EP4046748A1 - Machine à usiner double ou simple face - Google Patents

Machine à usiner double ou simple face Download PDF

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Publication number
EP4046748A1
EP4046748A1 EP22150764.3A EP22150764A EP4046748A1 EP 4046748 A1 EP4046748 A1 EP 4046748A1 EP 22150764 A EP22150764 A EP 22150764A EP 4046748 A1 EP4046748 A1 EP 4046748A1
Authority
EP
European Patent Office
Prior art keywords
working
disk
carrier
clamping
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22150764.3A
Other languages
German (de)
English (en)
Inventor
Hans-Peter Boller
Ingo Neuber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lapmaster Wolters GmbH
Original Assignee
Lapmaster Wolters GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lapmaster Wolters GmbH filed Critical Lapmaster Wolters GmbH
Publication of EP4046748A1 publication Critical patent/EP4046748A1/fr
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/015—Temperature control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding

Definitions

  • the invention relates to a double-sided or single-sided processing machine with a preferably ring-shaped first working disk, which is attached to a first carrier disk, and with a counter-bearing element, the first working disk and the counter-bearing element being drivable in rotation relative to one another via at least one drive shaft, with between the a working gap is formed between the first working disk and the counter-bearing element for processing flat workpieces on both sides or on one side, and first clamping means are provided for clamping the first working disk with a clamping surface facing away from the working gap against a clamping surface of the first carrier disk facing the first working disk.
  • double-sided processing machines flat workpieces such as wafers are processed on both sides at the same time.
  • double-sided processing machines have an upper working disk and a lower working disk, between which a working gap is formed, in which the workpieces to be processed are guided during processing.
  • the upper work disk is attached to an upper support disk and the lower work disk is attached to a lower support disk.
  • a relative rotation between the working discs is brought about by at least one of the working discs being driven in rotation together with its carrier disc.
  • Double-sided processing machines are known in which so-called carriers are guided in the working gap.
  • the carrier discs generally hold the workpieces to be machined in a floating manner in circular openings.
  • Suitable kinematics ensure that the carrier disks also rotate in the working gap during the course of the relative rotation of the working disks. As a result, the workpieces move along cycloid paths in the working gap. This achieves a particularly even surface finish.
  • the process heat generated during processing causes a change in the working gap between the working disks.
  • cooling channels are formed in a carrier disk carrying a polishing disk or in the carrier disk and in the polishing disk, through which cooling takes place in order to prevent undesired influences on the geometry of the working gap.
  • relative radial movement is permitted between a base and the support disk, thereby reducing deformation at different temperatures of the base and support disk.
  • a double or single-sided machining center is known with means for local deformation of at least one of the working discs, in particular by introducing a pressure medium, such as water, into a pressure chamber acting on the working disc.
  • a pressure medium such as water
  • cooling channels are formed in a carrier disk of the working disk for cooling.
  • means for generating a global deformation can be provided, such as those in DE 10 2006 037 490 B4 are described.
  • a problem with known systems is that the working disk directly delimiting the working gap heats up more during operation than the carrier disk carrying it. This can lead to tension between the working wheel and the carrier wheel and thus an influence on the working gap that can no longer be reliably controlled.
  • the carrier wheel and the working wheel can also move in opposite directions. During subsequent cooling after operation, the discs do not fully return to their previous position due to a frictional force counteracting the movement, for example due to a screw connection. A force difference of twice the frictional force can remain between the discs even after they have completely cooled down. This in turn can lead to different local geometries.
  • the global geometry of the working wheel can also be changed due to the changed tension between the carrier wheel and the working wheel.
  • a heat-induced change in geometry could be counteracted by using a material with a very low coefficient of thermal expansion, such as special iron-nickel alloys, known for example under the name Invar.
  • a material with a very low coefficient of thermal expansion such as special iron-nickel alloys, known for example under the name Invar.
  • Invar iron-nickel alloys
  • such materials are expensive and difficult to process, in particular to cast or to machine. It would be economically justifiable to use such a material only for the comparatively thin working wheel.
  • Bracing such a working disk with a carrier disk made of a material with a larger coefficient of thermal expansion would form a bimetal, so that geometry changes and correspondingly large clamping forces would occur even with relatively small temperature changes.
