FR2341054A1 - Turbo molecular high vacuum pump - has fast and slow rotating shafts in separate ball bearings coaxial to each other - Google Patents

Turbo molecular high vacuum pump - has fast and slow rotating shafts in separate ball bearings coaxial to each other

Info

Publication number
FR2341054A1
FR2341054A1 FR7703978A FR7703978A FR2341054A1 FR 2341054 A1 FR2341054 A1 FR 2341054A1 FR 7703978 A FR7703978 A FR 7703978A FR 7703978 A FR7703978 A FR 7703978A FR 2341054 A1 FR2341054 A1 FR 2341054A1
Authority
FR
France
Prior art keywords
ball bearings
fast
vacuum pump
high vacuum
rotating shafts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7703978A
Other languages
French (fr)
Other versions
FR2341054B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SU762323859A external-priority patent/SU612100A1/en
Application filed by Individual filed Critical Individual
Publication of FR2341054A1 publication Critical patent/FR2341054A1/en
Application granted granted Critical
Publication of FR2341054B1 publication Critical patent/FR2341054B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
    • H02K7/16—Structural association with mechanical loads, e.g. with hand-held machine tools or fans for operation above the critical speed of vibration of the rotating parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The turbomolecular high vacuum pump has an almost vertical cylinder housing with inlet or outlet sockets for the gas to be extracted. In the upper section of the pump interior a stand with blades is mounted, positioned between the rotor blades so that passages for the gas to be extracted are formed. The rotor is connected to a fast largely vertical hollow shaft in ball bearings and connected to a drive high frequency motor. In the lower section of the housing of the pump there is also a further slowly rotating shaft (23) in further ball bearings (24) positioned co-axial to the quick rotating shaft, with one shaft enclosing the other. The rotor of the frequency transformer part of the motor is connected to the slow running shaft.
FR7703978A 1976-02-11 1977-02-11 Turbo molecular high vacuum pump - has fast and slow rotating shafts in separate ball bearings coaxial to each other Granted FR2341054A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU2322616 1976-02-11
SU762323859A SU612100A1 (en) 1976-02-19 1976-02-19 Device for feeding lubricant to bearings

Publications (2)

Publication Number Publication Date
FR2341054A1 true FR2341054A1 (en) 1977-09-09
FR2341054B1 FR2341054B1 (en) 1978-10-20

Family

ID=26665573

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7703978A Granted FR2341054A1 (en) 1976-02-11 1977-02-11 Turbo molecular high vacuum pump - has fast and slow rotating shafts in separate ball bearings coaxial to each other

Country Status (2)

Country Link
DE (1) DE2637497C3 (en)
FR (1) FR2341054A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113068A1 (en) * 1991-04-22 1992-11-05 Leybold Ag Ascertaining or regulating RPM of async. motor - altering frequency of variable voltage or current source until characteristic signal indicates switching between motor and generator modes
DE4237972C2 (en) * 1992-11-11 1997-06-12 Leybold Ag Vacuum pump with rotor
DE4237971B4 (en) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vacuum pump with converter

Also Published As

Publication number Publication date
FR2341054B1 (en) 1978-10-20
DE2637497C3 (en) 1979-11-29
DE2637497B2 (en) 1979-04-12
DE2637497A1 (en) 1977-08-18

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Legal Events

Date Code Title Description
ST Notification of lapse