ES2163696T3 - Sensor de presion. - Google Patents

Sensor de presion.

Info

Publication number
ES2163696T3
ES2163696T3 ES97116173T ES97116173T ES2163696T3 ES 2163696 T3 ES2163696 T3 ES 2163696T3 ES 97116173 T ES97116173 T ES 97116173T ES 97116173 T ES97116173 T ES 97116173T ES 2163696 T3 ES2163696 T3 ES 2163696T3
Authority
ES
Spain
Prior art keywords
diaphragm
pressure sensor
insulating
extensimeter
opposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97116173T
Other languages
English (en)
Inventor
Keiji Sasaki
Koichi Otani
Yukio Koganei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoki Corp
Original Assignee
Fujikoki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoki Corp filed Critical Fujikoki Corp
Application granted granted Critical
Publication of ES2163696T3 publication Critical patent/ES2163696T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

EL SENSOR DE PRESION DE LA PRESENTE INVENCION EVITA LA APARICION DE GRANDES DEFORMACIONES O ROTURAS DEL DIAFRAGMA EN UN SENSOR DE PRESION TIPO EXTENSIMETRO QUE UTILIZA UN CUERPO AISLANTE CON FORMA DE PLACA DELGADA COMO DIAFRAGMA. UN SENSOR 1 DE PRESION COMPRENDE UN DIAFRAGMA 2 AISLANTE QUE TIENE UN EXTENSIMETRO 5 SOBRE LA SUPERFICIE DEL MISMO, Y UN SUSTRATO 3 QUE TIENE UNA SUPERFICIE 32 INFERIOR SITUADA DE FORMA OPUESTA A DICHA SUPERFICIE DEL DIAFRAGMA MONTADO EN EL EXTENSIMETRO Y QUE SE MANTIENE ALEJADO UNA DISTANCIA PREDETERMINADA DE DICHA SUPERFICIE, EN EL QUE DICHO DIAFRAGMA 2 ESTA FORMADO DE UN MATERIAL COMO POR EJEMPLO UN ELEMENTO CERAMICO DE OXIDO DE ALUMINIO, OXIDO DE CIRCONIO O SIMILAR, SILICIO O CRISTALES DE SILICIO, ESTANDO CONFORMADO DICHO SUSTRATO 3 DEL MISMO MATERIAL QUE EL DIAFRAGMA 2 O ESTANDO FORMADA DICHA SUPERFICIE OPUESTA AL DIAFRAGMA DE UN METAL AISLANTE, ESTANDO FIJADAS EL DIAFRAGMA Y LA SUPERFICIE POR MEDIO DE UN VIDRIO 4 DE BAJO PUNTO DE FUSION.
ES97116173T 1996-09-19 1997-09-17 Sensor de presion. Expired - Lifetime ES2163696T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24771196 1996-09-19
JP9098975A JPH10148591A (ja) 1996-09-19 1997-04-16 圧力検出装置
US08/927,269 US6003380A (en) 1996-09-19 1997-09-11 Strain gage pressure sensor wherein a gap is maintained between the diaphragm and the substrate

Publications (1)

Publication Number Publication Date
ES2163696T3 true ES2163696T3 (es) 2002-02-01

Family

ID=27308809

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97116173T Expired - Lifetime ES2163696T3 (es) 1996-09-19 1997-09-17 Sensor de presion.

Country Status (5)

