EP3921515B1 - Corps de pompe multiétagée et pompe à gaz multiétagée - Google Patents

Corps de pompe multiétagée et pompe à gaz multiétagée Download PDF

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Publication number
EP3921515B1
EP3921515B1 EP19704770.7A EP19704770A EP3921515B1 EP 3921515 B1 EP3921515 B1 EP 3921515B1 EP 19704770 A EP19704770 A EP 19704770A EP 3921515 B1 EP3921515 B1 EP 3921515B1
Authority
EP
European Patent Office
Prior art keywords
pumping chamber
multistage pump
pump body
connecting duct
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19704770.7A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3921515C0 (fr
EP3921515A1 (fr
Inventor
Theodore Iltchev
Sergio DESSI
Stéphane VARRIN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ateliers Busch SA
Original Assignee
Ateliers Busch SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ateliers Busch SA filed Critical Ateliers Busch SA
Priority to PL19704770.7T priority Critical patent/PL3921515T3/pl
Publication of EP3921515A1 publication Critical patent/EP3921515A1/fr
Application granted granted Critical
Publication of EP3921515C0 publication Critical patent/EP3921515C0/fr
Publication of EP3921515B1 publication Critical patent/EP3921515B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Definitions

  • the present invention relates to a multistage pump body, as well as a multistage pump, which can in particular be a vacuum pump.
  • a multistage pump which can in particular be a vacuum pump.
  • the term “pump” covers gas drive pumps, vacuum pumps and also compressors, while the expression “pump body” designates a part which may belong to such a gas driving pump, to such a vacuum pump or to such a compressor.
  • a multistage pump is a pump comprising several successive pumping chambers, which connecting ducts connect together so that gas compressed in a pumping chamber other than the last one is led to the inlet of the pumping chamber. next pump chamber.
  • cooling by means of a cooling liquid is also proposed.
  • This cooling is an external cooling insofar as the cooling liquid passes around the pumping chambers and around the connecting ducts connecting these pumping chambers to each other.
  • the object of the invention is at least to make it possible to improve the efficiency of the evacuation of the heat which is generated by the compression of the gas in a multistage pump body of a multistage pump when the latter is operating.
  • a multistage pump body comprising at least a first pumping chamber, a second pumping chamber, a connecting conduit putting an outlet of the first pumping chamber into communication with a entrance to the second pumping chamber, as well as a sealed gallery for the circulation of a cooling liquid.
  • the connecting duct is a side duct of the multistage pump body which comprises at least one heat conduction wall partially delimiting the connecting duct and having an outer surface on the outside. At least a portion of the connecting duct passes between this outer surface of the heat conduction wall and the sealed gallery.
  • Each of the first and second pumping chambers is provided to receive at least one member capable of producing a displacement of gas downstream.
  • the pumped gas heats up. When it passes through the connecting duct, this gas is cooled via the heat conduction wall, which is itself cooled by ambient atmospheric air.
  • a first cooling of the multistage pump body takes place by natural convection and by radiation towards the ambient atmospheric air.
  • a second cooling of the multistage pump body is produced by heat transfer to the coolant circulating in the sealed gallery.
  • a double cooling of the multistage pump body according to the invention therefore takes place.
  • the invention makes it possible to obtain better pumping efficiency, which constitutes an advantage.
  • the maximum pumped flow rate can be increased.
  • the invention has the advantage of making it possible to obtain an increase in the maximum flow rate that a pump can pump.
  • the multistage pump body defined above can incorporate one or more other advantageous characteristics, individually or in combination, in particular among those defined below.
  • At least a portion of the leaktight gallery passes between the connecting duct and at least one of the first and second pumping chambers.
  • the coolant circulating in the sealed gallery cools both the connecting duct and at least one of the first and second pumping chambers, which results in even more efficient cooling.
  • At least a portion of the sealed gallery passes between the first pumping chamber and the second pumping chamber.
  • the cooling liquid circulating in the sealed gallery effectively cools the first and second pumping chambers.
  • the multistage pump body comprises at least one heat conduction partition separating the connecting duct and the sealed gallery from each other.
  • a heat conduction partition effectively evacuates heat from the connecting duct to the coolant flowing in the sealed gallery.
  • the multistage pump body comprises at least one heat conduction partition separating the leaktight gallery and the first pumping chamber from each other.
  • a heat conduction partition effectively evacuates heat from the first pumping chamber to the cooling liquid circulating in the sealed gallery.
  • the sealed gallery partially envelops the first pumping chamber and/or the second pumping chamber.
  • the cooling of at least one of the first and second pumping chambers is very efficient.
  • the sealed gallery comprises at least one inlet for the coolant and at least one outlet for the coolant.
  • the multistage pump body comprises at least one axial passage for a rotating shaft, a segment of this axial passage connecting the first and second pumping chambers.
