Classifications

• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D21/00—Processes for servicing or operating cells for electrolytic coating
  • C25D21/10—Agitating of electrolytes; Moving of racks
• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
  • C25D17/005—Contacting devices
• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
  • C25D17/008—Current shielding devices
• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
  • C25D17/06—Suspending or supporting devices for articles to be coated
• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
  • C25D17/10—Electrodes, e.g. composition, counter electrode
  • C25D17/12—Shape or form
• • C—CHEMISTRY; METALLURGY
  • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
  • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
  • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
  • C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating

Definitions

• the invention relates to a flow generator, a separating device and a method for separating a material than on a surface of an object.
• the ohmic resistance or the impedance of a component which depends on the layer thickness, is an important physical variable of the component. If the component has an inhomogeneous layer thickness, this can have undesirable effects on the electrical properties of the component.
• the present invention is based on the object of providing a flow generator, a separating device and a method for separating a material, by means of which improved layers, in particular more homogeneous layers, can be deposited.
• the invention enables a more homogeneous flow of an object to be coated with an electrolyte.
• the invention makes it possible to meet the increasing requirements for layer thickness distribution and layer quality, in particular with regard to the homogeneity to be achieved. Consequently, better, more powerful components, in particular semiconductor components or elements, with narrower specifications can be manufactured with the invention.
• the invention can be used advantageously, inter alia, in electrochemical coating (electroplating) of objects, such as for example substrates, predominantly with copper, but also with nickel, gold, silver and / or tin.
• the invention can be used to advantage in galvanic or electrochemical deposition on ceramic substrates for active or passive components, in particular those components which are used in high-frequency technology and radio frequency technology, and also in depositions Semiconductors, especially semiconductor substrates, and circuit boards.
• the flow generator according to the invention has an electrolyte supply device for supplying an electrolyte and an electrolyte distribution device.
• an electrolyte is understood to be a liquid which contains ions which can move in a directed manner under the influence of an electric field.
• the ions are preferably metal ions.
• the electrolyte distribution device has at least one first distributor plate.
• the electrolyte distribution device has at least one further distributor plate, which is arranged downstream of the first distributor plate in a flow direction of the electrolyte.
• the first and the further distributor plates are advantageously arranged parallel to one another.
• a two-stage homogenization can be an electrolyte S trömung realisie ren.
• a Vorhomoge nization the electrolyte S trömung be achieved.
• Use the other distribution plate a fine homogenization of the pre-homogenized electrolyte S can then be trömung achieved.
• At least one of the said distributor plates in particular each of the distributor plates mentioned, can for example one plate provided with openings through which the electrolyte can flow, preferably a perforated plate.
• the electrolyte distribution device can have at least one distributor pipe which is arranged upstream of the first distributor plate in the flow direction of the electrolyte. This is advantageously connected to the electric lytzu Glassvoriques the flow generator.
• the splitting can errohr for prehomogenization an electrolyte S to be used trömung.
• the first manifold plate and given if any, further distribution plate can in this case for further homogenization of using the manifold pre-homogenized electrolyte S trömung be used.
• the distributor pipe has outlet openings on its side facing away from the first distributor plate.
• the distributor pipe On its side facing the first distributor plate, on the other hand, the distributor pipe preferably has no outlet openings.
• the separation device according to the invention for depositing a material on a surface of an object has a flow generator according to the invention and an object holder.
• a preferred use of the deposition device is its use for the galvanic deposition of a metal layer on an object to be coated.
• the object on which the material is to be deposited is releasably attachable to the object holder.
• the object holder can be designed, for example, as a frame with an opening provided for receiving the object.
• the dimensions of this opening preferably correspond to the dimensions of the object to be coated.
• the object holder is arranged parallel to the distributor plate or to the distributor plates of the electrolyte distribution device.
• the flow generator comprises a housing which is open on one side and has an outflow opening facing the object holder.
• the housing forms a "Anströmkasten", which serves an electrolyte S trömung to the specimen holder or, if the secured object to be coated on the object holder, to lead to the object.
• Use of the housing can be in particular a vertical flow of the to reach the coating object with the electrolyte.
