FI81690C - Foerfarande av en jaemn foerdelningstaethet. - Google Patents

Foerfarande av en jaemn foerdelningstaethet. Download PDF

Info

Publication number
FI81690C
FI81690C FI853637A FI853637A FI81690C FI 81690 C FI81690 C FI 81690C FI 853637 A FI853637 A FI 853637A FI 853637 A FI853637 A FI 853637A FI 81690 C FI81690 C FI 81690C
Authority
FI
Finland
Prior art keywords
pattern
film
master pattern
master
mask pattern
Prior art date
Application number
FI853637A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI853637L (fi
FI853637A0 (fi
FI81690B (fi
Inventor
John P Doherty
David L Dufour
Russell E Gebo
Michael J Sullivan
Original Assignee
Honeywell Inf Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inf Systems filed Critical Honeywell Inf Systems
Publication of FI853637A0 publication Critical patent/FI853637A0/fi
Publication of FI853637L publication Critical patent/FI853637L/fi
Application granted granted Critical
Publication of FI81690B publication Critical patent/FI81690B/fi
Publication of FI81690C publication Critical patent/FI81690C/fi

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0002Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03CPHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/02Sensitometric processes, e.g. determining sensitivity, colour sensitivity, gradation, graininess, density; Making sensitometric wedges
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0286Programmable, customizable or modifiable circuits
    • H05K1/0292Programmable, customizable or modifiable circuits having a modifiable lay-out, i.e. adapted for engineering changes or repair
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0548Masks
    • H05K2203/056Using an artwork, i.e. a photomask for exposing photosensitive layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15Position of the PCB during processing
    • H05K2203/1572Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
FI853637A 1984-09-24 1985-09-23 Foerfarande av en jaemn foerdelningstaethet. FI81690C (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US65433584 1984-09-24
US06/654,335 US4627005A (en) 1984-09-24 1984-09-24 Equal density distribution process

Publications (4)

Publication Number Publication Date
FI853637A0 FI853637A0 (fi) 1985-09-23
FI853637L FI853637L (fi) 1986-03-25
FI81690B FI81690B (fi) 1990-07-31
FI81690C true FI81690C (fi) 1990-11-12

Family

ID=24624440

Family Applications (1)

Application Number Title Priority Date Filing Date
FI853637A FI81690C (fi) 1984-09-24 1985-09-23 Foerfarande av en jaemn foerdelningstaethet.

Country Status (9)

Country Link
US (1) US4627005A (enExample)
EP (1) EP0176088B1 (enExample)
JP (1) JPS61105889A (enExample)
KR (1) KR900005307B1 (enExample)
AU (1) AU586640B2 (enExample)
CA (1) CA1232972A (enExample)
DE (1) DE3583475D1 (enExample)
FI (1) FI81690C (enExample)
YU (1) YU172985A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584337A (en) * 1984-12-18 1986-04-22 Dow Corning Corporation Aqueous emulsions containing hydrophilic silicone-organic copolymers
US7146593B2 (en) * 2003-11-04 2006-12-05 Freescale Semiconductor, Inc. Method of implementing polishing uniformity and modifying layout data
EP3885961A1 (en) * 2020-03-26 2021-09-29 Elsyca N.V. Pcb metal balancing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2414509C3 (de) * 1974-03-26 1979-02-01 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung von Druckoriginalen für Leiterbahnanordnungen
AU2747784A (en) * 1979-05-24 1984-08-16 Eocom Corp. Laser image producing system
US4336320A (en) * 1981-03-12 1982-06-22 Honeywell Inc. Process for dielectric stenciled microcircuits
US4571072A (en) * 1983-09-30 1986-02-18 Honeywell Information Systems Inc. System and method for making changes to printed wiring boards

Also Published As

Publication number Publication date
US4627005A (en) 1986-12-02
CA1232972A (en) 1988-02-16
KR860002940A (ko) 1986-04-30
EP0176088A3 (en) 1987-03-18
FI853637L (fi) 1986-03-25
YU172985A (en) 1989-02-28
AU586640B2 (en) 1989-07-20
KR900005307B1 (ko) 1990-07-27
AU4769585A (en) 1986-04-10
FI853637A0 (fi) 1985-09-23
FI81690B (fi) 1990-07-31
JPH0431572B2 (enExample) 1992-05-26
DE3583475D1 (de) 1991-08-22
JPS61105889A (ja) 1986-05-23
EP0176088B1 (en) 1991-07-17
EP0176088A2 (en) 1986-04-02

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Legal Events

Date Code Title Description
MM Patent lapsed
MM Patent lapsed

Owner name: HONEYWELL INFORMATION SYSTEMS INC.