EP4046748A1 - Double or single-side machining machine - Google Patents

Abstract

The invention relates to a double-sided or single-sided processing machine with a preferably ring-shaped first working disk, which is attached to a first carrier disk, and with a counter-bearing element, the first working disk and the counter-bearing element being drivable in rotation relative to one another via at least one drive shaft, with between the between the first working disk and the counter-bearing element, a working gap is formed for processing flat workpieces on both sides or on one side, and first clamping means are provided for clamping the first working disk with a clamping surface facing away from the working gap against a clamping surface of the first carrier disk facing the first working disk, decoupling means being provided for at least partially decoupling the first working disk from the first carrier disk.

Description

The invention relates to a double-sided or single-sided processing machine with a preferably ring-shaped first working disk, which is attached to a first carrier disk, and with a counter-bearing element, the first working disk and the counter-bearing element being drivable in rotation relative to one another via at least one drive shaft, with between the a working gap is formed between the first working disk and the counter-bearing element for processing flat workpieces on both sides or on one side, and first clamping means are provided for clamping the first working disk with a clamping surface facing away from the working gap against a clamping surface of the first carrier disk facing the first working disk.

For example, in double-sided processing machines, flat workpieces such as wafers are processed on both sides at the same time. For this purpose, double-sided processing machines have an upper working disk and a lower working disk, between which a working gap is formed, in which the workpieces to be processed are guided during processing. The upper work disk is attached to an upper support disk and the lower work disk is attached to a lower support disk. For machining, a relative rotation between the working discs is brought about by at least one of the working discs being driven in rotation together with its carrier disc. Double-sided processing machines are known in which so-called carriers are guided in the working gap. The carrier discs generally hold the workpieces to be machined in a floating manner in circular openings. Suitable kinematics ensure that the carrier disks also rotate in the working gap during the course of the relative rotation of the working disks. As a result, the workpieces move along cycloid paths in the working gap. This achieves a particularly even surface finish.

In processing machines of the type in question here, the process heat generated during processing causes a change in the working gap between the working disks. In particular, there is a heat-related deformation of the working disks and thus a deviation of the gap geometry from the specified shape. This adversely affects the processing result. This applies in particular to the very high processing requirements of so-called prime wafers.

Out of DE 100 07 390 B4 a two-disc polishing machine is known, in particular for processing semiconductor wafers. In this case, cooling channels are formed in a carrier disk carrying a polishing disk or in the carrier disk and in the polishing disk, through which cooling takes place in order to prevent undesired influences on the geometry of the working gap. In addition, relative radial movement is permitted between a base and the support disk, thereby reducing deformation at different temperatures of the base and support disk.

Out of DE 10 2004 040 429 B4 it is known to counteract negative effects caused by process heat by means of temperature control of the working discs. In this case, channels are formed in the carrier disks, through which a corresponding tempering fluid, for example cooling water, is conducted.

Out of DE 10 2006 037 490 B4 is also known a device for mechanically deforming the upper carrier disk and with it the upper working disk attached to it. With this device, an initially flat working surface of the upper working disk can be changed into a slightly concave surface. Conversely, an initially slightly convex working surface of the upper working disk can be changed into a flat or concave working surface.

Out of DE 10 2016 102 223 A1 a double or single-sided machining center is known with means for local deformation of at least one of the working discs, in particular by introducing a pressure medium, such as water, into a pressure chamber acting on the working disc. In this way, for example, a local concave or complex deformation of the working wheel can be generated. In addition, cooling channels are formed in a carrier disk of the working disk for cooling. In addition, means for generating a global deformation can be provided, such as those in DE 10 2006 037 490 B4 are described.

A problem with known systems is that the working disk directly delimiting the working gap heats up more during operation than the carrier disk carrying it. This can lead to tension between the working wheel and the carrier wheel and thus an influence on the working gap that can no longer be reliably controlled. Depending on the temperature difference, the carrier wheel and the working wheel can also move in opposite directions. During subsequent cooling after operation, the discs do not fully return to their previous position due to a frictional force counteracting the movement, for example due to a screw connection. A force difference of twice the frictional force can remain between the discs even after they have completely cooled down. This in turn can lead to different local geometries. In addition, the global geometry of the working wheel can also be changed due to the changed tension between the carrier wheel and the working wheel. Significant temperature differences can also occur during operation between a side of the working wheel that delimits the working gap and an opposite side of the working wheel. These can lead to different thermal expansions on both sides, which can lead to a bulging of the working wheel and thus also to a change in the local geometry.