• the housing is connected to the electrolyte supply device, so that the electrolyte can be introduced into the housing via the electrolyte supply device.
• Said electrolyte distribution device is preferably arranged in the housing.
• a range forming the housing which is located downstream in the flow direction of the electrolyte, the electrolyte distribution apparatus, a flow channel through an opening formed in the housing electrolyte S trömung to the object holder and the object to be coated is passed.
• the housing is preferably arranged at a distance from the object holder. It can thereby be achieved that a gap is formed between the housing and the specimen holder is, via which the electrolyte S flow formed in the housing can flow after a deflection on a surface of the object to be coated, in particular can flow to all sides.
• the distance is at most 2 cm, preferably at most 1.5 cm, particularly preferably at most 1 cm. This can avoid that it trömung before impinging on the electrolyte S comes trömung object to be coated to a significant expansion of the electrolyte S. A value of 3 to 5 mm has been found to be particularly advantageous as the distance.
• the outflow opening of the housing is visually matched in height and / or width to the height and / or width of the opening of the object holder provided for receiving the object. This prevents flow lines from spreading or constricting between the housing and the object holder.
• the outflow opening of the housing is dimensioned such that its width corresponds to at least 80%, in particular at least 90%, of the width of the opening of the object holder provided for receiving the object and / or its height at least 80%, in particular at least 90 % corresponds to the height of the opening of the object holder provided for receiving the object.
• the outflow opening of the housing is dimensioned such that its width corresponds at most to 120%, in particular at most 110%, to the width of the opening of the object holder provided for receiving the object and / or its height is at most 120%, in particular at most 110 %, which corresponds to the height of the opening of the object holder provided for receiving the object.
• the width of the outflow opening of the Housing is equal to the width of the opening provided for receiving the object of the object holder and / or the height of the outflow opening of the housing is equal to the height of the opening of the object holder provided for receiving the object.
• the deposition device comprises an anode through which the electrolyte can flow. This can be arranged, for example, between the electrolyte distribution device and the object holder.
• the anode can, for example, be a grid-shaped anode, in particular made of an expanded metal.
• the anode is preferably arranged in the housing of the flow generator.
• the anode is advantageously arranged parallel to the distributor plate or to the distributor plates of the electrolyte distribution device.
• the anode is matched in terms of its height and / or width to the height and / or width of the opening of the object holder provided for receiving the object. This can prevent electrical field lines from spreading or contracting between the anode and the object holder.
• the anode is dimensioned such that its width corresponds to at least 80%, in particular at least 90%, of the width of the opening of the object holder provided for receiving the object and / or its height at least 80%, in particular at least 90 % corresponds to the height of the opening of the object holder intended for receiving the object. It can further be provided that the anode is dimensioned such that its width is at most 120%, in particular at most at least 110% corresponds to the width of the opening of the object holder provided for receiving the object and / or its height corresponds to at most 120%, in particular at most 110%, to the height of the opening of the object holder provided for receiving the object.
• the width of the anode is preferably equal to the width of the opening of the object holder provided for receiving the object and / or the height of the anode is equal to the height of the opening of the object holder provided for receiving the object.
• the anode is preferably an insoluble anode, that is to say an anode that does not dissolve in the electrolyte.
• titanium or platinized titanium can be used as the anode material.
• a metal supply in the electrolyte can follow via a replenishment of metal-containing substances, such as copper oxide or Fe2 + / Fe3 +.
• the flow generator may trömung a flow aperture for partially shielding an electrolyte S and / or for partial shielding from the anode of outgoing electric field lines have.
• the flow orifice is preferably arranged between the anode and the specimen holder. The flow orifice makes it possible to compensate for special features of the object layout in order to achieve a homogeneous layer thickness distribution on the object.
• the object holder has a plurality of contacting points for electrically contacting the object, in particular for electrically contacting an edge of the object.
• the contact points are preferably equidistant over an edge of a provided for receiving the object opening of the object holder arranged distributed.
• the object holder only has the contact points on one of its two sides.
• the object holder is preferably equipped with contact points on each of its sides.
• the same number of contact points can be provided on both sides of the object holder, for example eight contact points per side.
