ES2091990T3 - Cabezal para impresion por emision de liquido, substrato para el mismo y aparato para la impresion por emision de liquido que utiliza dicho cabezal. - Google Patents

Cabezal para impresion por emision de liquido, substrato para el mismo y aparato para la impresion por emision de liquido que utiliza dicho cabezal.

Info

Publication number
ES2091990T3
ES2091990T3 ES92117487T ES92117487T ES2091990T3 ES 2091990 T3 ES2091990 T3 ES 2091990T3 ES 92117487 T ES92117487 T ES 92117487T ES 92117487 T ES92117487 T ES 92117487T ES 2091990 T3 ES2091990 T3 ES 2091990T3
Authority
ES
Spain
Prior art keywords
layer
head
liquid emission
common
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92117487T
Other languages
English (en)
Inventor
Hideo Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of ES2091990T3 publication Critical patent/ES2091990T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Abstract

UN SUSTRATO PARA UNA CABEZA DE GRABACION POR EMISION DE UN LIQUIDO QUE CONSTA DE: UN MIEMBRO DE SOPORTE (15); UNA PLURALIDAD DE ELEMENTOS CONVERTIDORES ELECTROTERMICOS (3) FORMADOS SOBRE DICHO MIEMBRO DE SOPORTE, CON UNA CAPA DE RESISTENCIA A LA GENERACION DE CALOR CADA UNO DE ELLOS, UNA CAPA DE CABLEADO ELECTRODICA COMUN (4) Y UNA CAPA DE CABLEADO ELECTRODICA INDIVIDUAL (5) CONECTADAS LAS DOS A DICHA CAPA RESISTENTE A LA GENERACION DE CALOR Y UNA CAPA PROTECTORA (6A,8A) PARA LAS CAPAS ARRIBA MENCIONADAS; UNA CAPA AISLANTE (6B) FORMADA SOBRE DICHA CAPA DE CABLEADO ELECTRODICA COMUN ; Y UN ELECTRODO COMUN CONECTADO EN COMUN A DICHA PLURALIDAD DE CAPAS DE CABLEADO ELECTRODICAS COMUNES A TRAVES DE DICHA CAPA AISLANTE MEDIANTE UNOS AGUJEROS PASANTES (9) FORMADOS EN DICHA CAPA AISLANTE.
ES92117487T 1988-06-03 1989-06-02 Cabezal para impresion por emision de liquido, substrato para el mismo y aparato para la impresion por emision de liquido que utiliza dicho cabezal. Expired - Lifetime ES2091990T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13686488 1988-06-03

Publications (1)

Publication Number Publication Date
ES2091990T3 true ES2091990T3 (es) 1996-11-16

Family

ID=15185306

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92117487T Expired - Lifetime ES2091990T3 (es) 1988-06-03 1989-06-02 Cabezal para impresion por emision de liquido, substrato para el mismo y aparato para la impresion por emision de liquido que utiliza dicho cabezal.

Country Status (5)