A heat-induced change in geometry could be counteracted by using a material with a very low coefficient of thermal expansion, such as special iron-nickel alloys, known for example under the name Invar. However, such materials are expensive and difficult to process, in particular to cast or to machine. It would be economically justifiable to use such a material only for the comparatively thin working wheel. Bracing such a working disk with a carrier disk made of a material with a larger coefficient of thermal expansion would form a bimetal, so that geometry changes and correspondingly large clamping forces would occur even with relatively small temperature changes. In WO 2020/208968 A1 it is therefore proposed, when using a working disk material with a low coefficient of thermal expansion, not to brace the working disk with the carrier disk, but only to hang it up via a suspension on the carrier disk. This is intended to minimize contact between the working wheel and the carrier wheel. However, the resulting lack of tension between the carrier wheel and the working wheel impairs the machining result.

Proceeding from the explained state of the art, the object of the invention is to provide a double or single-side processing machine of the type mentioned at the outset that minimizes local or global changes in geometry of the working gap for processing workpieces due to thermal effects.

The invention solves this problem by means of a double or single-sided processing machine according to claim 1. Advantageous refinements can be found in the dependent claims, the description and the figures.

For a double or single-sided processing machine of the type mentioned at the outset, the invention solves the problem in that decoupling means are provided for at least partially decoupling the first working wheel from the first carrier wheel.

The processing machine can be, for example, a polishing machine or a lapping machine or a grinding machine. A working gap is formed between the first working disk and a counter-bearing element, for example a simple weight or pressure cylinder in the case of single-sided processing machines or a second working disk in the case of double-sided processing machines, in which workpieces to be processed, for example wafers, are processed on both sides or on one side. It can therefore be a double-sided processing machine or a single-sided processing machine. In the case of a double-sided processing machine, the underside and top of the workpieces can preferably be processed simultaneously in the working gap. Correspondingly, both working discs can have a working surface for working the workpiece surface. On the other hand, in the case of a single-side processing machine, only one side of the workpiece is processed, for example the underside by the lower working wheel. In this case, therefore, only one working disk has a working surface that machines the workpiece surface. The counter-bearing element then only serves to form a corresponding counter-bearing for machining by the working wheel.

For machining, the workpieces can be accommodated in a manner known per se in a floating manner in openings in carrier disks arranged in the working gap will. During operation, the first working disk and the counter-bearing element are driven to rotate relative to one another, for example via a first and/or a second drive shaft and at least one drive motor. Both the counter-bearing element and the first working disk can be driven in rotation, for example in opposite directions. However, it is also possible to drive only one of the counter-bearing element and the first working disk in rotation. For example, in the case of a double-sided processing machine, suitable kinematics can also be used to move carrier discs in rotation through the working gap in the course of this relative rotation, so that workpieces arranged in the carrier discs describe cycloid paths in the working gap. For example, the carrier disks can have a toothing on their outer edge and/or on their inner edge, which engages in an associated toothing, for example of the first working disk. Such machines with so-called planetary kinematics are known per se.

The first working disc can be ring-shaped. The counter bearing element or the second working disk can also be ring-shaped. The first working disk and the counter-bearing element, for example the second working disk, then have annular working surfaces lying opposite one another, between which the annular working gap is formed. The work surfaces may be covered with a work covering such as polishing cloths. Any carrier disks holding the working disks can also be ring-shaped or at least have ring-shaped support sections to which the working disks are fastened. There can also be more than one carrier disk per working disk. The first working disk and/or the counter-bearing element can have a single-layer or multi-layer design. The same applies to a carrier disk carrying the first working disk or the counter-bearing element.

According to the invention, decoupling means are provided for at least partial, for example complete, decoupling, in particular mechanical decoupling, of the first working disk from the first carrier disk. The at least partial decoupling brought about by the decoupling means is such that the first working disk and the first carrier disk can move against one another more easily, i.e. with reduced frictional force, than without the decoupling means. A quasi-free expansion of the working wheel and possibly the carrier wheel is thus possible. In particular, the frictional force caused by the first clamping means is reduced between the mutually facing clamping surfaces of the first working disk and the first carrier disk. For this purpose, the decoupling means can act on the first clamping means.