  • the object of the invention is to provide a double or single-side processing machine of the type mentioned at the outset that minimizes local or global changes in geometry of the working gap for processing workpieces due to thermal effects.
  • the invention solves the problem in that decoupling means are provided for at least partially decoupling the first working wheel from the first carrier wheel.
  • the processing machine can be, for example, a polishing machine or a lapping machine or a grinding machine.
  • a working gap is formed between the first working disk and a counter-bearing element, for example a simple weight or pressure cylinder in the case of single-sided processing machines or a second working disk in the case of double-sided processing machines, in which workpieces to be processed, for example wafers, are processed on both sides or on one side. It can therefore be a double-sided processing machine or a single-sided processing machine.
  • the underside and top of the workpieces can preferably be processed simultaneously in the working gap.
  • both working discs can have a working surface for working the workpiece surface.
  • the workpieces can be accommodated in a manner known per se in a floating manner in openings in carrier disks arranged in the working gap will.
  • the first working disk and the counter-bearing element are driven to rotate relative to one another, for example via a first and/or a second drive shaft and at least one drive motor.
  • Both the counter-bearing element and the first working disk can be driven in rotation, for example in opposite directions.
  • suitable kinematics can also be used to move carrier discs in rotation through the working gap in the course of this relative rotation, so that workpieces arranged in the carrier discs describe cycloid paths in the working gap.
  • the carrier disks can have a toothing on their outer edge and/or on their inner edge, which engages in an associated toothing, for example of the first working disk.
  • Such machines with so-called planetary kinematics are known per se.
  • the first working disc can be ring-shaped.
  • the counter bearing element or the second working disk can also be ring-shaped.
  • the first working disk and the counter-bearing element, for example the second working disk then have annular working surfaces lying opposite one another, between which the annular working gap is formed.
  • the work surfaces may be covered with a work covering such as polishing cloths.
  • Any carrier disks holding the working disks can also be ring-shaped or at least have ring-shaped support sections to which the working disks are fastened. There can also be more than one carrier disk per working disk.
  • the first working disk and/or the counter-bearing element can have a single-layer or multi-layer design. The same applies to a carrier disk carrying the first working disk or the counter-bearing element.
  • decoupling means are provided for at least partial, for example complete, decoupling, in particular mechanical decoupling, of the first working disk from the first carrier disk.
  • the at least partial decoupling brought about by the decoupling means is such that the first working disk and the first carrier disk can move against one another more easily, i.e. with reduced frictional force, than without the decoupling means.
  • a quasi-free expansion of the working wheel and possibly the carrier wheel is thus possible.
  • the frictional force caused by the first clamping means is reduced between the mutually facing clamping surfaces of the first working disk and the first carrier disk.
  • the decoupling means can act on the first clamping means.
  • a subsequent cooling does not result in a complete return movement into the starting position due to the frictional force caused by the first clamping means.
  • the decoupling means reduce the through the first clamping means caused frictional force in such a way that, for example, in the course of cooling down after heating, a complete return movement to the starting position takes place.
  • Corresponding permanent stresses and the resulting local or global changes in geometry can be minimized in this way.
  • a planar bracing between the carrier disk and the working disk is realized, in particular a bracing essentially over the entire surface or the entire radial extent of the first working disk and/or the first carrier disk. The processing result is therefore not impaired, in contrast to the lack of such tension in the prior art discussed above.
  • the decoupling means can be arranged between the clamping surfaces of the first working disk and the first carrier disk. Accordingly, it is possible that there is no direct contact between the clamping surfaces of the first working disk and the first carrier disk, but only indirect contact via the decoupling means. At the same time, the working disk and carrier disk can be braced against one another over their entire surface, in particular over their entire radial extension, for example by means of clamping screws provided in different radial positions.
  • the decoupling means can also act on the first clamping means themselves.
  • the first working disk with its clamping surface rests directly on the clamping surface of the first carrier disk, but the first clamping means are pretensioned, for example, in such a way that a relative movement between the first working disk and the first carrier disk via the clamping surfaces is possible with reduced frictional force.
