DE69224583T2 - Trägermaterial für Flüssigkeitsaufzeichnungskopf, Herstellungsverfahren dafür, Flüssigkeitsaufzeichnungskopf und Flüssigkeitsaufzeichnungsvorrichtung - Google Patents

Trägermaterial für Flüssigkeitsaufzeichnungskopf, Herstellungsverfahren dafür, Flüssigkeitsaufzeichnungskopf und Flüssigkeitsaufzeichnungsvorrichtung

Info

Publication number
DE69224583T2
DE69224583T2 DE69224583T DE69224583T DE69224583T2 DE 69224583 T2 DE69224583 T2 DE 69224583T2 DE 69224583 T DE69224583 T DE 69224583T DE 69224583 T DE69224583 T DE 69224583T DE 69224583 T2 DE69224583 T2 DE 69224583T2
Authority
DE
Germany
Prior art keywords
liquid recording
recording head
carrier
manufacturing
method therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69224583T
Other languages
English (en)
Other versions
DE69224583D1 (de
Inventor
Makoto Shibata
Haruhiko Terai
Hirokazu Komuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69224583D1 publication Critical patent/DE69224583D1/de
Publication of DE69224583T2 publication Critical patent/DE69224583T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69224583T 1991-10-15 1992-10-15 Trägermaterial für Flüssigkeitsaufzeichnungskopf, Herstellungsverfahren dafür, Flüssigkeitsaufzeichnungskopf und Flüssigkeitsaufzeichnungsvorrichtung Expired - Lifetime DE69224583T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP26601391 1991-10-15
JP28627191 1991-10-31
JP14767892 1992-06-08
JP27735692A JP3231096B2 (ja) 1991-10-15 1992-10-15 液体噴射記録ヘッド用基体、その製造方法および液体噴射記録ヘッドならびに液体噴射記録装置

Publications (2)

Publication Number Publication Date
DE69224583D1 DE69224583D1 (de) 1998-04-09
DE69224583T2 true DE69224583T2 (de) 1998-07-23

Family

ID=27472796

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69224583T Expired - Lifetime DE69224583T2 (de) 1991-10-15 1992-10-15 Trägermaterial für Flüssigkeitsaufzeichnungskopf, Herstellungsverfahren dafür, Flüssigkeitsaufzeichnungskopf und Flüssigkeitsaufzeichnungsvorrichtung

Country Status (4)