In the prior art, attempts have been made to counteract thermal expansion by means of additional measures, such as cooling or mechanical deformation, in particular to suppress them as far as possible. The present invention takes a different approach. A thermal change in size is thus permitted in principle, but the decoupling means ensure that this does not have a negative effect on the working gap and thus the machining result. Due to the reduction in the frictional force between the clamping surfaces of the first working disk and carrier disk, a thermal change in size, for example of the working disk during operation, does not lead to the problems explained at the beginning with regard to a change in the geometry of the working gap. As explained, the first working disk and the first carrier disk move relative to one another, for example when the first working disk is heated during operation, along their clamping surfaces, which form corresponding joining surfaces. As also explained, a subsequent cooling does not result in a complete return movement into the starting position due to the frictional force caused by the first clamping means. There is a certain amount of hysteresis. The decoupling means reduce the through the first clamping means caused frictional force in such a way that, for example, in the course of cooling down after heating, a complete return movement to the starting position takes place. Corresponding permanent stresses and the resulting local or global changes in geometry can be minimized in this way. At the same time, a planar bracing between the carrier disk and the working disk is realized, in particular a bracing essentially over the entire surface or the entire radial extent of the first working disk and/or the first carrier disk. The processing result is therefore not impaired, in contrast to the lack of such tension in the prior art discussed above.

The decoupling means can be arranged between the clamping surfaces of the first working disk and the first carrier disk. Accordingly, it is possible that there is no direct contact between the clamping surfaces of the first working disk and the first carrier disk, but only indirect contact via the decoupling means. At the same time, the working disk and carrier disk can be braced against one another over their entire surface, in particular over their entire radial extension, for example by means of clamping screws provided in different radial positions. The decoupling means can also act on the first clamping means themselves. It is then possible that the first working disk with its clamping surface rests directly on the clamping surface of the first carrier disk, but the first clamping means are pretensioned, for example, in such a way that a relative movement between the first working disk and the first carrier disk via the clamping surfaces is possible with reduced frictional force.

In particular, it is possible according to the invention for the clamping surface of the first working disk to bear directly against the clamping surface of the first carrier disk, without an intermediate layer or an intermediate element being provided between the clamping surfaces. If the decoupling means between the clamping surfaces of first work disk and the first carrier disk are arranged, it is possible that, apart from the decoupling means, no intermediate layer or no further intermediate element is arranged between the clamping surfaces.

According to a particularly practical embodiment, the decoupling means can comprise at least one bearing arranged between the clamping surfaces of the first working disk and the first carrier disk, in particular several such bearings. Bearings arranged between the clamping surfaces allow a relative movement between the first working disk and the first carrier disk with a significantly reduced frictional force, in that a mechanical decoupling is realized. Particularly suitable bearings are roller bearings, for example roller bearings. Such bearings can be arranged, for example, in particular around the clamping means, for example the clamping screws.

According to a further embodiment, the decoupling means can comprise elastic pretensioning means for elastic pretensioning of the first tensioning means. Such elastic prestressing means can be provided as an alternative or in addition to decoupling means, such as bearings, arranged between the clamping surfaces. The elastic pretensioning means elastically pretension the first tensioning means in such a way that they tension the clamping surfaces of the first working disk and the first carrier disk against one another. Against this elastic preload, the frictional force between the clamping surfaces is reduced when the clamping surfaces shift against one another in the course of a thermal change in size. As explained, the elastic prestressing means can be provided in addition to decoupling means between the clamping surfaces, for example at least one bearing between the clamping surfaces. In this case, the elastic preloading means can preload the at least one bearing, for example the at least one rolling bearing. Under elastic deformation of the elastic biasing means can then increased Freedom of movement between the clamping surfaces of the first working disc and the first carrier disc can be provided.

According to a further particularly practical embodiment, the first clamping means can comprise clamping screws with which the clamping surface of the first carrier disk is clamped against the clamping surface of the first working disk. Such clamping screws can be inserted into corresponding screw receptacles of the first carrier disk and the first working disk from the side facing away from the working gap. For this purpose, the clamping screws can be passed through the first carrier disk and screwed into the first working disk. At least in the first working wheel, the screw receptacles can have a corresponding screw thread. The screw head of the clamping screws can bear against the side of the first carrier disk facing away from the first working disk. Several clamping screws can be provided for clamping, for example in the case of an annular first working disk, a first group of clamping screws is arranged along a radially outer partial circle of the first working disk or the first carrier disk and a second group of clamping screws is arranged along a radially inner partial circle of the first working disk or the first carrier disc. The pitch circles can each be arranged close to the radially outer or radially inner end of the first working disk or the first carrier disk.

