IT1063563B - Dispositivo semiconduttore e relativo procedimento di fabbricazione - Google Patents

Dispositivo semiconduttore e relativo procedimento di fabbricazione

Info

Publication number
IT1063563B
IT1063563B IT23940/76A IT2394076A IT1063563B IT 1063563 B IT1063563 B IT 1063563B IT 23940/76 A IT23940/76 A IT 23940/76A IT 2394076 A IT2394076 A IT 2394076A IT 1063563 B IT1063563 B IT 1063563B
Authority
IT
Italy
Prior art keywords
manufacturing procedure
related manufacturing
semiconductive device
semiconductive
procedure
Prior art date
Application number
IT23940/76A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1063563B publication Critical patent/IT1063563B/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D64/011
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
IT23940/76A 1975-06-30 1976-06-04 Dispositivo semiconduttore e relativo procedimento di fabbricazione IT1063563B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59199575A 1975-06-30 1975-06-30

Publications (1)

Publication Number Publication Date
IT1063563B true IT1063563B (it) 1985-02-11

Family

ID=24368826

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23940/76A IT1063563B (it) 1975-06-30 1976-06-04 Dispositivo semiconduttore e relativo procedimento di fabbricazione

Country Status (6)

Country Link
JP (1) JPS5228276A (show.php)
CA (1) CA1049157A (show.php)
DE (1) DE2621765A1 (show.php)
FR (1) FR2316745A1 (show.php)
GB (1) GB1521625A (show.php)
IT (1) IT1063563B (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112199A (en) * 1976-03-17 1977-09-20 Kyoei Kikou Kk Automatic fastening tool

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3899372A (en) * 1973-10-31 1975-08-12 Ibm Process for controlling insulating film thickness across a semiconductor wafer

Also Published As

Publication number Publication date
FR2316745A1 (fr) 1977-01-28
FR2316745B1 (show.php) 1980-09-26
DE2621765A1 (de) 1977-01-20
JPS5228276A (en) 1977-03-03
CA1049157A (en) 1979-02-20
GB1521625A (en) 1978-08-16

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