ES2655733T3 - Procedimiento para el desdoblamiento selectivo de silanos superiores - Google Patents

Procedimiento para el desdoblamiento selectivo de silanos superiores Download PDF

Info

Publication number
ES2655733T3
ES2655733T3 ES11779126.9T ES11779126T ES2655733T3 ES 2655733 T3 ES2655733 T3 ES 2655733T3 ES 11779126 T ES11779126 T ES 11779126T ES 2655733 T3 ES2655733 T3 ES 2655733T3
Authority
ES
Spain
Prior art keywords
equal
oligomeric
silanes
general formula
catalyst
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES11779126.9T
Other languages
English (en)
Spanish (es)
Inventor
Ekkehard MÜH
Hartwig Rauleder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Evonik Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Evonik Degussa GmbH filed Critical Evonik Degussa GmbH
Application granted granted Critical
Publication of ES2655733T3 publication Critical patent/ES2655733T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes
    • C01B33/1071Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02Impregnation, coating or precipitation
    • B01J37/0215Coating
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/04Hydrides of silicon
    • C01B33/043Monosilane
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes
    • C01B33/1071Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes
    • C01B33/10773Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • B01J21/08Silica
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/06Washing
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
ES11779126.9T 2010-11-09 2011-10-24 Procedimiento para el desdoblamiento selectivo de silanos superiores Active ES2655733T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010043648A DE102010043648A1 (de) 2010-11-09 2010-11-09 Verfahren zur selektiven Spaltung höherer Silane
DE102010043648 2010-11-09
PCT/EP2011/068534 WO2012062560A2 (de) 2010-11-09 2011-10-24 Verfahren zur selektiven spaltung höherer silane

Publications (1)

Publication Number Publication Date
ES2655733T3 true ES2655733T3 (es) 2018-02-21

Family

ID=44907831

Family Applications (1)

Application Number Title Priority Date Filing Date
ES11779126.9T Active ES2655733T3 (es) 2010-11-09 2011-10-24 Procedimiento para el desdoblamiento selectivo de silanos superiores

Country Status (9)

Country Link
US (1) US9481580B2 (zh)
EP (1) EP2637968B1 (zh)
JP (1) JP5721848B2 (zh)
KR (1) KR101819262B1 (zh)
CN (1) CN103180246B (zh)
DE (1) DE102010043648A1 (zh)
ES (1) ES2655733T3 (zh)
TW (1) TWI511924B (zh)
WO (1) WO2012062560A2 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011004058A1 (de) 2011-02-14 2012-08-16 Evonik Degussa Gmbh Monochlorsilan, Verfahren und Vorrichtung zu dessen Herstellung
DE102013207441A1 (de) * 2013-04-24 2014-10-30 Evonik Degussa Gmbh Verfahren zur Herstellung von Hexachlordisilan durch Spaltung von höheren Polychlorsilanen wie Octachlortrisilan
WO2015111886A1 (ko) 2014-01-24 2015-07-30 한화케미칼 주식회사 폐가스의 정제방법 및 정제장치
CN105314637B (zh) * 2014-07-30 2019-07-12 江苏中能硅业科技发展有限公司 卤硅聚合物裂解制备卤硅烷的方法及装置
JP6486049B2 (ja) 2014-09-25 2019-03-20 デンカ株式会社 ペンタクロロジシランの製造方法並びに該方法により製造されるペンタクロロジシラン
DE102014018435A1 (de) * 2014-12-10 2016-06-16 Silicon Products Bitterfeld GmbH&CO.KG Verfahren zur Gewinnung von Hexachlordisilan aus in Prozessabgasströmen enthaltenen Gemischen von Chlorsilanen
CN106882809B (zh) * 2017-03-24 2018-05-04 亚洲硅业(青海)有限公司 一种三氯氢硅的制备方法
TWI791547B (zh) * 2017-07-31 2023-02-11 中國大陸商南大光電半導體材料有限公司 製備五氯二矽烷之方法及包含五氯二矽烷之經純化的反應產物
CN109081351B (zh) * 2018-08-31 2021-05-11 四川永祥新能源有限公司 一种冷氢化系统产生的高沸物的处理系统和方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE536407A (zh) * 1954-03-12
JPS5283419A (en) * 1975-12-29 1977-07-12 Shin Etsu Chem Co Ltd Preparation of methylchlorosilanes
US4676967A (en) 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
JPS59195519A (ja) * 1983-04-15 1984-11-06 Mitsui Toatsu Chem Inc ヘキサクロロジシランの製造法
DE3711444A1 (de) 1987-04-04 1988-10-13 Huels Troisdorf Verfahren und vorrichtung zur herstellung von dichlorsilan
JPH0791049B2 (ja) * 1988-01-21 1995-10-04 大阪チタニウム製造株式会社 多結晶シリコンの製造におけるポリマーのトリクロロシラン転化方法
DE3925357C1 (zh) 1989-07-31 1991-04-25 Degussa Ag, 6000 Frankfurt, De
DE4304256A1 (de) * 1993-02-12 1994-08-18 Solvay Deutschland Katalysator zur Disproportionierung von Aryl- oder Alkylhalogendisilanen zu Aryl- oder Alkylhalogenmono- und Aryl- oder Alkylhalogenpolysilanen
US5292909A (en) * 1993-07-14 1994-03-08 Dow Corning Corporation Catalytic conversion of direct process high-boiling component to chlorosilane monomers in the presence of hydrogen chloride and hydrogen
US5292912A (en) * 1993-07-19 1994-03-08 Dow Corning Corporation Catalytic conversion of direct process high-boiling component to chlorosilane monomers in the presence of hydrogen chloride
DE4431995A1 (de) * 1994-09-08 1996-03-14 Wacker Chemie Gmbh Verfahren zur Herstellung von wasserstoffhaltigen Methylchlorsilanen
JP3362630B2 (ja) * 1997-02-28 2003-01-07 信越化学工業株式会社 直接法メチルクロルシラン合成より副生する高沸点成分からのモノシラン類の製造方法
DE10017168A1 (de) 2000-04-07 2001-10-11 Bayer Ag Verfahren und Anlage zur Herstellung von Silan
DE10057521B4 (de) 2000-11-21 2009-04-16 Evonik Degussa Gmbh Verfahren zur Herstellung von Silanen
DE10061680A1 (de) 2000-12-11 2002-06-20 Solarworld Ag Verfahren zur Herstellung von Silan
DE10336545B3 (de) * 2003-08-05 2005-04-14 Ge Bayer Silicones Gmbh & Co. Kg Verfahren zur Herstellung von Chlorsilanen
DE102004045245B4 (de) 2004-09-17 2007-11-15 Degussa Gmbh Vorrichtung und Verfahren zur Herstellung von Silanen
DE102005024041A1 (de) 2005-05-25 2006-11-30 City Solar Ag Verfahren zur Herstellung von Silicium aus Halogensilanen
DE102005046105B3 (de) 2005-09-27 2007-04-26 Degussa Gmbh Verfahren zur Herstellung von Monosilan
DE102006009953A1 (de) 2006-03-03 2007-09-06 Wacker Chemie Ag Verfahren zur Wiederverwertung von hochsiedenden Verbindungen innerhalb eines Chlorsilanverbundes
DE102007007874A1 (de) 2007-02-14 2008-08-21 Evonik Degussa Gmbh Verfahren zur Herstellung höherer Silane
DE102007059170A1 (de) 2007-12-06 2009-06-10 Evonik Degussa Gmbh Katalysator und Verfahren zur Dismutierung von Wasserstoff enthaltenden Halogensilanen
KR101573933B1 (ko) * 2008-02-29 2015-12-02 미쓰비시 마테리알 가부시키가이샤 트리클로로실란의 제조 방법 및 제조 장치
DE102009027730A1 (de) 2009-07-15 2011-01-27 Evonik Degussa Gmbh Verahren und Verwendung von aminofunktionellen Harzen zur Dismutierung von Halogensilanen und zur Entfernung von Fremdmetallen
DE102009027728A1 (de) 2009-07-15 2011-01-20 Evonik Degussa Gmbh Verfahren zur Behandlung von Katalysator-Präkursoren
JP5321314B2 (ja) * 2009-07-23 2013-10-23 三菱マテリアル株式会社 クロロシラン重合物の分解方法および分解装置
DE102009053804B3 (de) 2009-11-18 2011-03-17 Evonik Degussa Gmbh Verfahren zur Herstellung von Hydridosilanen
DE102010043649A1 (de) 2010-11-09 2012-05-10 Evonik Degussa Gmbh Verfahren zur Spaltung höherer Silane
DE102010043646A1 (de) 2010-11-09 2012-05-10 Evonik Degussa Gmbh Verfahren zur Herstellung von Trichlorsilan

