CA1049157A - Fet device with reduced overlap capacitance and method of manufacture - Google Patents

Fet device with reduced overlap capacitance and method of manufacture

Info

Publication number
CA1049157A
CA1049157A CA76254958A CA254958A CA1049157A CA 1049157 A CA1049157 A CA 1049157A CA 76254958 A CA76254958 A CA 76254958A CA 254958 A CA254958 A CA 254958A CA 1049157 A CA1049157 A CA 1049157A
Authority
CA
Canada
Prior art keywords
diffused
insulating layer
substrate
layer
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA76254958A
Other languages
English (en)
French (fr)
Inventor
Ronald P. Esch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1049157A publication Critical patent/CA1049157A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D64/011—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
CA76254958A 1975-06-30 1976-06-16 Fet device with reduced overlap capacitance and method of manufacture Expired CA1049157A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59199575A 1975-06-30 1975-06-30

Publications (1)

Publication Number Publication Date
CA1049157A true CA1049157A (en) 1979-02-20

Family

ID=24368826

Family Applications (1)

Application Number Title Priority Date Filing Date
CA76254958A Expired CA1049157A (en) 1975-06-30 1976-06-16 Fet device with reduced overlap capacitance and method of manufacture

Country Status (6)

Country Link
JP (1) JPS5228276A (show.php)
CA (1) CA1049157A (show.php)
DE (1) DE2621765A1 (show.php)
FR (1) FR2316745A1 (show.php)
GB (1) GB1521625A (show.php)
IT (1) IT1063563B (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112199A (en) * 1976-03-17 1977-09-20 Kyoei Kikou Kk Automatic fastening tool

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3899372A (en) * 1973-10-31 1975-08-12 Ibm Process for controlling insulating film thickness across a semiconductor wafer

Also Published As

Publication number Publication date
FR2316745A1 (fr) 1977-01-28
FR2316745B1 (show.php) 1980-09-26
IT1063563B (it) 1985-02-11
DE2621765A1 (de) 1977-01-20
JPS5228276A (en) 1977-03-03
GB1521625A (en) 1978-08-16

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