According to a further configuration in this regard, the elastic prestressing means can comprise elastic spring washers which are each arranged between a screw head of the clamping screws and a surface of the first carrier disk which faces away from the first working disk. The spring washers can be clamped between the screw head and the side facing the carrier disk and can be elastically compressed and thus prestressed. Against this bias, the frictional force between the clamping surfaces of the first working disk and the first carrier disk can be reduced.

According to a further embodiment, the decoupling means can comprise a decoupling intermediate layer between the first working disk and the first carrier disk. This can be, for example, a sliding intermediate layer, for example made of a particularly slippery material such as Teflon. However, it can also be an intermediate layer for thermal decoupling, which accordingly has a low thermal conductivity. Accordingly, the decoupling means can also be thermal decoupling means.

According to a further embodiment, the material of the first working disk can have a lower coefficient of thermal expansion than the material of the first carrier disk. The coefficient of thermal expansion of the first working disk can in particular be significantly lower than the coefficient of thermal expansion of the first carrier disk, for example lower by a factor of 5, preferably lower by a factor of 10. As explained at the outset, the use of materials with very different coefficients of thermal expansion for the first carrier disk and the first working disk leads to a bimetal and the resulting changes in geometry when there is a thermal change in size. Due to the at least partial decoupling according to the invention between the first working disk and the first carrier disk, no significant stresses occur between the first working disk and the first carrier disk, even if the first working disk and the first carrier disk have very different thermal expansion coefficients. As a result, the problems explained at the outset with regard to a bimetal can be avoided. It is thus possible, in particular, to use a material with a very low coefficient of thermal expansion, for example an iron-nickel alloy such as Invar, only for the first working disk, while at the same time using a conventional material for the first carrier disk higher coefficient of thermal expansion is used, such as cast iron. A geometry that is largely independent of the process heat can then be generated. At the same time, the use of a material with a very low coefficient of thermal expansion for the working wheel is advantageous with regard to the geometric stability of the working wheel and thus the working gap.

According to a further embodiment, the counter-bearing element can be formed by a preferably ring-shaped second working disk, the first and second working disks being arranged coaxially to one another, and the working gap for processing flat workpieces on both sides or on one side being formed between the first and second working disks. The second work disk can be attached to a second carrier disk, with second clamping means being provided for clamping the second work disk with a clamping surface facing away from the working gap against a clamping surface of the second carrier disk facing the second work disk, and with decoupling means also being provided for at least partially decoupling the second Working disc from the second carrier disc. The second clamping means can, for example, be designed like the first clamping means. The second working disk and/or the second carrier disk can be designed like the first working disk or the first carrier disk. The decoupling means for decoupling the second working disk from the second carrier disk can also be designed like the decoupling means for decoupling the first working disk from the first carrier disk. In this respect, all the exemplary embodiments explained in this context can be transferred to the second working disk and the second carrier disk with the second clamping means and their decoupling means.

According to a further embodiment, a preferably annular pressure volume can be formed between the first carrier disk and the first working disk. The pressure volume is connected to a pressure fluid supply, which is such can be controlled that a pressure is built up in the pressure volume, which generates a predetermined local deformation of the first working disk. Insofar as the term fluid is used in this application, this can denote both a gas and a liquid. The pressure fluid can be a liquid, in particular water. By introducing the pressure fluid into the pressure volume, a pressure can be exerted on the working disk, which is thin compared to the carrier disk, which leads to a deformation of the working disk. In particular, in this way the working disc can be brought into a locally concave shape by setting a low pressure in the pressure volume, brought into a locally planar shape by setting a medium pressure and brought into a locally convex shape by setting a high pressure. The locally convex or concave deformation or shape is present in particular in the radial direction between the inner and outer edge of the annular first working disk. Print volume is a variable print volume. The first working disk thus forms a membrane that deforms depending on the volume of the pressure volume caused by the different pressure.