• the separating device can also have an overflow basin with an overflow weir.
• the flow generator is preferably arranged in the overflow basin.
• the overflow basin can be filled with an electrolyte, in particular up to the edge of the overflow weir.
• the separating device can have a drain pipe, in particular a drain pipe provided with holes, for leading the electrolyte out of the overflow basin.
• a drain pipe in particular a drain pipe provided with holes, for leading the electrolyte out of the overflow basin.
• the drain pipe is arranged under the object holder.
• the longitudinal extension of the drain pipe preferably runs in the horizontal direction. It is further preferred if the drain pipe and the object holder are arranged such that they have a common plane of symmetry.
• the separating device comprises a collecting basin, in which at least part of the overflow basin is arranged.
• the catch basin can be used to collect electrolyte that has escaped from the overflow basin so that it can be used again.
• the separating device can have a first pump connected to the catch basin for pumping the electrolyte out of the catch basin and for conveying the electrolyte pumped out of the catch basin to the electrolyte supply device of the flow generator.
• the separating device can have a second pump connected to the drain pipe for pumping the electrolyte out of the drain pipe and for conveying the electrolyte pumped out of the drain pipe into the collecting basin.
• an alternative embodiment provides for the electrolyte to be discharged from the drain pipe without the aid of a pump by means of gravity and, if necessary, to be directed into the collecting basin.
• a valve especially a regulating valve may be used.
• the separating device can comprise two drain pipes arranged to the side of the object holder for discharging the electrolyte from the overflow basin.
• the longitudinal extent of these two drain pipes preferably runs in the vertical direction.
• iques comprising the separator for a we their pumps, preferably for each of their pumps, trömung a flow sensor for measuring a volume flow of the respective pump by flowing electrolyte S.
• the separating device has a further flow generator, which is preferably constructed identically to the first-mentioned flow generator.
• the object holder is advantageously arranged between the two flow generators. It is particularly preferred if the two flow generators are arranged mirror-symmetrically with respect to the object holder. By using two flow generators, it is possible to coat the object from both sides at the same time.
• the separating device can comprise at least one voltage source, in particular at least one DC voltage source.
• the separating device preferably comprises a separate voltage source for each of its flow generators.
• an electrolyte is brought up to the surface of the object.
• the method according to the invention is advantageously carried out with the aid of the separation device according to the invention.
• the object is preferably a disk-shaped object, in particular with a square shape. It is particularly preferred if the object is aligned vertically during the implementation of the method, for example using the aforementioned object holder.
• the object can be or comprise a substrate, in particular a ceramic substrate.
• the object is or comprises a substrate with active or passive elements arranged thereon, in particular semiconductor components. The elements are expediently separated after the separation.
• the material which is deposited on said surface of the object in the method can in particular be a metallic material.
• the object can be an electrically conductive base layer, in particular a metallic one
• the base layer on which the material is deposited.
• the base layer can contain, for example, copper, nickel, gold, silver and / or tin.
• a flow of the electrolyte oriented parallel or substantially parallel to a surface normal of the surface of the object is formed. This flow is preferably formed using the flow generator according to the invention.
• the wording “parallel or substantially parallel to a surface normal” in the preceding paragraph can be understood in the sense of the invention in particular that the ge flow of the electrolyte is oriented at an angle of at most 10 °, preferably at most 5 °, to the surface normal is.
• the electrolyte is preferably brought up to the surface of the object by means of the flow of the electrolyte mentioned.
• the flow of the electrolyte mentioned is deflected at the surface of the object and is guided away from the object along the surface, preferably parallel or substantially parallel to the surface of the object.
• the deflected flow is preferably guided away from the object on all sides.
• the wording “parallel or essentially parallel to the surface of the object” can be understood in the sense of the invention in such a way that the flow of the electrolyte mentioned after the deflection at an angle of at most 10 °, preferably at most 5 °, is aligned with the surface.
• the volume flow of the downward partial flow is preferably set such that the volume flow of the downward partial flow is equal to or substantially the same as the volume flow of the upward partial flow.
• the wording “identical or essentially identical” can be understood in particular in such a way that there is a difference of at most 10%, preferably at most 5%, between the sizes compared with one another.