  • the clamping surface of the first working disk to bear directly against the clamping surface of the first carrier disk, without an intermediate layer or an intermediate element being provided between the clamping surfaces. If the decoupling means between the clamping surfaces of first work disk and the first carrier disk are arranged, it is possible that, apart from the decoupling means, no intermediate layer or no further intermediate element is arranged between the clamping surfaces.
  • the decoupling means can comprise at least one bearing arranged between the clamping surfaces of the first working disk and the first carrier disk, in particular several such bearings.
  • Bearings arranged between the clamping surfaces allow a relative movement between the first working disk and the first carrier disk with a significantly reduced frictional force, in that a mechanical decoupling is realized.
  • Particularly suitable bearings are roller bearings, for example roller bearings.
  • Such bearings can be arranged, for example, in particular around the clamping means, for example the clamping screws.
  • the decoupling means can comprise elastic pretensioning means for elastic pretensioning of the first tensioning means.
  • elastic prestressing means can be provided as an alternative or in addition to decoupling means, such as bearings, arranged between the clamping surfaces.
  • the elastic pretensioning means elastically pretension the first tensioning means in such a way that they tension the clamping surfaces of the first working disk and the first carrier disk against one another. Against this elastic preload, the frictional force between the clamping surfaces is reduced when the clamping surfaces shift against one another in the course of a thermal change in size.
  • the elastic prestressing means can be provided in addition to decoupling means between the clamping surfaces, for example at least one bearing between the clamping surfaces.
  • the elastic preloading means can preload the at least one bearing, for example the at least one rolling bearing. Under elastic deformation of the elastic biasing means can then increased Freedom of movement between the clamping surfaces of the first working disc and the first carrier disc can be provided.
  • the first clamping means can comprise clamping screws with which the clamping surface of the first carrier disk is clamped against the clamping surface of the first working disk.
  • Such clamping screws can be inserted into corresponding screw receptacles of the first carrier disk and the first working disk from the side facing away from the working gap.
  • the clamping screws can be passed through the first carrier disk and screwed into the first working disk.
  • the screw receptacles can have a corresponding screw thread. The screw head of the clamping screws can bear against the side of the first carrier disk facing away from the first working disk.
  • clamping screws can be provided for clamping, for example in the case of an annular first working disk, a first group of clamping screws is arranged along a radially outer partial circle of the first working disk or the first carrier disk and a second group of clamping screws is arranged along a radially inner partial circle of the first working disk or the first carrier disc.
  • the pitch circles can each be arranged close to the radially outer or radially inner end of the first working disk or the first carrier disk.
  • the elastic prestressing means can comprise elastic spring washers which are each arranged between a screw head of the clamping screws and a surface of the first carrier disk which faces away from the first working disk.
  • the spring washers can be clamped between the screw head and the side facing the carrier disk and can be elastically compressed and thus prestressed. Against this bias, the frictional force between the clamping surfaces of the first working disk and the first carrier disk can be reduced.
  • the decoupling means can comprise a decoupling intermediate layer between the first working disk and the first carrier disk.
  • This can be, for example, a sliding intermediate layer, for example made of a particularly slippery material such as Teflon.
  • it can also be an intermediate layer for thermal decoupling, which accordingly has a low thermal conductivity.
  • the decoupling means can also be thermal decoupling means.
  • the material of the first working disk can have a lower coefficient of thermal expansion than the material of the first carrier disk.
  • the coefficient of thermal expansion of the first working disk can in particular be significantly lower than the coefficient of thermal expansion of the first carrier disk, for example lower by a factor of 5, preferably lower by a factor of 10.
  • the use of materials with very different coefficients of thermal expansion for the first carrier disk and the first working disk leads to a bimetal and the resulting changes in geometry when there is a thermal change in size. Due to the at least partial decoupling according to the invention between the first working disk and the first carrier disk, no significant stresses occur between the first working disk and the first carrier disk, even if the first working disk and the first carrier disk have very different thermal expansion coefficients.
  • the counter-bearing element can be formed by a preferably ring-shaped second working disk, the first and second working disks being arranged coaxially to one another, and the working gap for processing flat workpieces on both sides or on one side being formed between the first and second working disks.