  • the multistage pump body has a first side and a second side opposite the first side with respect to the axial passage, the connecting conduit passing at the level of the first side of the multistage pump body, the multistage pump body delimiting another conduit link putting the outlet of the first pumping chamber into communication with the inlet of the second pumping chamber, this other connecting duct passing at the level of the second side of the multistage pump body.
  • the multistage pump body has a third side and a fourth side opposite the third side with respect to the axial passage, the outlet of the first pumping chamber being at the level of the third side of the multistage pump body, the inlet of the second pumping chamber being at the level of the fourth side of the multistage pump body.
  • an inlet of the first pumping chamber is located at the level of the fourth side of the multistage pump body, an outlet of the second pumping chamber being at the level of the third side of the multistage pump body.
  • the connecting duct is a first connecting duct
  • the multistage pump body comprising a third pumping chamber and a second connecting duct which is a duct putting an outlet of the second pumping chamber into communication with an inlet of the third pumping chamber
  • the heat conduction wall being a first heat conduction wall
  • the multistage pump body comprising at least a second heat conduction wall, this second heat conduction wall partially delimiting the second connecting duct and having an outer surface on the outside, at least a portion of the second connecting duct passing between this outer surface of the second heat conduction wall and the sealed gallery.
  • the multistage pump body comprises two ends through which the or each axial passage passes, the outer surface of the heat conduction wall forming part of a lateral surface extending between the two ends of the multistage pump body.
  • the heat conduction wall has two opposite main surfaces and a constant or non-constant thickness between these two opposite main surfaces, one of which is the outer surface of the heat conduction wall.
  • the connecting duct places the outlet of the first pumping chamber in communication with the inlet of the second pumping chamber without passing between the first and the second pumping chamber.
  • the connecting duct has a cross section which is elongated in a direction substantially parallel to the axial passage.
  • the invention also relates to a multistage pump which comprises a multistage pump body as defined previously.
  • the outer surface of the heat conduction wall is outside the pump.
  • the multistage pump defined above can incorporate one or more other advantageous characteristics, individually or in combination, in particular among those defined below.
  • the multistage pump comprises at least a first rotor to produce a displacement of gas downstream in the first pumping chamber, at least a second rotor to produce a displacement of gas downstream in the second pumping chamber and a rotating shaft carrying the first and second rotors.
  • the multistage pump is a lobe pump or a pin pump or a gear pump and, advantageously, it comprises at least one other first rotor in the first pumping chamber, at least one other second rotor in the second pumping and another rotary shaft carrying the other first and second rotors, the first rotor and the other first rotor being able to produce a movement of gas downstream in the first pumping chamber by being driven in opposite directions, the second rotor and the other second rotor being capable of producing a displacement of gas downstream in the second pumping chamber by being driven in opposite directions.
  • a multistage pump 1 according to one embodiment of the invention is shown alone in figure 1 . It comprises a multistage pump body 2, each end of which carries a casing 3 provided with one of two electric motors 4 and 5 synchronized with each other.
  • the multistage pump 1 is a lobe pump.
  • the invention is however not limited to lobe pumps.
  • a pin pump or a gear pump may be in accordance with the invention.
  • the multistage pump 1 comprises two rotary shafts 8, which are driven in rotation in opposite directions, one by the electric motor 4 and the other by the electric motor 5.
  • Each rotary shaft 8 carries three rotors each of which is part of a pair of complementary rotors 9.
  • Each rotor 9 comprises several lobes, which are four in number in the example shown. The number of lobes of the rotors 9 could however be different from four.
  • the multistage pump body 2 is shown alone in picture 3 . It consists of two casings 11 and 12, each of which has a discontinuous fastening flange 13. Visible only to figure 1 , screws 14 mounted at the level of the fixing flanges 13 fix the casings 11 and 12 to each other by tightening.
  • the multistage pump body 2 comprises an inlet 16 for a cooling liquid, as well as two outlets 17 for this same cooling liquid.
  • the multistage pump body 2 delimits several successive pumping chambers, which are aligned in a direction parallel to the rotary shafts 8 and which are a first pumping chamber 20, a second pumping chamber 21 succeeding the first pumping chamber 20 and a third pumping chamber 22 succeeding the second pumping chamber 21.
  • the pumping chambers 20 to 21 are 3 in number, but their number could be different from 3.
  • one of the pairs of complementary rotors 9 is located in the first pumping chamber 20.
  • a pair of complementary rotors are located in each of the pumping chambers 21 and 22.
  • the two rotating shafts 8 and the rotors 9 of the multistage pump 1 are not represented on the figures 4 to 11 .
  • the suction 23 of the multistage pump 1 is extended by the inlet of the first pumping chamber 20, while the outlet of the third pumping chamber 22 is extended by the discharge 24 of the multistage pump 1.
  • the casing 11 partially delimits the first pumping chamber 20, which one of the casings 3 closes off at one face at the end 2a of the multistage pump body 2.