Country Link
US (1) US6003380A (es)
EP (1) EP0831315B1 (es)
JP (1) JPH10148591A (es)
DE (1) DE69707386T2 (es)
ES (1) ES2163696T3 (es)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19933798C2 (de) * 1999-07-19 2001-06-21 Siemens Ag Vorrichtung und Verfahren zur Abgasnachbehandlung bei einer Brennkraftmaschine
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
JP2004505239A (ja) * 2000-07-26 2004-02-19 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 薄膜構成素子、例えば、薄膜高圧センサの製造方法、及び薄膜構成素子
US6688185B2 (en) 2001-08-20 2004-02-10 Autoliv Asp, Inc. System and method for microstrain measurement
CN1207529C (zh) 2001-10-02 2005-06-22 松下电器产业株式会社 应变传感器及其制造方法
DE10221219B4 (de) * 2002-05-13 2007-06-28 Ifm Electronic Gmbh Drucksensor
JP4518467B2 (ja) * 2002-09-17 2010-08-04 株式会社ハーモニック・ドライブ・システムズ 波動歯車装置のトルク検出装置
US7210362B2 (en) * 2002-11-05 2007-05-01 Tanita Corporation Diaphragm type load detection sensor, load detection unit and electronic scale using same
US7093495B2 (en) * 2003-07-28 2006-08-22 Cts Corporation Pressure sensor
FR2859281B1 (fr) * 2003-09-02 2005-12-23 Auxitrol Sa Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique
JP4404297B2 (ja) * 2003-09-03 2010-01-27 株式会社山武 フローセンサ
US6997059B2 (en) * 2003-10-07 2006-02-14 Cts Corporation Pressure sensor
US7240558B2 (en) * 2003-11-19 2007-07-10 Cts Corporation Pressure sensor
US20050103110A1 (en) * 2003-11-19 2005-05-19 Cts Corporation Integrated pressure and temperature sensor
WO2005058133A2 (en) * 2003-12-11 2005-06-30 Proteus Biomedical, Inc. Implantable pressure sensors
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
WO2006031595A2 (en) * 2004-09-13 2006-03-23 Pall Corporation Pressure sensing devices and fluid assemblies
US7295131B2 (en) * 2005-01-07 2007-11-13 Rosemount Inc. Diagnostic system for detecting rupture or thinning of diaphragms
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
FR2897937B1 (fr) * 2006-02-24 2008-05-23 Commissariat Energie Atomique Capteur de pression a jauges resistives
JP4983176B2 (ja) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 圧力センサの製造方法
JP5034664B2 (ja) * 2007-05-09 2012-09-26 株式会社豊田中央研究所 力検知装置
EP2201346B1 (en) * 2007-09-28 2013-08-21 Meggitt (San Juan Capistrano), Inc. Silicon sensing structure to detect through-plane motion a plane of material with thermal expansion substantially different from that of silicon
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
ITTO20080484A1 (it) 2008-06-19 2009-12-20 Eltek Spa Dispositivo sensore di pressione
ITTO20120293A1 (it) 2012-04-03 2013-10-04 Metallux Sa Procedimento per tarare un elemento di calibrazione, e relativo dispositivo
JP6022881B2 (ja) * 2012-10-04 2016-11-09 公益財団法人電磁材料研究所 歪ゲージ
EP2720019A1 (en) * 2012-10-10 2014-04-16 Auto Industrial Co., Ltd. Pressure transducer using ceramic diaphragm
US8943896B2 (en) * 2012-10-10 2015-02-03 Auto Industrial Co., Ltd. Pressure transducer using ceramic diaphragm
ITTO20121130A1 (it) * 2012-12-21 2014-06-22 Metallux Sa Sensore di pressione
DE102013011157B3 (de) * 2013-07-04 2015-01-08 Mario Cerino Sensorelement mit in vier Segmente unterteilter Sensorschicht und Verfahren zu dessen Herstellung
US9890033B2 (en) * 2015-04-06 2018-02-13 Honeywell International Inc. Silicon-on-sapphire device with minimal thermal strain preload and enhanced stability at high temperature
JP6492257B2 (ja) * 2015-06-11 2019-04-03 ユニパルス株式会社 力変換器及びこれに使用される歪みゲージ
JP2019045205A (ja) * 2017-08-30 2019-03-22 アイシン精機株式会社 荷重検出装置
JP2020053433A (ja) * 2018-09-21 2020-04-02 Koa株式会社 歪センサ抵抗器
EP3671159B1 (de) * 2018-12-21 2022-12-21 Exentis Knowledge GmbH Körper hergestellt durch additives herstellungsverfahren und verfahren zur herstellung des körpers
CN113302465A (zh) * 2019-01-18 2021-08-24 日本电产新宝株式会社 扭矩检测传感器和动力传递装置
JP7352877B2 (ja) * 2019-12-16 2023-09-29 ニデックドライブテクノロジー株式会社 トルク検出センサおよび動力伝達装置
JP7302767B2 (ja) * 2019-06-27 2023-07-04 ニデックドライブテクノロジー株式会社 トルク検出センサおよび動力伝達装置
JP7396588B2 (ja) * 2019-12-16 2023-12-12 ニデックドライブテクノロジー株式会社 歪み検出センサおよび動力伝達装置
CN112484630B (zh) * 2020-12-09 2022-02-01 湖南启泰传感科技有限公司 一种薄膜电阻应变压力传感器及其布局优化方法
CN112484631B (zh) * 2020-12-09 2022-01-11 湖南启泰传感科技有限公司 一种薄膜压力传感器及其布局方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3078431A (en) * 1959-07-08 1963-02-19 Ivanhoe P Denyssen Strain gage and method of manufacture
US4079508A (en) * 1975-08-13 1978-03-21 The Board Of Trustees Of The Leland Stanford Junior University Miniature absolute pressure transducer assembly and method
DE2550669A1 (de) * 1975-11-12 1977-05-26 Daimler Benz Ag Dehnungsmesstreifen
US4311980A (en) * 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
US4399707A (en) * 1981-02-04 1983-08-23 Honeywell, Inc. Stress sensitive semiconductor unit and housing means therefor
US4481497A (en) * 1982-10-27 1984-11-06 Kulite Semiconductor Products, Inc. Transducer structures employing ceramic substrates and diaphragms
JPS6212458A (ja) * 1985-07-09 1987-01-21 Fuji Heavy Ind Ltd 自動車用電動式パワステアリング装置の安全装置
US4766666A (en) * 1985-09-30 1988-08-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure sensor and method of manufacturing the same
US4617607A (en) * 1985-12-10 1986-10-14 Kavlico Corporation High pressure capacitive transducer
US4993267A (en) * 1988-04-08 1991-02-19 General Electric Company Electronic transducer
CN1018844B (zh) * 1990-06-02 1992-10-28 中国科学院兰州化学物理研究所 防锈干膜润滑剂
JPH0461009U (es) * 1990-09-29 1992-05-26
US5224384A (en) * 1991-06-07 1993-07-06 Maclean-Fogg Company Resistive strain gauge pressure sensor
US5209122A (en) * 1991-11-20 1993-05-11 Delco Electronics Corporation Pressurer sensor and method for assembly of same
US5349867A (en) * 1991-12-02 1994-09-27 Kavlico Corporation Sensitive resistive pressure transducer
US5481905A (en) * 1992-11-03 1996-01-09 Philips Electronics North America Corporation Transducer circuit having negative integral feedback
US5349865A (en) * 1993-08-30 1994-09-27 Kavlico Corporation Wide-pressure-range, adaptable, simplified pressure transducer
US5600071A (en) * 1995-09-05 1997-02-04 Motorola, Inc. Vertically integrated sensor structure and method