The pressure fluid supply includes a pressure fluid reservoir to which at least one pressure line connected to the pressure volume is connected. A pump and a control valve can be arranged in the pressure line, which can be controlled to build up the desired pressure in the pressure volume, for example by a control and/or regulating device. In addition, the pressure fluid supply can include a pressure measuring device that measures the pressure in the pressure volume directly or indirectly and whose measurement data can also be present at a control and/or regulating device. On this basis, the pressure required for the desired working gap geometry can be set in the pressure volume by suitably controlling the pressure fluid supply. For example, it is desirable to extend over the entire radial extent as constant a distance as possible between the working discs. The desired gap geometry can be set in static operation and/or in dynamic operation, ie while a workpiece is being machined.

With the pressure volume, a stepless adjustment of the local shape of the first working disk between a maximum concave and maximum convex shape specified by the installation, geometry and material boundary conditions is possible in the west. In principle, the first working disk can have any desired thickness. Depending on the desired adjustment range of the wheel geometry, the working wheel has a suitable thickness so that it can be deformed with the available pressure depending on its surface area, in particular its ring width or its path radius. Like in the DE 10 2016 102 223 A1 explained, can be compensated for by the possibility of adjusting the local geometry of the first working wheel in the radial direction, a change in the gap due to the influence of temperature during processing.

According to a further embodiment, it can be provided that temperature control channels are provided for temperature control of the first working disk, which are connected to a temperature control fluid supply. The temperature control channels are designed to conduct a temperature control fluid. For example, they can be designed like a labyrinth. During operation of the machine, a temperature control fluid, for example a temperature control liquid such as water, is passed through the temperature control channels for temperature control, in particular cooling, of the working wheel. A heat-related deformation of the working disc can be counteracted to a certain extent by the tempering channels.

According to a further embodiment it can be provided that the temperature control channels are arranged within the first working disc, so that the temperature control channels are arranged closer to the working gap than the pressure volume, and that the Tempering channels are not connected to the pressure volume. Due to the arrangement of the temperature control channels within the first working disk, in particular exclusively within the first working disk, the temperature control channels can be arranged closer to the working gap than the pressure volume. In particular, only one inlet and outlet line for the tempering fluid, which are connected to the tempering fluid supply, can run through the carrier disk. The temperature control channels arranged closer to the working gap result in more effective cooling of the first working disk, so that in particular the above-mentioned problems of greater heating of the working disk than of the carrier disk and stronger heating of a side of the working disk delimiting the working gap can be minimized. Corresponding tensions between the first working disk and the first carrier disk or undesired deformations of the first working disk can also be minimized. Rather, the temperature control channels are located as close as possible to the surface of the working disk delimiting the working gap, so that penetration of the process heat through the working disk into the carrier disk can be reduced. In order to further minimize the heat transfer between the first working disc and the first carrier disc, it is possible to provide the first carrier disc and/or the first working disc with webs or other elevations in the area of their contact, so that the contact area between the discs is minimized.

In addition, the temperature control channels are not connected to the pressure volume in this configuration, also unlike in the prior art, where they are connected to one another and form a common circuit. So separate fluid systems (circuits) are provided for the temperature control channels on the one hand and for the pressure volume on the other hand. As a result, the pressure in the pressure volume can be adjusted more flexibly, independently of the pressure in the temperature control channels. Also used for setting the local geometry usable pressure in the pressure volume, in contrast to the prior art, is not limited by the pressure in the tempering channels.

According to a further embodiment, it can be provided that the first working disk is formed from two interconnected, preferably ring-shaped disks between which the temperature control channels are formed, with one of the disks delimiting the working gap and the other of the disks defining the clamping surface for clamping against the clamping surface of the having first carrier disk. The first working disk is thus constructed in two parts, forming the tempering channels similar to a sandwich construction between the two partial disks. This configuration allows the temperature control channels to be formed exclusively within the first working disk in a structurally particularly good manner. According to a particularly practical embodiment, the two discs can be screwed together. Of course, other fastening options are also conceivable.

