywords
ball bearings
fast
vacuum pump
high vacuum
rotating shafts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7703978A
Other languages
English (en)
French (fr)
Other versions
FR2341054B1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SU762323859A external-priority patent/SU612100A1/ru
Application filed by Individual filed Critical Individual
Publication of FR2341054A1 publication Critical patent/FR2341054A1/fr
Application granted granted Critical
Publication of FR2341054B1 publication Critical patent/FR2341054B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
    • H02K7/16—Structural association with mechanical loads, e.g. with hand-held machine tools or fans for operation above the critical speed of vibration of the rotating parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
FR7703978A 1976-02-11 1977-02-11 Pompe turbomoleculaire a vide pousse Granted FR2341054A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU2322616 1976-02-11
SU762323859A SU612100A1 (ru) 1976-02-19 1976-02-19 Устройство дл подачи смазки к подшипникам

Publications (2)

Publication Number Publication Date
FR2341054A1 true FR2341054A1 (fr) 1977-09-09
FR2341054B1 FR2341054B1 (OSRAM) 1978-10-20

Family

ID=26665573

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7703978A Granted FR2341054A1 (fr) 1976-02-11 1977-02-11 Pompe turbomoleculaire a vide pousse

Country Status (2)

Country Link
DE (1) DE2637497C3 (OSRAM)
FR (1) FR2341054A1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115995935A (zh) * 2023-02-16 2023-04-21 中国科学院高能物理研究所 一种快速扫描x射线吸收精细结构谱学单色器高精度转轴系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113068A1 (de) * 1991-04-22 1992-11-05 Leybold Ag Verfahren zur ermittlung oder regelung der drehzahl eines asynchronmotors
DE4237972C2 (de) * 1992-11-11 1997-06-12 Leybold Ag Vakuumpumpe mit Rotor
DE4237971B4 (de) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115995935A (zh) * 2023-02-16 2023-04-21 中国科学院高能物理研究所 一种快速扫描x射线吸收精细结构谱学单色器高精度转轴系统

Also Published As

Publication number Publication date
FR2341054B1 (OSRAM) 1978-10-20
DE2637497A1 (de) 1977-08-18
DE2637497B2 (de) 1979-04-12
DE2637497C3 (de) 1979-11-29

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Legal Events

Date Code Title Description
ST Notification of lapse