Country Link
US (1) US5157418A (es)
EP (2) EP0534495B1 (es)
JP (1) JP2755994B2 (es)
DE (2) DE68927268T2 (es)
ES (1) ES2091990T3 (es)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2761042B2 (ja) * 1988-07-22 1998-06-04 キヤノン株式会社 記録素子駆動ユニット及びその製造方法，並びにインクジェット記録装置
US5243363A (en) * 1988-07-22 1993-09-07 Canon Kabushiki Kaisha Ink-jet recording head having bump-shaped electrode and protective layer providing structural support
US4999650A (en) * 1989-12-18 1991-03-12 Eastman Kodak Company Bubble jet print head having improved multiplex actuation construction
JP2752486B2 (ja) * 1989-12-29 1998-05-18 キヤノン株式会社 インクジェット記録ヘッドおよびその検査方法ならびにインクジェット記録装置
US5483270A (en) * 1990-02-26 1996-01-09 Canon Kabushiki Kaisha Substrate for ink jet head
US5227812A (en) * 1990-02-26 1993-07-13 Canon Kabushiki Kaisha Liquid jet recording head with bump connector wiring
ATE133111T1 (de) * 1990-02-26 1996-02-15 Canon Kk Aufzeichnungsvorrichtung wobei der aufzeichnungskopf mit einem verdrahtungssubstrat versehen ist
US5045870A (en) * 1990-04-02 1991-09-03 International Business Machines Corporation Thermal ink drop on demand devices on a single chip with vertical integration of driver device
US5059989A (en) * 1990-05-16 1991-10-22 Lexmark International, Inc. Thermal edge jet drop-on-demand ink jet print head
ATE144193T1 (de) * 1990-12-12 1996-11-15 Canon Kk Tintenstrahlaufzeichnung
DE4214554C2 (de) * 1992-04-28 1995-07-06 Eastman Kodak Co Mehrschichtiger elektrothermischer Tintendruckkopf
DE69315919T2 (de) * 1992-09-01 1998-05-28 Canon Kk Farbstrahldruckkopf und zugehöriges Farbstrahlgerät
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JPH0776080A (ja) * 1993-09-08 1995-03-20 Canon Inc 記録ヘッド用基体、記録ヘッド、記録ヘッドカートリッジおよび記録装置と、記録ヘッド用基体の製造方法
JP3268937B2 (ja) * 1994-04-14 2002-03-25 キヤノン株式会社 インクジェット記録ヘッド用基板及びそれを用いたヘッド
US5808640A (en) * 1994-04-19 1998-09-15 Hewlett-Packard Company Special geometry ink jet resistor for high dpi/high frequency structures
KR100189159B1 (ko) * 1996-07-24 1999-06-01 윤종용 잉크젯 프린터의 분사장치 및 분사방법
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
EP0985534A4 (en) * 1997-05-14 2001-03-28 Seiko Epson Corp NOZZLE FORMING METHOD FOR INJECTORS AND MANUFACTURING METHOD OF INK JET HEAD
JP2000043271A (ja) * 1997-11-14 2000-02-15 Canon Inc インクジェット記録ヘッド、その製造方法及び該インクジェット記録ヘッドを具備する記録装置
KR100436760B1 (ko) * 2001-12-20 2004-06-23 삼성전자주식회사 잉크젯 프린터의 헤드 및 그 제조방법
US7171748B2 (en) * 2002-08-30 2007-02-06 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording head
US6786575B2 (en) * 2002-12-17 2004-09-07 Lexmark International, Inc. Ink jet heater chip and method therefor
JP4617145B2 (ja) * 2003-12-16 2011-01-19 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP4137027B2 (ja) 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP5130683B2 (ja) 2006-09-25 2013-01-30 ブラザー工業株式会社 液体移送装置
JP4966049B2 (ja) * 2007-02-23 2012-07-04 エスアイアイ・プリンテック株式会社 ヘッドチップユニット、インクジェットヘッドおよびインクジェットプリンタ
JP5065453B2 (ja) * 2009-07-17 2012-10-31 キヤノン株式会社 液体吐出ヘッド用基板及びその製造方法及び、液体吐出ヘッド用基板を用いた液体吐出ヘッド及びその製造方法
JP5106601B2 (ja) 2010-08-26 2012-12-26 キヤノン株式会社 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法、及び液体吐出ヘッド用基板の検査方法
EP2845696B1 (de) * 2013-09-10 2017-05-17 Siemens Aktiengesellschaft Bearbeitungsmaschine mit redundanten Achsen und Auflösung der Redundanz in Echtzeit

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU531269B2 (en) * 1979-03-06 1983-08-18 Canon Kabushiki Kaisha Ink jet printer
US4499480A (en) * 1981-10-13 1985-02-12 Canon Kabushiki Kaisha Liquid jet recording device
JPS59187870A (ja) * 1983-04-08 1984-10-25 Canon Inc 液体噴射記録装置
EP0124312A3 (en) * 1983-04-29 1985-08-28 Hewlett-Packard Company Resistor structures for thermal ink jet printers
JPS60208248A (ja) * 1984-03-31 1985-10-19 Canon Inc 液体噴射記録ヘツド
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4862197A (en) * 1986-08-28 1989-08-29 Hewlett-Packard Co. Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby
US4947192A (en) * 1988-03-07 1990-08-07 Xerox Corporation Monolithic silicon integrated circuit chip for a thermal ink jet printer
JPH01242262A (ja) * 1988-03-24 1989-09-27 Nec Corp マルチノズルインクジェットヘッド

Also Published As

Publication number Publication date
EP0344809B1 (en) 1994-08-31
EP0344809A1 (en) 1989-12-06
DE68917790D1 (de) 1994-10-06
JPH0278555A (ja) 1990-03-19
DE68927268D1 (de) 1996-10-31
DE68927268T2 (de) 1997-02-20
US5157418A (en) 1992-10-20
EP0534495B1 (en) 1996-09-25
EP0534495A1 (en) 1993-03-31
DE68917790T2 (de) 1995-01-05
JP2755994B2 (ja) 1998-05-25

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