AR248314A1 - Sensor capacitativo de presion diferencial con proteccion para excesos de presion - Google Patents
Sensor capacitativo de presion diferencial con proteccion para excesos de presionInfo
- Publication number
- AR248314A1 AR248314A1 AR90315866A AR31586690A AR248314A1 AR 248314 A1 AR248314 A1 AR 248314A1 AR 90315866 A AR90315866 A AR 90315866A AR 31586690 A AR31586690 A AR 31586690A AR 248314 A1 AR248314 A1 AR 248314A1
- Authority
- AR
- Argentina
- Prior art keywords
- pressure
- diaphragm
- base
- silicon
- wall
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
UN SENSOR CAPACITATIVO DE PRESION DIFERENCIAL DEL TIPO DE SILICIO SOBRE SILICIO Y CON PROTECCION PARA EXCESOS DE PRESION.COMPRENDE UNA 1ERA.BASE DE SILICIO CONDUCTOR ATRAVESADA POR UNA BOCA DE PRESION COMUNICADA CON UN AREA EXTERIOR EN LA QUE SE DEBEN REVELAR VARIACIONES DE PRESION;UN 1ER.DIAFRAGMA DE SILICIO CONDUCTOR, FLEXIBLE, ELASTICO Y QUE TIENE UN LADO EXTERIOR EXPUESTO A DICHA BOCA DE PRESION DE DICHA 1ERA.BASE, SIENDO DICHO DIAFRAGMA CAPAZ DE EFECTUAR MOVIMIENTOS DE FLEXIONAMIENTO CAUSADOS POR CAMBIOS OCURRIDOS EN LA PRESION DE SU LADO EXTERIOR Y UNA 1ERA.PARED ESPACIADORA DE MATERIAL NO CONDUCTOR DISPUESTA ENTRE DICHA BASE Y DICHO DIAFRAGMA PROVEYENDO UNA PARED PERIFERICA DE UNION;UNA 2DA.BASE DE SILICIO CONDUCTOR QUE TIENE UNA BOCA DE PRESION QUE SE COMUNICA CON UN AREA EXTERIOR EN LA QUE SE DEBEN REVELAR VARIACIONES DE PRESION; UN 2DO.DIAFRAGMA DE SILICIO CONDUCTOR, FLEXIBLE, ELASTICO Y QUE TIENE UN LADO EXTERIOR EXPUESTO A LA BOCA DE PRESION DE DICHA 2DA.BASE, SIENDO D ICHO DIAFRAGMA CAPAZ DE EFECTUAR MOVIMIENTOS DE FLEXIONAMIENTO CAUSADOS POR CAMBIOS OCURRIDOS EN LA PRESION DE SU LADO EXTERIOR;Y UNA 2DA.PARED ESPACIADORA, HECHA DE MATERIAL NO CONDUCTOR Y DISPUESTA ENTRA LA 2DA.BASE Y EL 2DO.DIAFRAGMA, PROVEYENDO UNA PARED PERIFERICA DE UNION;Y UNA 3ERA.PARED ESPACIADORA HECHA DE MATERIAL NO CONDUCTOR, DISPUESTA CENTRALMENTE ENTRE LOS DIAFRAGMAS 1ERO.Y 2DO. Y QUE UNE ESTOS ULTIMOS EN RELACION ESPACIADA, PARALELA Y YUXTAPUESTA;LA 3ERA.PARED Y LOS DIAFRAGMAS 1ERO.Y 2DO.FORMAN ENTRE ELLOS UNA CAMARA O CAVIDAD DE REFERENCIA EVACUADA;CADA UNO DE LOS DIAFRAGMAS REFUERZA AL OTRO DIAFRAGMA;EL MOVIMIENTO DE FLEXIONAMIENTO DE CADA UNO DE LOS DIAFRAGMAS DE SILICIO CAUSA UNA VARIACION DE LA CAPACITANCIA DEL SENSOR.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/292,281 US4879627A (en) | 1988-12-30 | 1988-12-30 | Differential capacitive pressure sensor with over-pressure protection |
Publications (1)
Publication Number | Publication Date |
---|---|
AR248314A1 true AR248314A1 (es) | 1995-07-12 |
Family
ID=23124001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AR90315866A AR248314A1 (es) | 1988-12-30 | 1990-01-02 | Sensor capacitativo de presion diferencial con proteccion para excesos de presion |
Country Status (9)
Country | Link |
---|---|
US (1) | US4879627A (es) |
EP (1) | EP0376631B1 (es) |
JP (1) | JPH02264839A (es) |
KR (1) | KR0137940B1 (es) |
AR (1) | AR248314A1 (es) |
BR (1) | BR9000012A (es) |
CA (1) | CA2006162C (es) |
DE (1) | DE68904889T2 (es) |