Also Published As

Publication number Publication date
EP2637968A2 (de) 2013-09-18
JP2013542168A (ja) 2013-11-21
KR101819262B1 (ko) 2018-01-16
EP2637968B1 (de) 2017-12-06
DE102010043648A1 (de) 2012-05-10
CN103180246B (zh) 2016-08-17
TWI511924B (zh) 2015-12-11
US9481580B2 (en) 2016-11-01
CN103180246A (zh) 2013-06-26
WO2012062560A3 (de) 2012-07-12
JP5721848B2 (ja) 2015-05-20
KR20130105678A (ko) 2013-09-25
WO2012062560A2 (de) 2012-05-18
US20130294995A1 (en) 2013-11-07
TW201235297A (en) 2012-09-01

Similar Documents

Publication Publication Date Title
ES2655733T3 (es) Procedimiento para el desdoblamiento selectivo de silanos superiores
RU2492924C2 (ru) Катализатор и способ дисмутации содержащих водород галогенсиланов
ES2357543T3 (es) Métodos para la preparación de compuestos de silazano y/o polisilazano.
ES2388366T3 (es) Procedimiento para la deposición de un silicio policristalino
JP5855137B2 (ja) モノクロロシラン、その製造方法および装置
RU2006141284A (ru) Способ получения трихлорсилана каталитическим гидрогалогенированием тетрахлорида кремния
ES2523899T3 (es) Procedimiento para el tratamiento de compuestos precursores de catalizadores, poliméricos, funcionalizados con amino
DE102010043649A1 (de) Verfahren zur Spaltung höherer Silane
ES2390128T3 (es) Carbonato de vinileno de alta pureza así como un procedimiento para la purficación de carbonato de vinileno
US6680038B2 (en) Process for the separation of chlorosilanes from gas streams
JP5339948B2 (ja) 高純度多結晶シリコン製造方法
JP2012532821A (ja) モノシランを製造するための方法及びシステム
ES2390230T3 (es) Procedimiento para la purificación de carbonato de vinileno
US9481579B2 (en) Method for preparing a hydrosilane using hetero atom containing activated carbon
RU2007106650A (ru) Способ получения поликристаллического кремния
JP5357607B2 (ja) 二フッ化カルボニルの製造方法
JPS643807B2 (zh)
KR100795693B1 (ko) 모노실란의 정제방법
JPS63151611A (ja) ハロゲン化シラン類の製造方法
CN102093402B (zh) 二甲基氯硅烷的合成方法
JPH0338206B2 (zh)
JPS59164614A (ja) モノシランの製造方法
CN104672269A (zh) 阻燃增塑剂二甲基硅酸二(1,3-二卤异丙)酯化合物的制备方法
JPH0339965B2 (zh)