According to a further embodiment, it can be provided that the first working disk is fastened to the first carrier disk only in the region of its outer edge and in the region of its inner edge. As already explained, the working disks can in particular be ring-shaped. The preferably annular pressure volume is then formed between the first working disk and the first carrier disk. In the aforementioned configuration, the first working disk is fastened to the first carrier disk only in the region of its radially outer and radially inner edge delimiting the working surface, for example screwed along a pitch circle with clamping screws as clamping means. In contrast, the working disk is not fastened to the carrier disk between these edge regions. The pressure volume can be formed in this area in particular. In this way, the working disc has the necessary mobility to build up a suitable pressure in the pressure volume in the desired manner to be deformed. The fastening of the working disk to the carrier disk is selected in such a way that the bearing surface on the inner and outer edge is kept as narrow as possible in order to achieve targeted deformation over the entire surface of the working disk.

Figur 1

einen Teil einer Doppelseiten-Bearbeitungsmaschine in einer Schnittansicht,

Figur 2

eine erste Arbeitsscheibe und eine erste Trägerscheibe einer Doppelseiten-Bearbeitungsmaschine in einer Schnittansicht nach einem ersten Ausführungsbeispiel,

Figur 3

eine erste Arbeitsscheibe und eine erste Trägerscheibe einer Doppelseiten-Bearbeitungsmaschine in einer Schnittansicht nach einem zweiten Ausführungsbeispiel, und

Figur 4

eine erste Arbeitsscheibe und eine erste Trägerscheibe einer Doppelseiten-Bearbeitungsmaschine in einer Schnittansicht nach einem weiteren Beispiel.

Exemplary embodiments of the invention are explained in more detail below with reference to figures. They show schematically:

figure 1

part of a double-sided processing machine in a sectional view,

figure 2

a first working wheel and a first carrier wheel of a double-sided processing machine in a sectional view according to a first exemplary embodiment,

figure 3

a first working disk and a first carrier disk of a double-sided processing machine in a sectional view according to a second exemplary embodiment, and

figure 4

a first working wheel and a first carrier wheel of a double-sided processing machine in a sectional view according to a further example.

Unless otherwise stated, the same reference symbols designate the same objects in the figures.

In the figure 1 The double-sided processing machine shown merely as an example has an annular, first, lower carrier disk 100 and a likewise annular, second, upper carrier disk 120 . On the lower carrier disc 100 An annular, first, lower working disc 140 is attached, and an annular, second, upper working disc 160 is attached to the upper support disc 120 . An annular working gap 180 is formed between the annular working discs 140, 160, in which flat workpieces, for example wafers, are machined on both sides during operation. The double-sided processing machine can be, for example, a polishing machine, a lapping machine or a grinding machine.

The upper carrier disk 120 and with it the upper working disk 160 and/or the lower carrier disk 100 and with it the lower working disk 140 can be driven in rotation relative to one another by a suitable drive device, comprising, for example, an upper drive shaft and/or a lower drive shaft and at least one drive motor will. The drive device is known per se and is not shown in detail for reasons of clarity. In a manner that is also known per se, workpieces to be machined can be held floating in carriers in the working gap 180 . Suitable kinematics, for example planetary kinematics, can be used to ensure that the carrier disks also rotate through the working gap 180 in the course of the relative rotation of the carrier disks 100, 120 or working disks 140, 160. A control and/or regulating device 200 controls or regulates the operation of the double-sided processing machine.

in the in figure 1 shown example are provided within the lower working disc 140 labyrinthine temperature control channels 220. The temperature control channels 220 are connected to a temperature control fluid supply via an inlet 240 and an outlet 260, for example via a drive shaft driving the lower carrier disk 100 and the lower working disk 140. By the control and / or regulating device 200, for example, on a predetermined Temperature value of the tempering fluid at the entrance and/or at the exit of the tempering channels or to a predetermined temperature difference between the temperature present at the entrance and the exit of the tempering channels by adjusting the temperature of the tempering fluid accordingly. In the example shown, labyrinth-like temperature control channels 280 are also formed in the upper working disk 160, which are also connected to a temperature control fluid supply via a supply and discharge not shown in detail. This tempering fluid supply is also controlled by the control and/or regulating device 200 . By supplying the temperature control channels 220 or 280 with a temperature control fluid, for example a cooling liquid such as water, heating of the working disks 140, 160 and heat transfer to the carrier disks 100, 120 can be effectively counteracted, so that corresponding changes in geometry are reduced.

