FI873945A - Foerfarande foer framstaellning av vaermebestaendiga strukturerade skikt. - Google Patents

Foerfarande foer framstaellning av vaermebestaendiga strukturerade skikt. Download PDF

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Publication number
FI873945A
FI873945A FI873945A FI873945A FI873945A FI 873945 A FI873945 A FI 873945A FI 873945 A FI873945 A FI 873945A FI 873945 A FI873945 A FI 873945A FI 873945 A FI873945 A FI 873945A
Authority
FI
Finland
Prior art keywords
layer
film
layers
produced
vaermebestaigiga
Prior art date
Application number
FI873945A
Other languages
English (en)
Other versions
FI873945A0 (fi
Inventor
Hellmut Ahne
Winfried Plundrich
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of FI873945A0 publication Critical patent/FI873945A0/fi
Publication of FI873945A publication Critical patent/FI873945A/fi

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Laminated Bodies (AREA)
  • Electrotherapy Devices (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Chemical Vapour Deposition (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Ceramic Products (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Glass Compositions (AREA)
  • Insulated Conductors (AREA)
FI873945A 1986-09-11 1987-09-11 Foerfarande foer framstaellning av vaermebestaendiga strukturerade skikt. FI873945A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3630997 1986-09-11

Publications (2)

Publication Number Publication Date
FI873945A0 FI873945A0 (fi) 1987-09-11
FI873945A true FI873945A (fi) 1988-03-12

Family

ID=6309397

Family Applications (1)

Application Number Title Priority Date Filing Date
FI873945A FI873945A (fi) 1986-09-11 1987-09-11 Foerfarande foer framstaellning av vaermebestaendiga strukturerade skikt.

Country Status (8)

Country Link
US (1) US4975347A (fi)
EP (1) EP0259723B1 (fi)
JP (1) JPS6389846A (fi)
KR (1) KR880004351A (fi)
AT (1) ATE88026T1 (fi)
DE (1) DE3785277D1 (fi)
DK (1) DK471887A (fi)
FI (1) FI873945A (fi)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69130691T2 (de) * 1990-08-02 1999-07-22 Ppg Industries, Inc., Pittsburgh, Pa. Lichtempfindliche, elektroabscheidbare Photoresistzusammensetzung
US5268256A (en) * 1990-08-02 1993-12-07 Ppg Industries, Inc. Photoimageable electrodepositable photoresist composition for producing non-tacky films
SG50586A1 (en) * 1991-07-26 2000-05-23 Rolic Ag Liquid crystal display cell
JPH0756336A (ja) * 1993-06-07 1995-03-03 Ajinomoto Co Inc 樹脂組成物
US6048375A (en) * 1998-12-16 2000-04-11 Norton Company Coated abrasive
US6509138B2 (en) 2000-01-12 2003-01-21 Semiconductor Research Corporation Solventless, resistless direct dielectric patterning
US20100299773A1 (en) * 2009-05-20 2010-11-25 Monsanto Technology Llc Methods and compositions for selecting an improved plant
DE102013106736B3 (de) * 2013-06-27 2014-12-04 Von Ardenne Anlagentechnik Gmbh Transportwalze und Transporteinrichtung für eine horizontale Durchlauf-Substratbehandlungsanlage
KR102571058B1 (ko) * 2017-02-20 2023-08-29 삼성전자주식회사 적층 구조물, 그의 제조방법, 및 이를 포함하는 액정 표시 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL87862C (fi) * 1951-08-20
US2997391A (en) * 1957-04-22 1961-08-22 Time Inc Photosensitive polyamide resins containing stilbene units in the molecule
US3644289A (en) * 1969-05-29 1972-02-22 Upjohn Co Light sensitive polyurethanes prepared from hydroxyl containing polymer and an isocyanato-stilbene compound
US3694415A (en) * 1970-07-15 1972-09-26 Kiyoshi Honda Coating resinous composition
US4304923A (en) * 1979-02-27 1981-12-08 Minnesota Mining And Manufacturing Company Photopolymerizable oligomer
US4390615A (en) * 1979-11-05 1983-06-28 Courtney Robert W Coating compositions
US4587204A (en) * 1983-08-29 1986-05-06 General Electric Company Photopatternable dielectric compositions, method for making and use
JPS61132947A (ja) * 1984-11-30 1986-06-20 Hitachi Chem Co Ltd 感光性樹脂組成物

Also Published As

Publication number Publication date
DK471887D0 (da) 1987-09-10
KR880004351A (ko) 1988-06-03
EP0259723A3 (en) 1988-12-07
DK471887A (da) 1988-03-12
EP0259723A2 (de) 1988-03-16
ATE88026T1 (de) 1993-04-15
EP0259723B1 (de) 1993-04-07
JPS6389846A (ja) 1988-04-20
DE3785277D1 (de) 1993-05-13
FI873945A0 (fi) 1987-09-11
US4975347A (en) 1990-12-04

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Owner name: SIEMENS AKTIENGESELLSCHAFT