FR2330030A1 - Nouvel appareil photorepeteur de masques de haute precision - Google Patents
Nouvel appareil photorepeteur de masques de haute precisionInfo
- Publication number
- FR2330030A1 FR2330030A1 FR7533464A FR7533464A FR2330030A1 FR 2330030 A1 FR2330030 A1 FR 2330030A1 FR 7533464 A FR7533464 A FR 7533464A FR 7533464 A FR7533464 A FR 7533464A FR 2330030 A1 FR2330030 A1 FR 2330030A1
- Authority
- FR
- France
- Prior art keywords
- photorepeater
- new high
- precision mask
- mask
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7533464A FR2330030A1 (fr) | 1975-10-31 | 1975-10-31 | Nouvel appareil photorepeteur de masques de haute precision |
US05/735,890 US4084903A (en) | 1975-10-31 | 1976-10-26 | High-precision mask photorepeater |
NL7612028A NL7612028A (nl) | 1975-10-31 | 1976-10-29 | Inrichting voor het fotografisch aanbrengen van een masker. |
DE19762649687 DE2649687A1 (de) | 1975-10-31 | 1976-10-29 | Maskenfotouebertrager |
GB45178/76A GB1556028A (en) | 1975-10-31 | 1976-10-29 | High precision mask photorepeater |
JP13114776A JPS5255472A (en) | 1975-10-31 | 1976-10-30 | Mask photo repeater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7533464A FR2330030A1 (fr) | 1975-10-31 | 1975-10-31 | Nouvel appareil photorepeteur de masques de haute precision |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2330030A1 true FR2330030A1 (fr) | 1977-05-27 |
FR2330030B1 FR2330030B1 (fr) | 1979-05-04 |
Family
ID=9161914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7533464A Granted FR2330030A1 (fr) | 1975-10-31 | 1975-10-31 | Nouvel appareil photorepeteur de masques de haute precision |
Country Status (6)
Country | Link |
---|---|
US (1) | US4084903A (fr) |
JP (1) | JPS5255472A (fr) |
DE (1) | DE2649687A1 (fr) |
FR (1) | FR2330030A1 (fr) |
GB (1) | GB1556028A (fr) |
NL (1) | NL7612028A (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0012911A2 (fr) * | 1978-12-29 | 1980-07-09 | International Business Machines Corporation | Dispositif pour l'alignement précis de pièces planes, par exemple de pastilles semiconductrices |
EP0017921A1 (fr) * | 1979-04-14 | 1980-10-29 | Discovision Associates | Dispositif d'entraînement piézoélectrique, spécialement pour systèmes de mise au point |
DE3110341A1 (de) * | 1980-03-19 | 1982-02-11 | Hitachi, Ltd., Tokyo | Belichtungseinrichtung und -verfahren zum belichten einer belichtungsflaeche eines substrats und kopieren eines vorbestimmten musters auf diese |
EP0097380A2 (fr) * | 1979-04-02 | 1984-01-04 | Eaton-Optimetrix Inc. | Système pour le positionnement d'un dispositif d'utilisation |
US4540278A (en) * | 1979-04-02 | 1985-09-10 | Optimetrix Corporation | Optical focusing system |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2429447A1 (fr) * | 1978-06-23 | 1980-01-18 | Thomson Csf | Systeme optique de projection muni d'un positionneur de plaque |
GB2035610B (en) * | 1978-10-20 | 1983-03-23 | Hitachi Ltd | Wafer projection aligner |
US4344160A (en) * | 1980-05-02 | 1982-08-10 | The Perkin-Elmer Corporation | Automatic wafer focusing and flattening system |