In addition, between the lower carrier disk 120 and the lower working disk 160 there is an annular pressure volume 300 in the example shown, which is connected to a pressurized fluid supply via a feed 320, for example also via a drive shaft driving the lower carrier disk 100 and the lower working disk 140. The pressurized fluid supply is also controlled by the control and/or regulating device 200 . By appropriately introducing pressure fluid into the pressure volume 300, a local deformation of the lower working disk 140 can be generated, in particular a local concave or convex deformation, as is fundamentally the case in FIG DE 10 2016 102 223 A1 is described.

As in figure 1 as can be seen, the temperature control channels 220 are arranged closer to the working gap 180 than the pressure volume 300. In addition, the line systems of the pressure volume 300 and the temperature control channels 220 are not connected to one another, but can be controlled or regulated separately.

In the Figures 2 to 4 a first carrier disk and a first working disk are each shown, which are shown in FIG figure 1 shown double-sided processing machine can be used. For the sake of illustration in the Figures 2 to 4 the temperature control channels 220 and the pressure volume 300 including the relevant inlet and outlet lines are not shown. It goes without saying that those in the Figures 2 to 4 Working discs and carrier discs shown can have corresponding tempering channels and pressure volumes including the inlet and outlet lines. In addition, in the Figures 2 to 4 only a first carrier disk and a first working disk are shown for purposes of illustration. The second carrier disks and second working disks that are also provided can be designed accordingly.

figure 2 shows a first exemplary embodiment of a first, lower carrier disk 10 and a first, lower working disk 14, which are shown, for example, in FIG figure 1 shown double-sided processing machine can be used. In the exemplary embodiment shown, a plurality of clamping screws 20 are provided, which are inserted through the first carrier disk 10 from a side facing away from the working gap 18 and screwed into a corresponding threaded bore in the first working disk 14 . The turnbuckles are arranged along two pitch circles across the annular support and work discs 10, 14, namely a radially outer pitch circle and a radially inner pitch circle. The clamping screws 20 each have a screw head 22 . The first carrier disk 10 has a clamping surface 24 facing the first working disk 14 and the first working disk 14 has a clamping surface 26 facing the first carrier disk 10 . In the course of screwing in the clamping screws 20, the first carrier disk 10 and the first working disk 14 are braced against one another. In the illustrated embodiment after figure 2 are the clamping surfaces 24, 26 in the clamped state directly against each other and are braced against each other.

In the embodiment after figure 2 between the screw heads 22 of the clamping screws 20 and a surface 28 of the first carrier disk 10 facing away from the first working disk 14 are elastic spring washers 30, which are elastically compressed when the clamping screws 20 are screwed in and thus elastically prestress the clamping means 20. As a result, when there is a thermally induced relative movement between the first carrier disk 10 and the first working disk 14 via the clamping surfaces 24, 26, the frictional force provided by the clamping means 20 is reduced, so that, for example, after thermal expansion of the first working disk 14 and a resulting relative movement to the first Carrier disc 10, the first working disc 14 moves back completely to its original position.

figure 3 shows a further embodiment, which largely according to the embodiment figure 2 is equivalent to. In addition to the elastic spring washers 30 are in the embodiment figure 3 between the clamping surfaces 24, 26 of the first carrier disk 10 and the first working disk 14 to the clamping screws 20 arranged around rolling bearings 32 are provided. The first carrier disk 10 and the first working disk 14, in particular their clamping surfaces 24, 26, are mechanically decoupled from one another by these roller bearings 32. Correspondingly, the frictional force between the first carrier disk 10 and the first working disk 14 caused by the clamping screws 20 is further reduced.

figure 4 shows another example that could be used to try to avoid the effects of thermal size changes discussed at the beginning. The example after figure 4 differs from the embodiment according to figure 2 on the one hand, that no decoupling means in the form of the elastic spring washers 30 are provided. On the other hand, it differs in that relief grooves 34, 36 are formed around the clamping screws 20 in the first carrier disk 10' and the first working disk 14'. Attempts were made to use such relief grooves 34, 36 to counteract the disadvantageous effects of the thermal change in size that were explained at the outset. However, it has been found that this measure does not correspond to the decoupling means Figures 2 and 3 associated success.

