DE68927268D1 - Aufzeichnungskopf mit Flüssigkeitsausstoss, Substrat hierfür und Aufzeichnungsapparat mit Flüssigkeitsausstoss, welcher besagten Kopf verwendet - Google Patents

Aufzeichnungskopf mit Flüssigkeitsausstoss, Substrat hierfür und Aufzeichnungsapparat mit Flüssigkeitsausstoss, welcher besagten Kopf verwendet

Info

Publication number
DE68927268D1
DE68927268D1 DE68927268T DE68927268T DE68927268D1 DE 68927268 D1 DE68927268 D1 DE 68927268D1 DE 68927268 T DE68927268 T DE 68927268T DE 68927268 T DE68927268 T DE 68927268T DE 68927268 D1 DE68927268 D1 DE 68927268D1
Authority
DE
Germany
Prior art keywords
liquid ejection
head
ejection recording
recording apparatus
substrate therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68927268T
Other languages
English (en)
Other versions
DE68927268T2 (de
Inventor
Hideo Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE68927268D1 publication Critical patent/DE68927268D1/de
Application granted granted Critical
Publication of DE68927268T2 publication Critical patent/DE68927268T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE68927268T 1988-06-03 1989-06-02 Aufzeichnungskopf mit Flüssigkeitsausstoss, Substrat hierfür und Aufzeichnungsapparat mit Flüssigkeitsausstoss, welcher besagten Kopf verwendet Expired - Fee Related DE68927268T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13686488 1988-06-03

Publications (2)

Publication Number Publication Date
DE68927268D1 true DE68927268D1 (de) 1996-10-31
DE68927268T2 DE68927268T2 (de) 1997-02-20

Family

ID=15185306

Family Applications (2)

Application Number Title Priority Date Filing Date
DE68917790T Expired - Lifetime DE68917790T2 (de) 1988-06-03 1989-06-02 Aufzeichnungskopf mit Flüssigkeitsemission, Substrat hierfür sowie Aufzeichnungsgerät mit Flüssigkeitsemission unter Verwendung dieses Kopfes.
DE68927268T Expired - Fee Related DE68927268T2 (de) 1988-06-03 1989-06-02 Aufzeichnungskopf mit Flüssigkeitsausstoss, Substrat hierfür und Aufzeichnungsapparat mit Flüssigkeitsausstoss, welcher besagten Kopf verwendet

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE68917790T Expired - Lifetime DE68917790T2 (de) 1988-06-03 1989-06-02 Aufzeichnungskopf mit Flüssigkeitsemission, Substrat hierfür sowie Aufzeichnungsgerät mit Flüssigkeitsemission unter Verwendung dieses Kopfes.

Country Status (5)