  • the casing 11 and the casing 12 together delimit the second chamber pumping chamber 21.
  • the casing 12 partially delimits the third pumping chamber 22, which one of the casings 3 closes at one face at the end 2b of the multistage pump body 2.
  • Gaskets compressed in the grooves seal between the casings 11 and 12. They are referenced 25 on the figure 5 .
  • two connecting ducts 26a and 26b symmetrical to each other connect the outlet 27 of the first pumping chamber 20 to the inlet 28 of the second pumping chamber 21.
  • the ducts 26a and 26b are first connecting ducts.
  • the arrow C symbolizes the path of the gas from the suction 23 to the discharge 24.
  • the first connecting ducts 26a and 26b, as well as the second connecting ducts 29a and 29b, are side ducts of the multistage pump body 2.
  • Each of the first connecting ducts 26a and 26b is partially delimited by a side wall which is a heat conduction wall 33 having an outer surface 34 outside the multistage pump 1.
  • the heat conduction walls 33 are first heat conduction walls.
  • Each of the second connecting ducts 29a and 29b is partially delimited by one of two side walls which are second heat conduction walls 36 each having an outer surface 37 outside the multistage pump 1.
  • the multistage pump body 2 delimits a sealed gallery 40 for the circulation of the cooling liquid which can be, for example, water.
  • the sealed gallery 40 communicates with the outlets 17, through which the cooling fluid present in this sealed gallery can be evacuated.
  • the sealed gallery 40 partially surrounds the first pumping chamber 20.
  • the sealed gallery 40 partially surrounds the second pumping chamber 21.
  • the sealed gallery 40 comprises a distribution chamber 40a, into which the inlet 16 opens, which makes it possible to supply the sealed gallery 40 with cooling fluid.
  • the sealed gallery 40 partially surrounds the third pumping chamber 22.
  • the sealed gallery 40 passes between the first pumping chamber 20 and each of the first connecting ducts 26a and 26b.
  • a heat conduction partition 42 partially delimits the first connecting conduit 26a and the sealed gallery 40, which it separates from one another.
  • Another heat conduction partition 42 partially delimits the first connecting duct 26b and the sealed gallery 40, which it separates from one another.
  • a heat conduction partition 43 delimits partially the first pumping chamber 20 and the sealed gallery 40, which it separates from one another.
  • the heat of the gases passing through the first connecting ducts 26a and 26b is evacuated both by the heat conduction walls 33 and by the heat conduction partitions 42.
  • a first cooling takes place due to a heat transfer to the ambient air by radiation and natural convection, at the level of the external surfaces 34 of the heat conduction walls 33.
  • a second cooling is carried out at the level of the heat conduction partitions 42, by the cooling liquid circulating in the sealed gallery 40.
  • the gases passing through the first connecting ducts 26a and 26b therefore undergo the accumulation of two simultaneous coolings, which take place on the two wide sides of each first connecting duct 26a or 26b.
  • the cooling liquid circulating in the sealed gallery 40 cools the heat conduction partition 43 and therefore the first pumping chamber 20 via this heat conduction partition 43 .
  • the sealed gallery 40 passes between the second pumping chamber 21 and each of the second connecting ducts 29a and 29b.
  • a heat conduction partition 45 partially delimits the second connecting duct 29a and the sealed gallery 40, which it separates from one another.
  • Another heat conduction partition 45 partially delimits the second connecting duct 29b and the sealed gallery 40, which it separates from one another.
  • a heat conduction partition 46 partially delimits the second pumping chamber 21 and the sealed gallery 40, which it separates from each other.
  • the heat of the gases passing through the second connecting ducts 29a and 29b is evacuated both by the heat conduction walls 36 and by the heat conduction partitions 45. Cooling takes place by natural convection and heat transfer to the ambient air at the level of the external surfaces 37 of the heat conduction walls 36. Another cooling is carried out at the level of the heat conduction partitions 45, by the cooling liquid circulating in the sealed gallery 40.
  • the gases passing through the second connecting ducts 29a and 29b therefore undergo the accumulation of two simultaneous coolings, which take place on the two wide sides of each second connecting duct 29a or 29b.
  • the cooling liquid circulating in the sealed gallery 40 cools the heat conduction partition 46 and therefore the second pumping chamber 21 via this heat conduction partition 46 .
  • a portion of the sealed gallery 40 is located in the separation wall 50 between the first pumping chamber 20 and the second pumping chamber 21, between which it passes, which results in improved cooling of these first and second pumping chambers. pumping 20 and 21.
  • a portion of the sealed gallery 40 is located in the separating wall 51 between the second pumping chamber 21 and the third pumping chamber 23, between which it passes, which improves the cooling of these second and third pumping chambers 21 and 22.
  • a multistage pump body according to the invention may comprise only a single axial passage 53 for a single rotary shaft 8, for example in the case where it forms part of a vane pump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Reciprocating Pumps (AREA)
EP19704770.7A 2019-02-06 2019-02-06 Corps de pompe multiétagée et pompe à gaz multiétagée Active EP3921515B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL19704770.7T PL3921515T3 (pl) 2019-02-06 2019-02-06 Korpus pompy wielostopniowej i wielostopniowa pompa gazowa

