FI99169B - Menetelmä puolijohdepiirin testauksessa käytettävän apuvälineen valmistamiseksi - Google Patents

Menetelmä puolijohdepiirin testauksessa käytettävän apuvälineen valmistamiseksi

Info

Publication number
FI99169B
FI99169B FI914351A FI914351A FI99169B FI 99169 B FI99169 B FI 99169B FI 914351 A FI914351 A FI 914351A FI 914351 A FI914351 A FI 914351A FI 99169 B FI99169 B FI 99169B
Authority
FI
Finland
Prior art keywords
aid
testing
making
semiconductor circuit
semiconductor
Prior art date
Application number
FI914351A
Other languages
English (en)
Swedish (sv)
Other versions
FI99169C (fi
FI914351A (fi
FI914351A0 (fi
Inventor
Ahti Aintila
Original Assignee
Picopak Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Picopak Oy filed Critical Picopak Oy
Priority to FI914351A priority Critical patent/FI99169C/fi
Publication of FI914351A0 publication Critical patent/FI914351A0/fi
Priority to PCT/FI1992/000240 priority patent/WO1993006496A1/en
Publication of FI914351A publication Critical patent/FI914351A/fi
Application granted granted Critical
Publication of FI99169B publication Critical patent/FI99169B/fi
Publication of FI99169C publication Critical patent/FI99169C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Structure Of Printed Boards (AREA)
  • Measuring Leads Or Probes (AREA)
FI914351A 1991-09-16 1991-09-16 Menetelmä puolijohdepiirin testauksessa käytettävän apuvälineen valmistamiseksi FI99169C (fi)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI914351A FI99169C (fi) 1991-09-16 1991-09-16 Menetelmä puolijohdepiirin testauksessa käytettävän apuvälineen valmistamiseksi
PCT/FI1992/000240 WO1993006496A1 (en) 1991-09-16 1992-09-10 Method for producing an accessory for use in the testing of semiconductor devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI914351A FI99169C (fi) 1991-09-16 1991-09-16 Menetelmä puolijohdepiirin testauksessa käytettävän apuvälineen valmistamiseksi
FI914351 1991-09-16

Publications (4)

Publication Number Publication Date
FI914351A0 FI914351A0 (fi) 1991-09-16
FI914351A FI914351A (fi) 1993-03-17
FI99169B true FI99169B (fi) 1997-06-30
FI99169C FI99169C (fi) 1997-10-10

Family

ID=8533136

Family Applications (1)

Application Number Title Priority Date Filing Date
FI914351A FI99169C (fi) 1991-09-16 1991-09-16 Menetelmä puolijohdepiirin testauksessa käytettävän apuvälineen valmistamiseksi

Country Status (2)

Country Link
FI (1) FI99169C (fi)
WO (1) WO1993006496A1 (fi)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3096234B2 (ja) * 1995-10-30 2000-10-10 日東電工株式会社 プローブ構造の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2648981C3 (de) * 1976-10-28 1979-12-06 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Kontrollieren der Kontaktverbindung
US4585991A (en) * 1982-06-03 1986-04-29 Texas Instruments Incorporated Solid state multiprobe testing apparatus
US4677375A (en) * 1985-06-14 1987-06-30 Hanwa Electronic Co., Ltd. Apparatus for testing integrated circuit
JPS62197078U (fi) * 1986-06-05 1987-12-15

Also Published As

Publication number Publication date
FI99169C (fi) 1997-10-10
FI914351A (fi) 1993-03-17
WO1993006496A1 (en) 1993-04-01
FI914351A0 (fi) 1991-09-16

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Legal Events

Date Code Title Description
BB Publication of examined application