GB2121552B (en) * | 1981-05-15 | 1985-12-18 | Gen Signal Corp | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
US4391494A (en) * | 1981-05-15 | 1983-07-05 | General Signal Corporation | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
US4425037A (en) | 1981-05-15 | 1984-01-10 | General Signal Corporation | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
JPS5830128A (ja) * | 1981-08-17 | 1983-02-22 | Hitachi Ltd | ウエハのチヤツク装置 |
US4431304A (en) * | 1981-11-25 | 1984-02-14 | Mayer Herbert E | Apparatus for the projection copying of mask patterns on a workpiece |
JPS5885338U (ja) * | 1981-12-07 | 1983-06-09 | 株式会社日立製作所 | 自動焦点装置 |
JPS58156937A (ja) * | 1982-03-12 | 1983-09-19 | Hitachi Ltd | 露光装置 |
JPS58179834A (ja) * | 1982-04-14 | 1983-10-21 | Canon Inc | 投影露光装置及び方法 |
US4444492A (en) * | 1982-05-15 | 1984-04-24 | General Signal Corporation | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
US4504144A (en) * | 1982-07-06 | 1985-03-12 | The Perkin-Elmer Corporation | Simple electromechanical tilt and focus device |
JPS5975625A (ja) * | 1982-10-22 | 1984-04-28 | Fujitsu Ltd | 基板支持方法 |
US4441808A (en) * | 1982-11-15 | 1984-04-10 | Tre Semiconductor Equipment Corp. | Focusing device for photo-exposure system |
JPS59154023A (ja) * | 1983-02-22 | 1984-09-03 | Nippon Kogaku Kk <Nikon> | 板状体の姿勢制御装置 |
JPS59155919A (ja) * | 1983-02-25 | 1984-09-05 | Hitachi Ltd | 自動焦点合せ方法およびその装置 |
JPS59169134A (ja) * | 1983-03-16 | 1984-09-25 | Hitachi Ltd | 縮小投影露光装置 |
JPS6018918A (ja) * | 1983-07-13 | 1985-01-31 | Canon Inc | ステージ装置 |
JPS60105232A (ja) * | 1983-11-14 | 1985-06-10 | Canon Inc | 自動焦点合わせ装置 |
US4600282A (en) * | 1983-11-14 | 1986-07-15 | Canon Kabushiki Kaisha | Alignment apparatus |
JP2516194B2 (ja) * | 1984-06-11 | 1996-07-10 | 株式会社日立製作所 | 投影露光方法 |
US4708467A (en) * | 1984-09-21 | 1987-11-24 | Cameronics Technology Corporation, Ltd. | Camera |
DE3447488A1 (de) * | 1984-10-19 | 1986-05-07 | Canon K.K., Tokio/Tokyo | Projektionseinrichtung |
JPH0618168B2 (ja) * | 1985-02-27 | 1994-03-09 | 株式会社日立製作所 | 原画パターンを半導体ウエハ上面に露光する露光方法 |
US4714331A (en) * | 1985-03-25 | 1987-12-22 | Canon Kabushiki Kaisha | Method and apparatus for automatic focusing |
US4624553A (en) * | 1985-05-28 | 1986-11-25 | Harvey Alwood E | Photographic enlarger apparatus with critical focusing platform for photosensitive medium |
JPS61278141A (ja) * | 1985-05-31 | 1986-12-09 | Canon Inc | 投影倍率調整方法 |
US4669868A (en) * | 1986-04-18 | 1987-06-02 | Ovonic Imaging Systems, Inc. | Step and repeat exposure apparatus and method |
JPS63172148A (ja) * | 1987-01-12 | 1988-07-15 | Hitachi Ltd | 基板表面変形装置 |
WO1989006376A1 (fr) * | 1987-12-30 | 1989-07-13 | Hampshire Instruments, Inc. | Sous-ensemble de positionnement pour machine de lithographie |
JPH02228658A (ja) * | 1989-03-01 | 1990-09-11 | Nec Kyushu Ltd | 縮小投影型露光装置 |
US5087927A (en) * | 1990-01-31 | 1992-02-11 | Ateo Corporation | On-axis air gage focus system |
JP3401769B2 (ja) * | 1993-12-28 | 2003-04-28 | 株式会社ニコン | 露光方法、ステージ装置、及び露光装置 |
KR19980019031A (ko) | 1996-08-27 | 1998-06-05 | 고노 시게오 | 스테이지 장치(a stage apparatus) |