  • the second work disk can be attached to a second carrier disk, with second clamping means being provided for clamping the second work disk with a clamping surface facing away from the working gap against a clamping surface of the second carrier disk facing the second work disk, and with decoupling means also being provided for at least partially decoupling the second Working disc from the second carrier disc.
  • the second clamping means can, for example, be designed like the first clamping means.
  • the second working disk and/or the second carrier disk can be designed like the first working disk or the first carrier disk.
  • the decoupling means for decoupling the second working disk from the second carrier disk can also be designed like the decoupling means for decoupling the first working disk from the first carrier disk.
  • all the exemplary embodiments explained in this context can be transferred to the second working disk and the second carrier disk with the second clamping means and their decoupling means.
  • a preferably annular pressure volume can be formed between the first carrier disk and the first working disk.
  • the pressure volume is connected to a pressure fluid supply, which is such can be controlled that a pressure is built up in the pressure volume, which generates a predetermined local deformation of the first working disk.
  • a pressure fluid can be a liquid, in particular water.
  • the working disc can be brought into a locally concave shape by setting a low pressure in the pressure volume, brought into a locally planar shape by setting a medium pressure and brought into a locally convex shape by setting a high pressure.
  • the locally convex or concave deformation or shape is present in particular in the radial direction between the inner and outer edge of the annular first working disk.
  • Print volume is a variable print volume. The first working disk thus forms a membrane that deforms depending on the volume of the pressure volume caused by the different pressure.
  • the pressure fluid supply includes a pressure fluid reservoir to which at least one pressure line connected to the pressure volume is connected.
  • a pump and a control valve can be arranged in the pressure line, which can be controlled to build up the desired pressure in the pressure volume, for example by a control and/or regulating device.
  • the pressure fluid supply can include a pressure measuring device that measures the pressure in the pressure volume directly or indirectly and whose measurement data can also be present at a control and/or regulating device.
  • the pressure required for the desired working gap geometry can be set in the pressure volume by suitably controlling the pressure fluid supply. For example, it is desirable to extend over the entire radial extent as constant a distance as possible between the working discs.
  • the desired gap geometry can be set in static operation and/or in dynamic operation, ie while a workpiece is being machined.
  • the first working disk can have any desired thickness.
  • the working wheel has a suitable thickness so that it can be deformed with the available pressure depending on its surface area, in particular its ring width or its path radius.
  • the working wheel can be compensated for by the possibility of adjusting the local geometry of the first working wheel in the radial direction, a change in the gap due to the influence of temperature during processing.
  • temperature control channels are provided for temperature control of the first working disk, which are connected to a temperature control fluid supply.
  • the temperature control channels are designed to conduct a temperature control fluid.
  • a temperature control fluid for example a temperature control liquid such as water, is passed through the temperature control channels for temperature control, in particular cooling, of the working wheel.
  • a heat-related deformation of the working disc can be counteracted to a certain extent by the tempering channels.
  • the temperature control channels are arranged within the first working disc, so that the temperature control channels are arranged closer to the working gap than the pressure volume, and that the Tempering channels are not connected to the pressure volume. Due to the arrangement of the temperature control channels within the first working disk, in particular exclusively within the first working disk, the temperature control channels can be arranged closer to the working gap than the pressure volume. In particular, only one inlet and outlet line for the tempering fluid, which are connected to the tempering fluid supply, can run through the carrier disk.
  • the temperature control channels arranged closer to the working gap result in more effective cooling of the first working disk, so that in particular the above-mentioned problems of greater heating of the working disk than of the carrier disk and stronger heating of a side of the working disk delimiting the working gap can be minimized. Corresponding tensions between the first working disk and the first carrier disk or undesired deformations of the first working disk can also be minimized. Rather, the temperature control channels are located as close as possible to the surface of the working disk delimiting the working gap, so that penetration of the process heat through the working disk into the carrier disk can be reduced. In order to further minimize the heat transfer between the first working disc and the first carrier disc, it is possible to provide the first carrier disc and/or the first working disc with webs or other elevations in the area of their contact, so that the contact area between the discs is minimized.