IL (1) | IL92928A (es) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4124662A1 (de) * | 1991-07-25 | 1993-01-28 | Fibronix Sensoren Gmbh | Relativdrucksensor |
DE4227819C2 (de) * | 1991-08-22 | 1996-10-17 | Yamatake Honeywell Co Ltd | Kapazitiver Drucksensor |
FR2687779B1 (fr) * | 1992-02-20 | 1995-11-10 | Sextant Avionique | Micro-capteur capacitif a protection laterale et procede de fabrication. |
US5333504A (en) * | 1992-09-01 | 1994-08-02 | Rosemount Inc. | High overpressure low range pressure sensor |
US5349491A (en) * | 1992-11-06 | 1994-09-20 | Kavlico Corporation | Pre-stressed pressure transducer and method of forming same |
FR2701562B1 (fr) * | 1993-02-10 | 1995-05-05 | Sextant Avionique | Micro-capteur capacitif à faible capcité parasite et procédé de fabrication. |
CH688745A5 (fr) * | 1993-06-25 | 1998-02-13 | Suisse Electronique Microtech | Capteur de pression différentielle de type capacitif. |
AU658524B1 (en) * | 1993-08-17 | 1995-04-13 | Yokogawa Electric Corporation | Semiconductor type differential pressure measurement apparatus and method for manufacturing the same |
US5440931A (en) * | 1993-10-25 | 1995-08-15 | United Technologies Corporation | Reference element for high accuracy silicon capacitive pressure sensor |
US5444901A (en) * | 1993-10-25 | 1995-08-29 | United Technologies Corporation | Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted |
US5375034A (en) * | 1993-12-02 | 1994-12-20 | United Technologies Corporation | Silicon capacitive pressure sensor having a glass dielectric deposited using ion milling |
US5381299A (en) * | 1994-01-28 | 1995-01-10 | United Technologies Corporation | Capacitive pressure sensor having a substrate with a curved mesa |
US5448444A (en) * | 1994-01-28 | 1995-09-05 | United Technologies Corporation | Capacitive pressure sensor having a reduced area dielectric spacer |
US5438880A (en) * | 1994-05-17 | 1995-08-08 | United Technologies Corporation | Electrostatic linear airspeed transducer |
US5479827A (en) * | 1994-10-07 | 1996-01-02 | Yamatake-Honeywell Co., Ltd. | Capacitive pressure sensor isolating electrodes from external environment |
US5535626A (en) * | 1994-12-21 | 1996-07-16 | Breed Technologies, Inc. | Sensor having direct-mounted sensing element |
US5757608A (en) * | 1996-01-25 | 1998-05-26 | Alliedsignal Inc. | Compensated pressure transducer |
US5818002A (en) * | 1996-03-01 | 1998-10-06 | Cts Corporation | Pressure change warning switch |
WO2001029853A1 (en) | 1999-10-16 | 2001-04-26 | Paralax, Llc | Vacuum variable capacitor |
US6431003B1 (en) | 2000-03-22 | 2002-08-13 | Rosemount Aerospace Inc. | Capacitive differential pressure sensor with coupled diaphragms |
JP2001356062A (ja) * | 2000-06-13 | 2001-12-26 | Yamatake Corp | 容量式圧力センサ |
JP2004233107A (ja) * | 2003-01-28 | 2004-08-19 | Kyocera Corp | 圧力検出装置用パッケージ |
FR2859281B1 (fr) * | 2003-09-02 | 2005-12-23 | Auxitrol Sa | Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique |
JP2005274265A (ja) * | 2004-03-24 | 2005-10-06 | Nippon M K S Kk | 流量計 |