Country Link
US (1) US6149986A (de)
EP (1) EP0539804B1 (de)
JP (1) JP3231096B2 (de)
DE (1) DE69224583T2 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3577117B2 (ja) * 1994-10-07 2004-10-13 Ｔｄｋ株式会社 有機エレクトロルミネセンス素子の製法
US20020063753A1 (en) * 1995-06-28 2002-05-30 Masahiko Kubota Liquid ejecting printing head, production method thereof and production method for base body employed for liquid ejecting printing head
DE19536429A1 (de) * 1995-09-29 1997-04-10 Siemens Ag Tintenstrahldruckkopf und Verfahren zum Herstellen eines solchen Tintenstrahldruckkopfes
AUPP653998A0 (en) 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46B)
AUPP654398A0 (en) 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46g)
AUPP654598A0 (en) 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46h)
US6742873B1 (en) 2001-04-16 2004-06-01 Silverbrook Research Pty Ltd Inkjet printhead construction
US7028474B2 (en) 1998-10-16 2006-04-18 Silverbook Research Pty Ltd Micro-electromechanical actuator with control logic circuitry
US20040263551A1 (en) 1998-10-16 2004-12-30 Kia Silverbrook Method and apparatus for firing ink from a plurality of nozzles on a printhead
US6994424B2 (en) 1998-10-16 2006-02-07 Silverbrook Research Pty Ltd Printhead assembly incorporating an array of printhead chips on an ink distribution structure
US7111924B2 (en) 1998-10-16 2006-09-26 Silverbrook Research Pty Ltd Inkjet printhead having thermal bend actuator heating element electrically isolated from nozzle chamber ink
US7384131B2 (en) 1998-10-16 2008-06-10 Silverbrook Research Pty Ltd Pagewidth printhead having small print zone
JP2002527272A (ja) 1998-10-16 2002-08-27 シルバーブルック リサーチ プロプライエタリイ、リミテッド インクジェットプリンタに関する改良
US7419250B2 (en) 1999-10-15 2008-09-02 Silverbrook Research Pty Ltd Micro-electromechanical liquid ejection device
US7216956B2 (en) 1998-10-16 2007-05-15 Silverbrook Research Pty Ltd Printhead assembly with power and ground connections along single edge
US7677686B2 (en) 1998-10-16 2010-03-16 Silverbrook Research Pty Ltd High nozzle density printhead ejecting low drop volumes
US7182431B2 (en) 1999-10-19 2007-02-27 Silverbrook Research Pty Ltd Nozzle arrangement
US6918655B2 (en) 1998-10-16 2005-07-19 Silverbrook Research Pty Ltd Ink jet printhead with nozzles
US7815291B2 (en) 1998-10-16 2010-10-19 Silverbrook Research Pty Ltd Printhead integrated circuit with low drive transistor to nozzle area ratio
US6863378B2 (en) 1998-10-16 2005-03-08 Silverbrook Research Pty Ltd Inkjet printer having enclosed actuators
AUPP702198A0 (en) 1998-11-09 1998-12-03 Silverbrook Research Pty Ltd Image creation method and apparatus (ART79)
US6676250B1 (en) 2000-06-30 2004-01-13 Silverbrook Research Pty Ltd Ink supply assembly for a print engine
JP2002252280A (ja) * 2001-02-26 2002-09-06 Mitsubishi Electric Corp 半導体装置およびその製造方法
US6596653B2 (en) 2001-05-11 2003-07-22 Applied Materials, Inc. Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
US6740601B2 (en) 2001-05-11 2004-05-25 Applied Materials Inc. HDP-CVD deposition process for filling high aspect ratio gaps
US7757574B2 (en) 2002-01-24 2010-07-20 Kla-Tencor Corporation Process condition sensing wafer and data analysis system
US6889568B2 (en) 2002-01-24 2005-05-10 Sensarray Corporation Process condition sensing wafer and data analysis system
US6808748B2 (en) 2003-01-23 2004-10-26 Applied Materials, Inc. Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology
US6958112B2 (en) 2003-05-27 2005-10-25 Applied Materials, Inc. Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation
US20040245210A1 (en) * 2003-06-09 2004-12-09 Peter Kukanskis Method for the manufacture of printed circuit boards with embedded resistors
US6903031B2 (en) 2003-09-03 2005-06-07 Applied Materials, Inc. In-situ-etch-assisted HDP deposition using SiF4 and hydrogen
US7229931B2 (en) 2004-06-16 2007-06-12 Applied Materials, Inc. Oxygen plasma treatment for enhanced HDP-CVD gapfill
US7183227B1 (en) 2004-07-01 2007-02-27 Applied Materials, Inc. Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gas
US7087536B2 (en) 2004-09-01 2006-08-08 Applied Materials Silicon oxide gapfill deposition using liquid precursors
JP4646602B2 (ja) * 2004-11-09 2011-03-09 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
US8604361B2 (en) 2005-12-13 2013-12-10 Kla-Tencor Corporation Component package for maintaining safe operating temperature of components
US7678715B2 (en) 2007-12-21 2010-03-16 Applied Materials, Inc. Low wet etch rate silicon nitride film
JP2009202148A (ja) 2008-01-30 2009-09-10 Hitachi Cable Ltd 触媒担体の製造方法及び触媒担体
US8681493B2 (en) 2011-05-10 2014-03-25 Kla-Tencor Corporation Heat shield module for substrate-like metrology device
TWI522490B (zh) * 2012-05-10 2016-02-21 應用材料股份有限公司 利用微波電漿化學氣相沈積在基板上沈積膜的方法
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
JP2016171141A (ja) * 2015-03-11 2016-09-23 旭化成株式会社 窒化物発光素子および窒化物発光素子の製造方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5936879B2 (ja) * 1977-10-14 1984-09-06 キヤノン株式会社 熱転写記録用媒体
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) * 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) * 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS59123670A (ja) * 1982-12-28 1984-07-17 Canon Inc インクジエツトヘツド
JPS59138461A (ja) * 1983-01-28 1984-08-08 Canon Inc 液体噴射記録装置
JPH0624855B2 (ja) * 1983-04-20 1994-04-06 キヤノン株式会社 液体噴射記録ヘッド
JPS6071260A (ja) * 1983-09-28 1985-04-23 Erumu:Kk 記録装置
JPS60116452A (ja) * 1983-11-30 1985-06-22 Canon Inc インクジェットヘッド
JPS60159062A (ja) * 1984-01-31 1985-08-20 Canon Inc 液体噴射記録ヘツド
JPH064325B2 (ja) * 1984-06-11 1994-01-19 キヤノン株式会社 液体噴射ヘッド
US4768038A (en) * 1985-05-17 1988-08-30 Konishiroku Photo Industry Co., Ltd. Thermal printhead integrated circuit device
US4965594A (en) * 1986-02-28 1990-10-23 Canon Kabushiki Kaisha Liquid jet recording head with laminated heat resistive layers on a support member
JPH0729433B2 (ja) * 1986-03-05 1995-04-05 キヤノン株式会社 液体噴射記録ヘツドの作成方法
JP2815146B2 (ja) * 1987-03-27 1998-10-27 キヤノン株式会社 インクジェット記録ヘッド用基体及びインクジェット記録ヘッド並びに該記録ヘッドを具備するインクジェット記録装置
GB2212974B (en) * 1987-11-25 1992-02-12 Fuji Electric Co Ltd Plasma processing apparatus
EP0570021B1 (de) * 1987-12-02 1997-03-19 Canon Kabushiki Kaisha Trägerschicht für Farbstrahlkopf, Herstellungsverfahren und Farbstrahlgerät versehen mit solch einem Kopf
US5140345A (en) * 1989-03-01 1992-08-18 Canon Kabushiki Kaisha Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method
JP2976442B2 (ja) * 1989-06-22 1999-11-10 ソニー株式会社 絶縁膜の形成方法
JP2870054B2 (ja) * 1989-10-25 1999-03-10 ソニー株式会社 半導体装置の製造方法
JPH0740569B2 (ja) * 1990-02-27 1995-05-01 エイ・ティ・アンド・ティ・コーポレーション Ｅｃｒプラズマ堆積方法
JP3024268B2 (ja) 1991-06-13 2000-03-21 松下電器産業株式会社 電気採暖機

Also Published As

Publication number Publication date
EP0539804B1 (de) 1998-03-04
US6149986A (en) 2000-11-21
EP0539804A2 (de) 1993-05-05
EP0539804A3 (en) 1993-06-16
JP3231096B2 (ja) 2001-11-19
DE69224583D1 (de) 1998-04-09
JPH0655737A (ja) 1994-03-01

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