  • the temperature control channels are not connected to the pressure volume in this configuration, also unlike in the prior art, where they are connected to one another and form a common circuit. So separate fluid systems (circuits) are provided for the temperature control channels on the one hand and for the pressure volume on the other hand. As a result, the pressure in the pressure volume can be adjusted more flexibly, independently of the pressure in the temperature control channels. Also used for setting the local geometry usable pressure in the pressure volume, in contrast to the prior art, is not limited by the pressure in the tempering channels.
  • the first working disk is formed from two interconnected, preferably ring-shaped disks between which the temperature control channels are formed, with one of the disks delimiting the working gap and the other of the disks defining the clamping surface for clamping against the clamping surface of the having first carrier disk.
  • the first working disk is thus constructed in two parts, forming the tempering channels similar to a sandwich construction between the two partial disks. This configuration allows the temperature control channels to be formed exclusively within the first working disk in a structurally particularly good manner.
  • the two discs can be screwed together. Of course, other fastening options are also conceivable.
  • the first working disk is fastened to the first carrier disk only in the region of its outer edge and in the region of its inner edge.
  • the working disks can in particular be ring-shaped.
  • the preferably annular pressure volume is then formed between the first working disk and the first carrier disk.
  • the first working disk is fastened to the first carrier disk only in the region of its radially outer and radially inner edge delimiting the working surface, for example screwed along a pitch circle with clamping screws as clamping means.
  • the working disk is not fastened to the carrier disk between these edge regions.
  • the pressure volume can be formed in this area in particular.
  • the working disc has the necessary mobility to build up a suitable pressure in the pressure volume in the desired manner to be deformed.
  • the fastening of the working disk to the carrier disk is selected in such a way that the bearing surface on the inner and outer edge is kept as narrow as possible in order to achieve targeted deformation over the entire surface of the working disk.
  • the double-sided processing machine shown merely as an example has an annular, first, lower carrier disk 100 and a likewise annular, second, upper carrier disk 120 .
  • An annular, first, lower working disc 140 is attached, and an annular, second, upper working disc 160 is attached to the upper support disc 120 .
  • An annular working gap 180 is formed between the annular working discs 140, 160, in which flat workpieces, for example wafers, are machined on both sides during operation.
  • the double-sided processing machine can be, for example, a polishing machine, a lapping machine or a grinding machine.
  • the upper carrier disk 120 and with it the upper working disk 160 and/or the lower carrier disk 100 and with it the lower working disk 140 can be driven in rotation relative to one another by a suitable drive device, comprising, for example, an upper drive shaft and/or a lower drive shaft and at least one drive motor will.
  • the drive device is known per se and is not shown in detail for reasons of clarity.
  • workpieces to be machined can be held floating in carriers in the working gap 180 .
  • Suitable kinematics for example planetary kinematics, can be used to ensure that the carrier disks also rotate through the working gap 180 in the course of the relative rotation of the carrier disks 100, 120 or working disks 140, 160.
  • a control and/or regulating device 200 controls or regulates the operation of the double-sided processing machine.
  • the temperature control channels 220 are connected to a temperature control fluid supply via an inlet 240 and an outlet 260, for example via a drive shaft driving the lower carrier disk 100 and the lower working disk 140.
  • a control and / or regulating device 200 for example, on a predetermined Temperature value of the tempering fluid at the entrance and/or at the exit of the tempering channels or to a predetermined temperature difference between the temperature present at the entrance and the exit of the tempering channels by adjusting the temperature of the tempering fluid accordingly.
  • labyrinth-like temperature control channels 280 are also formed in the upper working disk 160, which are also connected to a temperature control fluid supply via a supply and discharge not shown in detail.
  • This tempering fluid supply is also controlled by the control and/or regulating device 200 .
  • a temperature control fluid for example a cooling liquid such as water
  • heating of the working disks 140, 160 and heat transfer to the carrier disks 100, 120 can be effectively counteracted, so that corresponding changes in geometry are reduced.
  • annular pressure volume 300 in the example shown, which is connected to a pressurized fluid supply via a feed 320, for example also via a drive shaft driving the lower carrier disk 100 and the lower working disk 140.