Country Link
US (1) US5157418A (de)
EP (2) EP0534495B1 (de)
JP (1) JP2755994B2 (de)
DE (2) DE68917790T2 (de)
ES (1) ES2091990T3 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243363A (en) * 1988-07-22 1993-09-07 Canon Kabushiki Kaisha Ink-jet recording head having bump-shaped electrode and protective layer providing structural support
JP2761042B2 (ja) * 1988-07-22 1998-06-04 キヤノン株式会社 記録素子駆動ユニット及びその製造方法，並びにインクジェット記録装置
US4999650A (en) * 1989-12-18 1991-03-12 Eastman Kodak Company Bubble jet print head having improved multiplex actuation construction
JP2752486B2 (ja) * 1989-12-29 1998-05-18 キヤノン株式会社 インクジェット記録ヘッドおよびその検査方法ならびにインクジェット記録装置
US5227812A (en) * 1990-02-26 1993-07-13 Canon Kabushiki Kaisha Liquid jet recording head with bump connector wiring
DE69116414T2 (de) * 1990-02-26 1996-06-05 Canon Kk Aufzeichnungsvorrichtung wobei der Aufzeichnungskopf mit einem Verdrahtungssubstrat versehen ist
US5483270A (en) * 1990-02-26 1996-01-09 Canon Kabushiki Kaisha Substrate for ink jet head
US5045870A (en) * 1990-04-02 1991-09-03 International Business Machines Corporation Thermal ink drop on demand devices on a single chip with vertical integration of driver device
US5059989A (en) * 1990-05-16 1991-10-22 Lexmark International, Inc. Thermal edge jet drop-on-demand ink jet print head
DE69122726T2 (de) * 1990-12-12 1997-03-13 Canon Kk Tintenstrahlaufzeichnung
DE4214554C2 (de) * 1992-04-28 1995-07-06 Eastman Kodak Co Mehrschichtiger elektrothermischer Tintendruckkopf
DE69315919T2 (de) * 1992-09-01 1998-05-28 Canon Kk Farbstrahldruckkopf und zugehöriges Farbstrahlgerät
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JPH0776080A (ja) * 1993-09-08 1995-03-20 Canon Inc 記録ヘッド用基体、記録ヘッド、記録ヘッドカートリッジおよび記録装置と、記録ヘッド用基体の製造方法
JP3268937B2 (ja) * 1994-04-14 2002-03-25 キヤノン株式会社 インクジェット記録ヘッド用基板及びそれを用いたヘッド
US5808640A (en) * 1994-04-19 1998-09-15 Hewlett-Packard Company Special geometry ink jet resistor for high dpi/high frequency structures
KR100189159B1 (ko) * 1996-07-24 1999-06-01 윤종용 잉크젯 프린터의 분사장치 및 분사방법
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
US6375858B1 (en) * 1997-05-14 2002-04-23 Seiko Epson Corporation Method of forming nozzle for injection device and method of manufacturing inkjet head
JP2000043271A (ja) * 1997-11-14 2000-02-15 Canon Inc インクジェット記録ヘッド、その製造方法及び該インクジェット記録ヘッドを具備する記録装置
KR100436760B1 (ko) * 2001-12-20 2004-06-23 삼성전자주식회사 잉크젯 프린터의 헤드 및 그 제조방법
US7171748B2 (en) * 2002-08-30 2007-02-06 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording head
US6786575B2 (en) * 2002-12-17 2004-09-07 Lexmark International, Inc. Ink jet heater chip and method therefor
JP4617145B2 (ja) * 2003-12-16 2011-01-19 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP4137027B2 (ja) * 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP5130683B2 (ja) 2006-09-25 2013-01-30 ブラザー工業株式会社 液体移送装置
JP4966049B2 (ja) * 2007-02-23 2012-07-04 エスアイアイ・プリンテック株式会社 ヘッドチップユニット、インクジェットヘッドおよびインクジェットプリンタ
JP5065453B2 (ja) * 2009-07-17 2012-10-31 キヤノン株式会社 液体吐出ヘッド用基板及びその製造方法及び、液体吐出ヘッド用基板を用いた液体吐出ヘッド及びその製造方法
JP5106601B2 (ja) * 2010-08-26 2012-12-26 キヤノン株式会社 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法、及び液体吐出ヘッド用基板の検査方法
EP2845696B1 (de) * 2013-09-10 2017-05-17 Siemens Aktiengesellschaft Bearbeitungsmaschine mit redundanten Achsen und Auflösung der Redundanz in Echtzeit

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU531269B2 (en) * 1979-03-06 1983-08-18 Canon Kabushiki Kaisha Ink jet printer
US4499480A (en) * 1981-10-13 1985-02-12 Canon Kabushiki Kaisha Liquid jet recording device
JPS59187870A (ja) * 1983-04-08 1984-10-25 Canon Inc 液体噴射記録装置
EP0124312A3 (de) * 1983-04-29 1985-08-28 Hewlett-Packard Company Widerstandsanordnungen für thermische Tintenstrahldrucker
JPS60208248A (ja) * 1984-03-31 1985-10-19 Canon Inc 液体噴射記録ヘツド
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4862197A (en) * 1986-08-28 1989-08-29 Hewlett-Packard Co. Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby
US4947192A (en) * 1988-03-07 1990-08-07 Xerox Corporation Monolithic silicon integrated circuit chip for a thermal ink jet printer
JPH01242262A (ja) * 1988-03-24 1989-09-27 Nec Corp マルチノズルインクジェットヘッド

Also Published As

Publication number Publication date
ES2091990T3 (es) 1996-11-16
DE68917790T2 (de) 1995-01-05
EP0534495A1 (de) 1993-03-31
US5157418A (en) 1992-10-20
JP2755994B2 (ja) 1998-05-25
JPH0278555A (ja) 1990-03-19
EP0534495B1 (de) 1996-09-25
EP0344809A1 (de) 1989-12-06
DE68917790D1 (de) 1994-10-06
EP0344809B1 (de) 1994-08-31
DE68927268T2 (de) 1997-02-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee