FR2235416A1 - - Google Patents

Info

Publication number
FR2235416A1
FR2235416A1 FR7421301A FR7421301A FR2235416A1 FR 2235416 A1 FR2235416 A1 FR 2235416A1 FR 7421301 A FR7421301 A FR 7421301A FR 7421301 A FR7421301 A FR 7421301A FR 2235416 A1 FR2235416 A1 FR 2235416A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7421301A
Other versions
FR2235416B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MO I ELEKTRONNOI
Original Assignee
MO I ELEKTRONNOI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MO I ELEKTRONNOI filed Critical MO I ELEKTRONNOI
Publication of FR2235416A1 publication Critical patent/FR2235416A1/fr
Application granted granted Critical
Publication of FR2235416B1 publication Critical patent/FR2235416B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components
    • H05K13/022—Feeding of components with orientation of the elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Control Of Position Or Direction (AREA)
  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)
FR7421301A 1973-06-26 1974-06-19 Expired FR2235416B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU731936988A SU497551A1 (ru) 1973-06-26 1973-06-26 Устройство дл ориентации

Publications (2)

Publication Number Publication Date
FR2235416A1 true FR2235416A1 (fr) 1975-01-24
FR2235416B1 FR2235416B1 (fr) 1976-06-25

Family

ID=20557958

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7421301A Expired FR2235416B1 (fr) 1973-06-26 1974-06-19

Country Status (10)

Country Link
US (1) US3928778A (fr)
AT (1) AT342663B (fr)
CH (1) CH576310A5 (fr)
CS (1) CS166137B1 (fr)
DD (1) DD113650A1 (fr)
FR (1) FR2235416B1 (fr)
GB (1) GB1455748A (fr)
HU (1) HU167639B (fr)
SE (1) SE398785B (fr)
SU (1) SU497551A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2330030A1 (fr) * 1975-10-31 1977-05-27 Thomson Csf Nouvel appareil photorepeteur de masques de haute precision
EP0040580A1 (fr) * 1980-05-19 1981-11-25 Les Fabriques d'Assortiments Réunies Dispositif pour l'alignement d'une pièce et d'un substrat
WO1989010241A1 (fr) * 1988-04-29 1989-11-02 Fraunhofer-Gesellschaft Zur Förderung Der Angewand Micromanipulateur pour deplacer des objets
CN110480535A (zh) * 2019-07-26 2019-11-22 北京工业大学 一种混合驱动非对称微定位机构