  • the pressurized fluid supply is also controlled by the control and/or regulating device 200 .
  • the temperature control channels 220 are arranged closer to the working gap 180 than the pressure volume 300.
  • the line systems of the pressure volume 300 and the temperature control channels 220 are not connected to one another, but can be controlled or regulated separately.
  • a first carrier disk and a first working disk are each shown, which are shown in FIG figure 1 shown double-sided processing machine can be used.
  • the temperature control channels 220 and the pressure volume 300 including the relevant inlet and outlet lines are not shown.
  • those in the Figures 2 to 4 Working discs and carrier discs shown can have corresponding tempering channels and pressure volumes including the inlet and outlet lines.
  • a first carrier disk and a first working disk are shown for purposes of illustration.
  • the second carrier disks and second working disks that are also provided can be designed accordingly.
  • FIG 2 shows a first exemplary embodiment of a first, lower carrier disk 10 and a first, lower working disk 14, which are shown, for example, in FIG figure 1 shown double-sided processing machine can be used.
  • a plurality of clamping screws 20 are provided, which are inserted through the first carrier disk 10 from a side facing away from the working gap 18 and screwed into a corresponding threaded bore in the first working disk 14 .
  • the turnbuckles are arranged along two pitch circles across the annular support and work discs 10, 14, namely a radially outer pitch circle and a radially inner pitch circle.
  • the clamping screws 20 each have a screw head 22 .
  • the first carrier disk 10 has a clamping surface 24 facing the first working disk 14 and the first working disk 14 has a clamping surface 26 facing the first carrier disk 10 .
  • the first carrier disk 10 and the first working disk 14 are braced against one another.
  • the clamping surfaces 24, 26 in the clamped state directly against each other and are braced against each other.
  • FIG 3 shows a further embodiment, which largely according to the embodiment figure 2 is equivalent to.
  • the elastic spring washers 30 are in the embodiment figure 3 between the clamping surfaces 24, 26 of the first carrier disk 10 and the first working disk 14 to the clamping screws 20 arranged around rolling bearings 32 are provided.
  • the first carrier disk 10 and the first working disk 14, in particular their clamping surfaces 24, 26, are mechanically decoupled from one another by these roller bearings 32.
  • the frictional force between the first carrier disk 10 and the first working disk 14 caused by the clamping screws 20 is further reduced.
  • figure 4 shows another example that could be used to try to avoid the effects of thermal size changes discussed at the beginning.
  • the example after figure 4 differs from the embodiment according to figure 2 on the one hand, that no decoupling means in the form of the elastic spring washers 30 are provided.
  • relief grooves 34, 36 are formed around the clamping screws 20 in the first carrier disk 10' and the first working disk 14'. Attempts were made to use such relief grooves 34, 36 to counteract the disadvantageous effects of the thermal change in size that were explained at the outset. However, it has been found that this measure does not correspond to the decoupling means Figures 2 and 3 associated success.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Gripping On Spindles (AREA)
  • Turning (AREA)
  • Rolling Contact Bearings (AREA)
  • Machine Tool Units (AREA)
EP22150764.3A 2021-02-17 2022-01-10 Machine à usiner double ou simple face Pending EP4046748A1 (fr)

Applications Claiming Priority (1)

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DE102021103709.3A DE102021103709A1 (de) 2021-02-17 2021-02-17 Doppel- oder Einseiten-Bearbeitungsmaschine

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EP4046748A1 true EP4046748A1 (fr) 2022-08-24

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US (1) US20220258300A1 (fr)
EP (1) EP4046748A1 (fr)
JP (1) JP7429721B2 (fr)
KR (1) KR20220117839A (fr)
CN (1) CN114986391A (fr)
DE (1) DE102021103709A1 (fr)
TW (1) TWI821857B (fr)

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DE102021103709A1 (de) 2022-08-18
JP7429721B2 (ja) 2024-02-08
KR20220117839A (ko) 2022-08-24
TWI821857B (zh) 2023-11-11
TW202233352A (zh) 2022-09-01
CN114986391A (zh) 2022-09-02
US20220258300A1 (en) 2022-08-18
JP2022125969A (ja) 2022-08-29

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