Also Published As

Publication number Publication date
EP0831315B1 (en) 2001-10-17
EP0831315A3 (en) 1998-12-16
DE69707386T2 (de) 2002-05-23
US6003380A (en) 1999-12-21
EP0831315A2 (en) 1998-03-25
JPH10148591A (ja) 1998-06-02
DE69707386D1 (de) 2001-11-22

Similar Documents

Publication Publication Date Title
ES2163696T3 (es) Sensor de presion.
BR0101078A (pt) Montagem de ligação para montar um elemento defixação a um membro estrutural
MX2018015888A (es) Acristalamiento laminado de iluminacion con un dispositivo capacitivo sensible al tacto y un diodo emisor de luz y la fabricacion.
MY159269A (en) Reflective article
ES2135573T3 (es) Cristal dotado de una capa funcional conductora y/o de baja emisividad.
ATE69493T1 (de) Mikroventil.
ES2041106T3 (es) Sensor de presion y su procedimiento de fabricacion.
ES2092025T3 (es) Membrana impermeabilizante.
GB9401409D0 (en) Absolute pressure sensor
NO20015825L (no) Optisk forskyvnings-sensor
EP0613196A3 (en) Piezoelectric / electrostrictive drive with ceramic substrate, which in addition to pressure chamber windows also has auxiliary windows.
AR248314A1 (es) Sensor capacitativo de presion diferencial con proteccion para excesos de presion
TW200642126A (en) Electroluminescent light source
DE602007007242D1 (de) Korrosionsgeschütztes verbundwerkstoffteil mit siliciumhaltiger keramikmatrix
ES2099836T3 (es) Caja sellada para mando a distancia.
ATE318796T1 (de) Feuerhemmende verglasung
TW200733313A (en) Sealed structure and method of fabricating sealed structure and semiconductor device and method of fabricating semiconductor device
ES2128190T3 (es) Recipiente que comprende una etiqueta decorativa y procedimiento de obtencion de este recipiente.
ES2049367T3 (es) Posa-vasos.
JP2005085656A5 (es)
ES2190154T3 (es) Dispositivo emisor de luz basado en un material organico electroluminiscente, que presenta una interfaz exterior conformada.
AR021768A1 (es) Soporte de principio activo en forma de lamina
BRPI0507502A (pt) espelho bimorfo com duas camadas piezoelétricas separadas por um núcleo central de material semi-rìgido
KR950009246A (ko) 자외선 검출센서
US1008902A (en) Reflector.

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 831315

Country of ref document: ES