DE102008043171A1 (de) * | 2008-10-24 | 2010-04-29 | Endress + Hauser Gmbh + Co. Kg | Drucksensor, insbesondere Drucksensortechnik |
DE102009000056A1 (de) * | 2009-01-07 | 2010-07-08 | Robert Bosch Gmbh | Sensorelement zur kapazitiven Differenzdruckerfassung |
DE102010022642A1 (de) | 2010-06-04 | 2011-12-08 | Rolls-Royce Deutschland Ltd & Co Kg | Vorrichtung zur Überprüfung des Durchflusses von Öl oder Brennstoff durch eine Filteranordnung |
US8466523B2 (en) * | 2011-10-07 | 2013-06-18 | Continental Automotive Systems, Inc. | Differential pressure sensor device |
DE102012202038A1 (de) | 2012-02-10 | 2013-08-14 | Rolls-Royce Deutschland Ltd & Co Kg | Messvorrichtung mit einem Drucksensor |
US9470593B2 (en) | 2013-09-12 | 2016-10-18 | Honeywell International Inc. | Media isolated pressure sensor |
CN107478359B (zh) * | 2017-07-28 | 2019-07-19 | 佛山市川东磁电股份有限公司 | 一种双膜电容式压力传感器及制作方法 |
JP7328112B2 (ja) * | 2019-10-09 | 2023-08-16 | アズビル株式会社 | センサ素子 |
CN111122020B (zh) * | 2019-12-31 | 2022-10-21 | 中国科学院微电子研究所 | 电容式压力检测装置及传感器 |
CN112834112B (zh) * | 2021-01-04 | 2023-01-06 | 郑州东辰科技有限公司 | 一种力标准器及液压承载装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2725501A (en) * | 1954-07-27 | 1955-11-29 | Gen Motors Corp | Combustion chamber pressure indicator |
US3232114A (en) * | 1962-06-15 | 1966-02-01 | Acton Lab Inc | Pressure transducer |
US3965746A (en) * | 1974-11-04 | 1976-06-29 | Teledyne Industries, Inc. | Pressure transducer |
JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
JPS5937716Y2 (ja) * | 1979-01-31 | 1984-10-19 | 日産自動車株式会社 | 半導体差圧センサ |
US4415948A (en) * | 1981-10-13 | 1983-11-15 | United Technologies Corporation | Electrostatic bonded, silicon capacitive pressure transducer |
US4586109A (en) * | 1985-04-01 | 1986-04-29 | Bourns Instruments, Inc. | Batch-process silicon capacitive pressure sensor |
US4735098A (en) * | 1985-11-19 | 1988-04-05 | Kavlico Corporation | Dual diaphragm differential pressure transducer |
-
1988
- 1988-12-30 US US07/292,281 patent/US4879627A/en not_active Expired - Lifetime
-
1989
- 1989-12-20 CA CA002006162A patent/CA2006162C/en not_active Expired - Fee Related
- 1989-12-21 EP EP89313449A patent/EP0376631B1/en not_active Expired - Lifetime
- 1989-12-21 DE DE8989313449T patent/DE68904889T2/de not_active Expired - Fee Related
- 1989-12-29 IL IL92928A patent/IL92928A/xx unknown
- 1989-12-30 KR KR1019890020309A patent/KR0137940B1/ko not_active IP Right Cessation
-
1990
- 1990-01-02 BR BR909000012A patent/BR9000012A/pt not_active IP Right Cessation
- 1990-01-02 AR AR90315866A patent/AR248314A1/es active
- 1990-01-04 JP JP2000194A patent/JPH02264839A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0376631B1 (en) | 1993-02-10 |
CA2006162A1 (en) | 1990-06-30 |
DE68904889D1 (de) | 1993-03-25 |
JPH02264839A (ja) | 1990-10-29 |
IL92928A (en) | 1992-02-16 |
DE68904889T2 (de) | 1993-08-05 |
KR0137940B1 (ko) | 1998-05-15 |
BR9000012A (pt) | 1990-10-09 |
CA2006162C (en) | 1995-02-07 |
US4879627A (en) | 1989-11-07 |
KR900010373A (ko) | 1990-07-07 |
IL92928A0 (en) | 1990-09-17 |
EP0376631A1 (en) | 1990-07-04 |
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