JPH10270535A (ja) | 1997-03-25 | 1998-10-09 | Nikon Corp | 移動ステージ装置、及び該ステージ装置を用いた回路デバイス製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2025280A1 (de) * | 1970-05-23 | 1971-12-09 | Licentia Patent Verwaltungs GmbH, 6000 Frankfurt | Halterung fur ein Objektiv |
FR2223865A1 (fr) * | 1973-03-27 | 1974-10-25 | Thomson Csf | |
FR2235416A1 (fr) * | 1973-06-26 | 1975-01-24 | Mo I Elektronnoi | |
DE2413551A1 (de) * | 1974-03-21 | 1975-09-25 | Western Electric Co | Projektionsdruckanordnung |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2030468A5 (fr) * | 1969-01-29 | 1970-11-13 | Thomson Brandt Csf | |
US3704946A (en) * | 1969-02-20 | 1972-12-05 | Opt Omechanisms Inc | Microcircuit art generating means |
US3704657A (en) * | 1971-05-05 | 1972-12-05 | Computervision Corp | Adaptive optical focusing system |
-
1975
- 1975-10-31 FR FR7533464A patent/FR2330030A1/fr active Granted
-
1976
- 1976-10-26 US US05/735,890 patent/US4084903A/en not_active Expired - Lifetime
- 1976-10-29 DE DE19762649687 patent/DE2649687A1/de not_active Withdrawn
- 1976-10-29 NL NL7612028A patent/NL7612028A/xx not_active Application Discontinuation
- 1976-10-29 GB GB45178/76A patent/GB1556028A/en not_active Expired
- 1976-10-30 JP JP13114776A patent/JPS5255472A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2025280A1 (de) * | 1970-05-23 | 1971-12-09 | Licentia Patent Verwaltungs GmbH, 6000 Frankfurt | Halterung fur ein Objektiv |
FR2223865A1 (fr) * | 1973-03-27 | 1974-10-25 | Thomson Csf | |
FR2235416A1 (fr) * | 1973-06-26 | 1975-01-24 | Mo I Elektronnoi | |
DE2413551A1 (de) * | 1974-03-21 | 1975-09-25 | Western Electric Co | Projektionsdruckanordnung |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0012911A2 (fr) * | 1978-12-29 | 1980-07-09 | International Business Machines Corporation | Dispositif pour l'alignement précis de pièces planes, par exemple de pastilles semiconductrices |
EP0012911A3 (en) * | 1978-12-29 | 1980-10-15 | International Business Machines Corporation | Device for the precise alignment of planar workpieces, e.g. semiconductor wafers |
EP0097380A2 (fr) * | 1979-04-02 | 1984-01-04 | Eaton-Optimetrix Inc. | Système pour le positionnement d'un dispositif d'utilisation |
EP0097380A3 (fr) * | 1979-04-02 | 1984-08-29 | Eaton-Optimetrix Inc. | Système pour le positionnement d'un dispositif d'utilisation |
US4540278A (en) * | 1979-04-02 | 1985-09-10 | Optimetrix Corporation | Optical focusing system |
EP0017921A1 (fr) * | 1979-04-14 | 1980-10-29 | Discovision Associates | Dispositif d'entraînement piézoélectrique, spécialement pour systèmes de mise au point |
DE3110341A1 (de) * | 1980-03-19 | 1982-02-11 | Hitachi, Ltd., Tokyo | Belichtungseinrichtung und -verfahren zum belichten einer belichtungsflaeche eines substrats und kopieren eines vorbestimmten musters auf diese |
Also Published As
Publication number | Publication date |
---|---|
FR2330030B1 (fr) | 1979-05-04 |
US4084903A (en) | 1978-04-18 |
GB1556028A (en) | 1979-11-14 |
DE2649687A1 (de) | 1977-05-05 |
NL7612028A (nl) | 1977-05-03 |
JPS5255472A (en) | 1977-05-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |