ES2032906T3 - Procedimiento para la reutilizacion de material base silicio de una celula solar de capa de inversion (mis) con semiconductor de aislador de metal. - Google Patents

Procedimiento para la reutilizacion de material base silicio de una celula solar de capa de inversion (mis) con semiconductor de aislador de metal.

Info

Publication number
ES2032906T3
ES2032906T3 ES198888112008T ES88112008T ES2032906T3 ES 2032906 T3 ES2032906 T3 ES 2032906T3 ES 198888112008 T ES198888112008 T ES 198888112008T ES 88112008 T ES88112008 T ES 88112008T ES 2032906 T3 ES2032906 T3 ES 2032906T3
Authority
ES
Spain
Prior art keywords
mis
procedure
reuse
solar
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198888112008T
Other languages
English (en)
Inventor
Rudolf Prof. Dr. Hezel
Winfried Dr. Dipl.-Phys Hoffman
Berthold Ing.(Fh) Schum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nukem GmbH
Original Assignee
Nukem GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nukem GmbH filed Critical Nukem GmbH
Application granted granted Critical
Publication of ES2032906T3 publication Critical patent/ES2032906T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/062—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the metal-insulator-semiconductor type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/928—Front and rear surface processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/98—Utilizing process equivalents or options

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Processing Of Solid Wastes (AREA)
  • Weting (AREA)
  • Silicon Compounds (AREA)

Abstract

SE PRESENTA UN PROCEDIMIENTO PARA LA APLICACION DE NUEVO DE MATERIAL DE BASE DE SILICIO DE CELULAS SOLARES DEFECTUOSAS DE CAPAS DE INVERSION (MIS). ADEMAS SE DERRIBAN AL MENOS CAPAS ESPECIFICAS DE CELULAS SOLARES - MIS Y SE SUSTITUYEN A TRAVES DE CAPAS NUEVAS CORRESPONDIENTES.
ES198888112008T 1987-07-30 1988-07-26 Procedimiento para la reutilizacion de material base silicio de una celula solar de capa de inversion (mis) con semiconductor de aislador de metal. Expired - Lifetime ES2032906T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873725346 DE3725346A1 (de) 1987-07-30 1987-07-30 Verfahren zur wiederverwendung von silizium-basismaterial einer metall-isolator-halbleiter-(mis)-inversionsschicht-solarzelle

Publications (1)

Publication Number Publication Date
ES2032906T3 true ES2032906T3 (es) 1993-03-01

Family

ID=6332753

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198888112008T Expired - Lifetime ES2032906T3 (es) 1987-07-30 1988-07-26 Procedimiento para la reutilizacion de material base silicio de una celula solar de capa de inversion (mis) con semiconductor de aislador de metal.

Country Status (7)

Country Link
US (1) US4891325A (es)
EP (1) EP0301471B1 (es)
JP (1) JPS6444074A (es)
DE (2) DE3725346A1 (es)
ES (1) ES2032906T3 (es)
IN (1) IN170013B (es)
NO (1) NO174569C (es)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0460287A1 (de) * 1990-05-31 1991-12-11 Siemens Aktiengesellschaft Neuartige Chalkopyrit-Solarzelle
DE69333722T2 (de) * 1993-05-31 2005-12-08 Stmicroelectronics S.R.L., Agrate Brianza Verfahren zur Verbesserung der Haftung zwischen Dielektrikschichten, an ihrer Grenzfläche, in der Herstellung von Halbleiterbauelementen
US5656554A (en) * 1994-07-29 1997-08-12 International Business Machines Corporation Semiconductor chip reclamation technique involving multiple planarization processes
DE19539699C2 (de) * 1995-10-25 1998-03-19 Siemens Solar Gmbh Verfahren zur Verwertung von defekten, laminierten Solarmodulen
US5923946A (en) * 1997-04-17 1999-07-13 Cree Research, Inc. Recovery of surface-ready silicon carbide substrates
US5920764A (en) * 1997-09-30 1999-07-06 International Business Machines Corporation Process for restoring rejected wafers in line for reuse as new
US6037271A (en) * 1998-10-21 2000-03-14 Fsi International, Inc. Low haze wafer treatment process
IL152497A0 (en) * 2000-04-28 2003-05-29 Merck Patent Gmbh Etching pastes for inorganic surfaces
JP4886116B2 (ja) * 2001-02-16 2012-02-29 本田技研工業株式会社 電界効果型の太陽電池
US6774300B2 (en) * 2001-04-27 2004-08-10 Adrena, Inc. Apparatus and method for photovoltaic energy production based on internal charge emission in a solid-state heterostructure
DE10150040A1 (de) 2001-10-10 2003-04-17 Merck Patent Gmbh Kombinierte Ätz- und Dotiermedien
WO2007055484A1 (en) * 2005-11-08 2007-05-18 Lg Chem, Ltd. Solar cell of high efficiency and process for preparation of the same
DE102007030957A1 (de) * 2007-07-04 2009-01-08 Siltronic Ag Verfahren zum Reinigen einer Halbleiterscheibe mit einer Reinigungslösung
US10453986B2 (en) * 2008-01-23 2019-10-22 Solvay Fluor Gmbh Process for the manufacture of solar cells
US7749869B2 (en) * 2008-08-05 2010-07-06 International Business Machines Corporation Crystalline silicon substrates with improved minority carrier lifetime including a method of annealing and removing SiOx precipitates and getterning sites
CN102522458A (zh) * 2011-12-28 2012-06-27 浙江鸿禧光伏科技股份有限公司 一种单晶色斑片返工方法
CN102629644B (zh) * 2012-04-21 2014-11-19 湖南红太阳光电科技有限公司 一种成品晶硅太阳能电池片的返工工艺
US9466755B2 (en) * 2014-10-30 2016-10-11 International Business Machines Corporation MIS-IL silicon solar cell with passivation layer to induce surface inversion
CN106981547A (zh) * 2017-04-29 2017-07-25 无锡赛晶太阳能有限公司 一种处理单晶返工片的方法
CN110444616B (zh) * 2018-05-04 2022-12-09 南京航空航天大学 一种超薄晶硅太阳电池及其制备方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3559281A (en) * 1968-11-27 1971-02-02 Motorola Inc Method of reclaiming processed semiconductior wafers
US4062102A (en) * 1975-12-31 1977-12-13 Silicon Material, Inc. Process for manufacturing a solar cell from a reject semiconductor wafer
US4013485A (en) * 1976-04-29 1977-03-22 International Business Machines Corporation Process for eliminating undesirable charge centers in MIS devices
US4253881A (en) * 1978-10-23 1981-03-03 Rudolf Hezel Solar cells composed of semiconductive materials
US4255208A (en) * 1979-05-25 1981-03-10 Ramot University Authority For Applied Research And Industrial Development Ltd. Method of producing monocrystalline semiconductor films utilizing an intermediate water dissolvable salt layer
JPS5693375A (en) * 1979-12-26 1981-07-28 Shunpei Yamazaki Photoelectric conversion device
US4322571A (en) * 1980-07-17 1982-03-30 The Boeing Company Solar cells and methods for manufacture thereof
DE3135933A1 (de) * 1980-09-26 1982-05-19 Unisearch Ltd., Kensington, New South Wales Solarzelle und verfahren zu ihrer herstellung
DE3110931A1 (de) * 1981-03-20 1982-09-30 Standard Elektrik Lorenz Ag, 7000 Stuttgart Recyclingverfahren fuer mit cu(pfeil abwaerts)2(pfeil abwaerts)s beschichtete cds-schichten
US4640002A (en) * 1982-02-25 1987-02-03 The University Of Delaware Method and apparatus for increasing the durability and yield of thin film photovoltaic devices
US4404421A (en) * 1982-02-26 1983-09-13 Chevron Research Company Ternary III-V multicolor solar cells and process of fabrication
DE3234678A1 (de) * 1982-09-18 1984-04-05 Battelle-Institut E.V., 6000 Frankfurt Solarzelle
DE3420347A1 (de) * 1983-06-01 1984-12-06 Hitachi, Ltd., Tokio/Tokyo Gas und verfahren zum selektiven aetzen von siliciumnitrid
JPS6043871A (ja) * 1983-08-19 1985-03-08 Sanyo Electric Co Ltd 光起電力装置の劣化回復方法
DE3536299A1 (de) * 1985-10-11 1987-04-16 Nukem Gmbh Solarzelle aus silizium
AU580903B2 (en) * 1986-01-29 1989-02-02 Semiconductor Energy Laboratory Co. Ltd. Method for manufacturing photoelectric conversion devices

Also Published As

Publication number Publication date
IN170013B (es) 1992-01-25
EP0301471A2 (de) 1989-02-01
DE3871456D1 (de) 1992-07-02
DE3725346A1 (de) 1989-02-09
US4891325A (en) 1990-01-02
NO883362D0 (no) 1988-07-29
EP0301471A3 (en) 1990-01-31
EP0301471B1 (de) 1992-05-27
NO174569C (no) 1994-05-25
NO883362L (no) 1989-01-31
NO174569B (no) 1994-02-14
JPS6444074A (en) 1989-02-16

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