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2019/052939 WO2020160770A1 (fr) 2019-02-06 2019-02-06 Corps de pompe multiétagée et pompe à gaz multiétagée

Publications (3)

Publication Number Publication Date
EP3921515A1 EP3921515A1 (fr) 2021-12-15
EP3921515C0 EP3921515C0 (fr) 2023-06-07
EP3921515B1 true EP3921515B1 (fr) 2023-06-07

Family

ID=65409067

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19704770.7A Active EP3921515B1 (fr) 2019-02-06 2019-02-06 Corps de pompe multiétagée et pompe à gaz multiétagée

Country Status (11)

Country Link
US (1) US20220127962A1 (ja)
EP (1) EP3921515B1 (ja)
JP (1) JP7390384B2 (ja)
KR (1) KR102612571B1 (ja)
CN (1) CN113396272A (ja)
AU (1) AU2019427999A1 (ja)
BR (1) BR112021014163A2 (ja)
CA (1) CA3128727A1 (ja)
ES (1) ES2951642T3 (ja)
PL (1) PL3921515T3 (ja)
WO (1) WO2020160770A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN210629269U (zh) 2019-09-23 2020-05-26 兑通真空技术(上海)有限公司 一种罗茨泵的电机连接传动结构
CN110594156B (zh) 2019-09-23 2021-05-25 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的驱动结构
CN110500275B (zh) 2019-09-23 2021-03-16 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的泵壳体结构
CN110685912A (zh) 2019-10-10 2020-01-14 兑通真空技术(上海)有限公司 一种多轴多级罗茨泵转子连接的结构
CN116838609B (zh) * 2023-07-05 2024-02-27 山东亿宁环保科技有限公司 爪式真空泵冷却系统

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JP5313260B2 (ja) 2008-10-10 2013-10-09 株式会社アルバック ドライポンプ
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Also Published As

Publication number Publication date
ES2951642T3 (es) 2023-10-24
EP3921515C0 (fr) 2023-06-07
AU2019427999A1 (en) 2021-08-12
EP3921515A1 (fr) 2021-12-15
CN113396272A (zh) 2021-09-14
US20220127962A1 (en) 2022-04-28
BR112021014163A2 (pt) 2021-09-21
CA3128727A1 (fr) 2020-08-13
JP2022522108A (ja) 2022-04-14
KR20210124385A (ko) 2021-10-14
WO2020160770A1 (fr) 2020-08-13
KR102612571B1 (ko) 2023-12-11
JP7390384B2 (ja) 2023-12-01
PL3921515T3 (pl) 2023-10-09

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