ES2197000A1 - Metodo de ajuste de una caracteristica en un procedimiento de fabricacion de productos. - Google Patents

Metodo de ajuste de una caracteristica en un procedimiento de fabricacion de productos.

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Publication number
ES2197000A1
ES2197000A1 ES200200702A ES200200702A ES2197000A1 ES 2197000 A1 ES2197000 A1 ES 2197000A1 ES 200200702 A ES200200702 A ES 200200702A ES 200200702 A ES200200702 A ES 200200702A ES 2197000 A1 ES2197000 A1 ES 2197000A1
Authority
ES
Spain
Prior art keywords
characteristic
controlling
data
processing condition
manufacturing products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES200200702A
Other languages
English (en)
Other versions
ES2197000B2 (es
Inventor
Yoshiharu Ito
Yasuhiro Fukuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of ES2197000A1 publication Critical patent/ES2197000A1/es
Application granted granted Critical
Publication of ES2197000B2 publication Critical patent/ES2197000B2/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G16—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS
    • G16Z—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR SPECIFIC APPLICATION FIELDS, NOT OTHERWISE PROVIDED FOR
    • G16Z99/00—Subject matter not provided for in other main groups of this subclass
    • G06F19/00—
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31426—Real time database management for production control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Método de ajuste de una característica en un procedimiento de fabricación de productos. En una base de datos de control del procedimiento, las características intermedias, la condición de procesamiento para controlar una característica y una característica final en un procedimiento de fabricación de productos son almacenados como conjunto de datos para cada lote de productos. En "Procedimiento 1" es preparado un conjunto de datos para cada lote de productos. A continuación en "Procedimiento 2" es realizado un procedimiento por conglomerados sobre cada conjunto de datos obtenidos en "Procedimiento 1". En "Procedimiento 3", usando el conjunto de datos obtenidos en "Procedimiento 2", son introducidas las características intermedias y la condición de procesamiento para controlar una característica y es obtenida la característica final, y una relación causal entre la entrada y la salida es cuantificada mediante una red neural para confeccionar un modelo de aprendizaje. En una etapa de aplicacióndel modelo es seleccionada la condición de procesamiento más apropiada para controlar una característica usando el modelo de aprendizaje y las características intermedias en las etapas anteriores.
ES200200702A 2001-03-27 2002-03-25 Metodo de ajuste de una caracteristica en un procedimiento de fabricacion de productos. Expired - Fee Related ES2197000B2 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001089882A JP4677679B2 (ja) 2001-03-27 2001-03-27 製品の製造プロセスにおける特性調整方法
JP2001-89882 2001-03-27

Publications (2)

Publication Number Publication Date
ES2197000A1 true ES2197000A1 (es) 2003-12-16
ES2197000B2 ES2197000B2 (es) 2004-11-16

Family

ID=18944744

Family Applications (1)

Application Number Title Priority Date Filing Date
ES200200702A Expired - Fee Related ES2197000B2 (es) 2001-03-27 2002-03-25 Metodo de ajuste de una caracteristica en un procedimiento de fabricacion de productos.

Country Status (3)

Country Link
US (1) US6662059B2 (es)
JP (1) JP4677679B2 (es)
ES (1) ES2197000B2 (es)

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JP6748474B2 (ja) * 2016-04-18 2020-09-02 株式会社日立製作所 意思決定支援システムおよび意思決定支援方法
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JP2022122112A (ja) 2021-02-09 2022-08-22 住友重機械イオンテクノロジー株式会社 イオン注入装置およびイオン注入方法
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Also Published As

Publication number Publication date
JP2002287803A (ja) 2002-10-04
US20020143417A1 (en) 2002-10-03
US6662059B2 (en) 2003-12-09
JP4677679B2 (ja) 2011-04-27
ES2197000B2 (es) 2004-11-16

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