JPS64393A - Vacuum pump device - Google Patents
Vacuum pump deviceInfo
- Publication number
- JPS64393A JPS64393A JP15120587A JP15120587A JPS64393A JP S64393 A JPS64393 A JP S64393A JP 15120587 A JP15120587 A JP 15120587A JP 15120587 A JP15120587 A JP 15120587A JP S64393 A JPS64393 A JP S64393A
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- turbo
- rotating shaft
- vacuum pump
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
PURPOSE: To reduce the installation space and obtain ultra-high-vacuum with cleanses by connecting the rotating shaft of a rotor of a turbo-molecular pump with the rotating shaft of a rotor of a turbo roughing vacuum pump through a magnetic coupling.
CONSTITUTION: Inside a casing 21 having a suction port 22 on one side thereof and a discharge port 23 on the other side thereof, an axial-flow blade 24, centrifugal blade 25 and vortex blade 26 are provided. The rotating shaft of the rotor 27A of a turbo-molecular pump 30 is connected with the rotating shaft of the rotor 27B of a turbo roughing vacuum pump 31 through a magnetic coupling 35. The rotor 27 is supported with a radial magnetic bearing 32 mounted inside the casing 21 and a thrust magnetic bearing 33. Therefore, it is possible to reduce the installation space and obtain the ultra-high-vacuum with cleanses.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15120587A JPH076519B2 (en) | 1987-06-19 | 1987-06-19 | Vacuum pump device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15120587A JPH076519B2 (en) | 1987-06-19 | 1987-06-19 | Vacuum pump device |
Publications (3)
Publication Number | Publication Date |
---|---|
JPH01393A JPH01393A (en) | 1989-01-05 |
JPS64393A true JPS64393A (en) | 1989-01-05 |
JPH076519B2 JPH076519B2 (en) | 1995-01-30 |
Family
ID=15513535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15120587A Expired - Lifetime JPH076519B2 (en) | 1987-06-19 | 1987-06-19 | Vacuum pump device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH076519B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2406000A (en) * | 2003-08-27 | 2005-03-16 | Freepower Ltd | Magnetic coupling for a turbo generator arrangement |
DE102008061805A1 (en) * | 2008-12-11 | 2010-06-17 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump e.g. turbomolecular pump, has rotor shaft part with set of individual shafts connected with each other by coupling device, where individual shafts are coaxially arranged and support pump elements |
US8746774B2 (en) | 2010-06-28 | 2014-06-10 | Kawasaki Jukogyo Kabushiki Kaisha | Motorcycle position lamp arrangement |
-
1987
- 1987-06-19 JP JP15120587A patent/JPH076519B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2406000A (en) * | 2003-08-27 | 2005-03-16 | Freepower Ltd | Magnetic coupling for a turbo generator arrangement |
GB2406000B (en) * | 2003-08-27 | 2006-12-20 | Freepower Ltd | Working energy recovery system having rotary magnetic coupling |
DE102008061805A1 (en) * | 2008-12-11 | 2010-06-17 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump e.g. turbomolecular pump, has rotor shaft part with set of individual shafts connected with each other by coupling device, where individual shafts are coaxially arranged and support pump elements |
US8746774B2 (en) | 2010-06-28 | 2014-06-10 | Kawasaki Jukogyo Kabushiki Kaisha | Motorcycle position lamp arrangement |
Also Published As
Publication number | Publication date |
---|---|
JPH076519B2 (en) | 1995-01-30 |
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