FR2316745A1 - Dispositif a transistors a effet de champ a capacite de recouvrement reduite et procede de fabrication - Google Patents

Dispositif a transistors a effet de champ a capacite de recouvrement reduite et procede de fabrication

Info

Publication number
FR2316745A1
FR2316745A1 FR7615571A FR7615571A FR2316745A1 FR 2316745 A1 FR2316745 A1 FR 2316745A1 FR 7615571 A FR7615571 A FR 7615571A FR 7615571 A FR7615571 A FR 7615571A FR 2316745 A1 FR2316745 A1 FR 2316745A1
Authority
FR
France
Prior art keywords
field
manufacturing process
effect transistor
transistor device
reduced coverage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7615571A
Other languages
English (en)
French (fr)
Other versions
FR2316745B1 (show.php
Inventor
Ronald P Esch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2316745A1 publication Critical patent/FR2316745A1/fr
Application granted granted Critical
Publication of FR2316745B1 publication Critical patent/FR2316745B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D64/011—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
FR7615571A 1975-06-30 1976-05-17 Dispositif a transistors a effet de champ a capacite de recouvrement reduite et procede de fabrication Granted FR2316745A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59199575A 1975-06-30 1975-06-30

Publications (2)

Publication Number Publication Date
FR2316745A1 true FR2316745A1 (fr) 1977-01-28
FR2316745B1 FR2316745B1 (show.php) 1980-09-26

Family

ID=24368826

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7615571A Granted FR2316745A1 (fr) 1975-06-30 1976-05-17 Dispositif a transistors a effet de champ a capacite de recouvrement reduite et procede de fabrication

Country Status (6)

Country Link
JP (1) JPS5228276A (show.php)
CA (1) CA1049157A (show.php)
DE (1) DE2621765A1 (show.php)
FR (1) FR2316745A1 (show.php)
GB (1) GB1521625A (show.php)
IT (1) IT1063563B (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112199A (en) * 1976-03-17 1977-09-20 Kyoei Kikou Kk Automatic fastening tool

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3899372A (en) * 1973-10-31 1975-08-12 Ibm Process for controlling insulating film thickness across a semiconductor wafer

Also Published As

Publication number Publication date
FR2316745B1 (show.php) 1980-09-26
IT1063563B (it) 1985-02-11
DE2621765A1 (de) 1977-01-20
JPS5228276A (en) 1977-03-03
CA1049157A (en) 1979-02-20
GB1521625A (en) 1978-08-16

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Legal Events

Date Code Title Description
ST Notification of lapse