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1192646A (fr) * 1980-02-04 1985-08-27 Herzl Laor Dispositif piezoelectrique positionneur de fibres optiques
GB2111297B (en) * 1981-10-28 1985-06-12 British Aerospace Oscillatory drive mechanisms
DE3332949A1 (de) * 1983-09-13 1985-04-04 Finnigan MAT GmbH, 2800 Bremen Vorrichtung zur einstellung von spaltweiten bei spektrometern
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
US4523120A (en) * 1984-06-04 1985-06-11 The United States Of America As Represented By The Secretary Of The Navy Precise bearing support ditherer with piezoelectric drive means
FR2608837B1 (fr) * 1986-12-23 1994-06-10 Univ Metz Appareil de manipulation en translation d'un element, tel qu'un axe
US4814622A (en) * 1987-11-06 1989-03-21 Bell Communications Research, Inc. High speed scanning tunneling microscope
US5338997A (en) * 1988-04-29 1994-08-16 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Micromanipulator for moving objects
US5245464A (en) * 1988-08-12 1993-09-14 Laser Scan Vision Aps Deflecting instrument, controllable reflecting device herefor and use hereof
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
US4973145A (en) * 1988-12-21 1990-11-27 Lockheed Missiles & Space Company, Inc. Flexure mechanism
JP2839543B2 (ja) * 1989-04-12 1998-12-16 株式会社東芝 変位発生装置
US5351412A (en) * 1991-06-11 1994-10-04 International Business Machines Corporation Micro positioning device
US5406405A (en) * 1991-11-27 1995-04-11 Sullivan; Mark T. Rotating kinematic optic mount
US5251056A (en) * 1992-07-31 1993-10-05 Eastman Kodak Company High-speed light beam deflector
US5550669A (en) * 1993-04-19 1996-08-27 Martin Marietta Corporation Flexure design for a fast steering scanning mirror
US6359370B1 (en) * 1995-02-28 2002-03-19 New Jersey Institute Of Technology Piezoelectric multiple degree of freedom actuator
IL113291A0 (en) * 1995-04-06 1995-07-31 Nanomotion Ltd A multi-axis rotation device
US5705878A (en) * 1995-11-29 1998-01-06 Lewis; Aaron Flat scanning stage for scanned probe microscopy
US5747915A (en) * 1996-08-19 1998-05-05 Sandia Corporation Bent shaft motor
US6246052B1 (en) 1999-09-20 2001-06-12 Veeco Instruments, Inc. Flexure assembly for a scanner
US6724130B1 (en) * 1999-10-22 2004-04-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Membrane position control
AU7289801A (en) * 2000-04-11 2001-10-23 Sandia Corp Microelectromechanical apparatus for elevating and tilting a platform
WO2001097296A1 (fr) * 2000-06-16 2001-12-20 Ngk Insulators, Ltd. Dispositif piezoelectrique/electrostrictif et son procede de fabrication
US6798120B1 (en) * 2001-10-31 2004-09-28 The Regents Of The University Of California Apparatus and method for manipulation of an object
GB2385196B (en) * 2002-02-11 2005-08-17 1 Ltd Amplified actuator
GB2423788A (en) * 2005-03-02 2006-09-06 Pbt Piezo ceramic actuator for a lock bolt
US7355325B2 (en) * 2006-06-15 2008-04-08 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
CN102916607B (zh) * 2012-06-25 2015-09-09 南京航空航天大学 基于直线超声电机的三自由度运动平台及其激励方式
US9876444B2 (en) * 2012-07-05 2018-01-23 Noliac A/S Wobble motor with a solid state actuator
DE102017000827A1 (de) 2017-01-27 2018-08-02 Blickfeld GmbH Lichtscanner mit Beschleunigungssensor
CN109546887B (zh) * 2018-12-05 2020-08-14 哈尔滨工业大学 一种对称结构压电驱动二维指向调整机构的转动平台角度调节方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3138749A (en) * 1962-03-05 1964-06-23 George R Stibitz Incremental feed mechanisms
US3835338A (en) * 1973-08-23 1974-09-10 A Martin Electrically controlled ultra-micromanipulator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
UE US "THE REVIEW OF SCIENTIFIC INSTRUMENTS", VOL. 43, NO. 4, AVRIL 1972, "A DUAL NEEDLE PIEZOELECTRIC MICROMANIPULATOR FOR THE SCANNING ELECTRON MICROSCOPE" JAMES B. PAWLEY, PAGES 600A 602 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2330030A1 (fr) * 1975-10-31 1977-05-27 Thomson Csf Nouvel appareil photorepeteur de masques de haute precision
EP0040580A1 (fr) * 1980-05-19 1981-11-25 Les Fabriques d'Assortiments Réunies Dispositif pour l'alignement d'une pièce et d'un substrat
WO1984004442A1 (fr) * 1980-05-19 1984-11-08 Lebet Jean Philippe Dispositif pour l'alignement d'une piece et d'un substrat
WO1989010241A1 (fr) * 1988-04-29 1989-11-02 Fraunhofer-Gesellschaft Zur Förderung Der Angewand Micromanipulateur pour deplacer des objets
CN110480535A (zh) * 2019-07-26 2019-11-22 北京工业大学 一种混合驱动非对称微定位机构

Also Published As

Publication number Publication date
ATA522374A (de) 1977-08-15
FR2235416B1 (fr) 1976-06-25
SU497551A1 (ru) 1975-12-30
US3928778A (en) 1975-12-23
DE2430196B2 (de) 1977-03-03
AT342663B (de) 1978-04-10
CH576310A5 (fr) 1976-06-15
CS166137B1 (fr) 1976-01-29
DE2430196A1 (de) 1975-01-16
GB1455748A (en) 1976-11-17
HU167639B (fr) 1975-11-28
SE398785B (sv) 1978-01-16
DD113650A1 (fr) 1975-06-12
SE7408374L (fr) 1974-12-27

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Legal Events

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ST Notification of lapse