JPS6469797A - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
JPS6469797A
JPS6469797A JP22637887A JP22637887A JPS6469797A JP S6469797 A JPS6469797 A JP S6469797A JP 22637887 A JP22637887 A JP 22637887A JP 22637887 A JP22637887 A JP 22637887A JP S6469797 A JPS6469797 A JP S6469797A
Authority
JP
Japan
Prior art keywords
rotor
stator
heat conductivity
turbo molecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22637887A
Other languages
Japanese (ja)
Other versions
JP2574810B2 (en
Inventor
Kazuaki Nakamori
Yoshihisa Awata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62226378A priority Critical patent/JP2574810B2/en
Publication of JPS6469797A publication Critical patent/JPS6469797A/en
Application granted granted Critical
Publication of JP2574810B2 publication Critical patent/JP2574810B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

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Abstract

PURPOSE:To restrain heat conduction to an axial flow turbo molecular pump by forming the rotor of the axial turbo molecular pump by a material with less heat conductivity in the device in which an axial flow turbo molecular pump, a centrifugal compression pump and a circular flow compression pump are arranged in order. CONSTITUTION:A drive shaft 3 is supported by plural bearings 5, 6 after passing through a housing 20 which has an intake port 1 and an exhaust port 2 and driven by a motor 4. Inside the housing 20 going from the intake port 1 to the exhaust port 2, rotor 7 and stator 8 of an axial flow turbo molecular pump, rotor 13 and stator 14 of a centrifugal compression pump and rotor 15 and stator 16 of a circular flow compression pump are arranged in order. In the above composition, the rotor 7 made of a strength member with less heat conductivity is arranged on the rotor 13 and the stator 8 is held down on to the stator 14 by a ring 9 made of the strength member with better heat conductivity through a space made of the strength member with less heat conductivity.
JP62226378A 1987-09-11 1987-09-11 Vacuum pump Expired - Lifetime JP2574810B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62226378A JP2574810B2 (en) 1987-09-11 1987-09-11 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62226378A JP2574810B2 (en) 1987-09-11 1987-09-11 Vacuum pump

Publications (2)

Publication Number Publication Date
JPS6469797A true JPS6469797A (en) 1989-03-15
JP2574810B2 JP2574810B2 (en) 1997-01-22

Family

ID=16844188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62226378A Expired - Lifetime JP2574810B2 (en) 1987-09-11 1987-09-11 Vacuum pump

Country Status (1)

Country Link
JP (1) JP2574810B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5217346A (en) * 1988-07-13 1993-06-08 Osaka Vacuum, Ltd. Vacuum pump
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
JP2002227765A (en) * 2001-02-01 2002-08-14 Stmp Kk Vacuum pump
WO2014045438A1 (en) * 2012-09-24 2014-03-27 株式会社島津製作所 Turbomolecular pump
CN113383165A (en) * 2018-12-12 2021-09-10 爱德华兹有限公司 Multistage turbomolecular pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183280A (en) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd CHOENSHINBUNRIKYOKAITENDOONDOBUNPUSEIGYOGATABUNSHIHONPU
JPS61207893A (en) * 1985-03-09 1986-09-16 ライボルト‐ヘレーウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Casing for turbo molecular vacuum pump
JPS62258186A (en) * 1986-05-02 1987-11-10 Hitachi Ltd Multi-stage type vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183280A (en) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd CHOENSHINBUNRIKYOKAITENDOONDOBUNPUSEIGYOGATABUNSHIHONPU
JPS61207893A (en) * 1985-03-09 1986-09-16 ライボルト‐ヘレーウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Casing for turbo molecular vacuum pump
JPS62258186A (en) * 1986-05-02 1987-11-10 Hitachi Ltd Multi-stage type vacuum pump

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5217346A (en) * 1988-07-13 1993-06-08 Osaka Vacuum, Ltd. Vacuum pump
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
JP2002227765A (en) * 2001-02-01 2002-08-14 Stmp Kk Vacuum pump
WO2014045438A1 (en) * 2012-09-24 2014-03-27 株式会社島津製作所 Turbomolecular pump
CN113383165A (en) * 2018-12-12 2021-09-10 爱德华兹有限公司 Multistage turbomolecular pump
CN113383165B (en) * 2018-12-12 2024-08-13 爱德华兹有限公司 Multistage turbomolecular pump

Also Published As

Publication number Publication date
JP2574810B2 (en) 1997-01-22

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