Reference List

10, 10', 100

lower carrier disc

12, 120

upper carrier disc

14, 14', 140

lower working disc

16, 160

upper working disc

18, 180

working gap

20

clamping screw

22

screw head

24

clamping surface

26

clamping surface

28

Surface

30

spring washer

32

roller bearing

34

relief grooves

36

relief grooves

200

Control and/or regulating device

220

tempering channels

240

feeding

260

discharge

280

tempering channels

300

print volume

320

feeding

Claims (14)

Double or single-sided processing machine with a preferably ring-shaped first working disc (14, 140) which is attached to a first carrier disc (10, 100) and with a counter-bearing element, the first working disc (14, 140) and the counter-bearing element being supported by at least a drive shaft can be driven in rotation relative to one another, with a working gap (18, 180) being formed between the first working disk (14, 140) and the counter-bearing element for working flat workpieces on both sides or on one side, and with first clamping means (20) being provided for clamping of the first working disk (14, 140) with a clamping surface (26) facing away from the working gap (18, 180) against a clamping surface (24) of the first carrier disk (10, 100) facing the first working disk (14, 140), characterized in that Decoupling means are provided for at least partially decoupling the first working disk (14, 140) from the first carrier disk (10, 100). Double or single-sided processing machine according to Claim 1, characterized in that the decoupling means comprise at least one bearing (32) arranged between the clamping surfaces (24, 26) of the first working disk (14, 140) and the first carrier disk (10, 100). Double or single-sided processing machine according to Claim 2, characterized in that the at least one bearing (32) comprises at least one roller bearing (32). Double or single-side processing machine according to one of the preceding claims, characterized in that the Decoupling means comprise elastic biasing means (30) for elastically biasing the first tightening means (20). Double or single-sided processing machine according to one of the preceding claims, characterized in that the first clamping means (20) comprise clamping screws (20) with which the first carrier disc (10, 100) with its clamping surface (24) against the clamping surface (26) of the first working disc (14, 140) is clamped. Double or single-sided processing machine according to Claims 4 and 5, characterized in that the elastic pretensioning means (30) comprise elastic spring washers (30) which are each located between a screw head (22) of the clamping screws (20) and one of the first working discs (14 , 140) facing away from the surface (28) of the first carrier disc (10, 100) are arranged. Double or single-sided processing machine according to one of the preceding claims, characterized in that the decoupling means comprise a decoupling intermediate layer between the first working disk (14, 140) and the first carrier disk (10, 100), in particular a sliding intermediate layer or an intermediate layer for thermal decoupling. Double or single-sided processing machine according to one of the preceding claims, characterized in that the material of the first working wheel (14, 140) has a lower coefficient of thermal expansion than the material of the first carrier wheel (10, 100). Double or single-sided processing machine according to one of the preceding claims, characterized in that the counter-bearing element is formed by a preferably annular second working disc (16, 160), the first and second working discs (16, 160) being arranged coaxially with one another, the working gap (18 , 180) for processing flat workpieces on both sides or on one side. Double or single-sided processing machine according to one of the preceding claims, characterized in that the second working wheel (16, 160) is attached to a second carrier wheel (12, 120), that second clamping means are provided for clamping the second working wheel (16, 160 ) with a clamping surface facing away from the working gap (18, 180) against a clamping surface of the second carrier disk (12, 120) facing the second working disk (16, 160), and that decoupling means are also provided for at least partially decoupling the second working disk (16, 160 ) from the second carrier disk (12, 120). Double or single-sided processing machine according to one of the preceding claims, characterized in that a pressure volume (300) is arranged between the first carrier disc (10, 100) and the first working disc (14, 140), which is connected to a pressure fluid supply which can be controlled in such a way that a pressure is built up in the pressure volume (300) which generates a predetermined deformation of the first working disk (14, 140). Double or single-sided processing machine according to one of the preceding claims, characterized in that temperature control channels (220, 280) are provided for temperature control of the first working wheel (14, 140), which are connected to a temperature control fluid supply. Double or single-sided processing machine according to one of Claims 11 or 12, characterized in that the temperature control channels (220, 280) are arranged inside the first working wheel (14, 140), so that the temperature control channels (220, 280) are closer to the working gap (18, 180) are arranged as the pressure volume (300), and that the tempering channels (220, 280) are not connected to the pressure volume (300). Double or single-sided processing machine according to one of Claims 12 or 13, characterized in that the first working disk (14, 140) is formed from two interconnected, preferably annular disks, between which the temperature control channels (220, 280) are formed, wherein one of the disks delimits the working gap (18, 180) and the other of the disks has the clamping surface for clamping against the clamping surface of the first carrier disk (10, 100).

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