• the volume flow of the downward partial flow can be set, for example, using the aforementioned first pump, in particular by adjusting the delivery rate of the pump.
• part of the flow of the electrolyte mentioned is deflected laterally and forms a partial flow directed towards the left, viewed from the front of the surface of the object, and a further part of the flow of the electrolyte is deflected sideways and one - in Frontal view of said surface of the object viewed - partial flow directed to the right is formed.
• the volume flow of the partial flow directed to the left and the volume flow of the partial flow directed to the right, in particular with the aid of pumps, are set such that they are the same or substantially the same as the volume flow of the partial flow directed upward.
• the object is flown against both the front side and the rear side by an electrolyte flow aligned with the object.
• the object is coated on both sides, which is particularly advantageous when the object contains elements to be coated both on its front side and on its back.
• the front of the object is subjected to a different electrical current than the rear of the object, for example by applying a different voltage between the anode of the first-mentioned flow generator and the object holder than between the anode of the further flow generator and the object holder.
• This can be particularly advantageous if the front and the back of the object are designed differently and should therefore also be coated differently.
• the method is preferably a galvanic coating method in which a metal layer, in particular a copper, nickel, gold, silver and / or tin layer, is deposited on the object.
• Figure 1 is a schematic representation of a Abscheidevorrich device according to a first embodiment of the invention
• FIG. 2 shows a front view of an object holder of the separating device and an object to be coated, which is detachably attached to the object holder;
• Figure 3 is a schematic representation of a Abscheidevorrich device according to a second embodiment of the invention.
• Figure 4 is a schematic representation of a Abscheidevorrich device according to a third embodiment of the invention.
• Figure 1 shows a separating device 1 in a schematic representation.
• the separating device 1 is used for separating a material, in particular for galvanically depositing a metal layer, on a surface of an object.
• the separating device 1 comprises two flow generators 2a, 2b of identical construction and a vertically suspended object holder 3, to which an object 4 to be coated is detachably fastened.
• the two flow generators 2a, 2b are arranged mirror-symmetrically with respect to the object holder 3.
• first flow generator 2a and second flow generator 2b are referred to as first flow generator 2a and second flow generator 2b.
• the object 4 to be coated is a substrate, in particular a ceramic substrate, with elements arranged thereon, such as active or passive semiconductor components, and a thin metallic base layer surrounding the substrate.
• the object to be coated has a square shape and has an edge length of approximately 200 mm and a thickness between 200 pm and 1000 pm.
• Said metallic base layer (referred to in the art also as "seed S chicht") surrounding the substrate over the entire surface, using the substrate edges of time.
• the metallic base layer is a copper layer, in particular a masked and structured copper layer.
• the metallic base layer is reinforced with the aid of the deposition device 1 in a galvanic deposition process. That is, in the present exemplary embodiment, copper is deposited on the existing copper layer, which is the metallic one, using the separating device 1
• Base layer forms, deposited.
• the separating device 1 comprises an overflow basin 5 with an overflow weir 6. Both flow generators 2a, 2b are in the Overflow basin 5 arranged.
• Figure 1 shows the Abscheidevor device 1 in a state in which the overflow basin 5 is filled with an electrolyte 7 to the edge of its overflow weir 6.
• the separating device 1 comprises a collecting basin 8, in which the overflow basin 5 is arranged.
• the separator 1 comprises a perforated drain pipe 9, the longitudinal extension of which extends in the horizontal direction and which is arranged under the object holder 3 in such a way that the drain pipe 9 and the object holder 3 have a common plane of symmetry.
• the two flow generators 2a, 2b of the separating device 1 each comprise a spaced apart from the object holder 3 on an ordered, one-sided open housing 10 with an outflow opening 11 facing the object 4 to be coated.
• the two flow generators 2a, 2b each include an electrolyte supply device 12 and one electrolyte V ertei averaging device. 13
• the electrolyte distribution device 13 of the respective flow generator 2a, 2b comprises a first distributor plate 14 and a further distributor plate 15, the two distributor plates 14, 15 being arranged parallel to one another and parallel to the object holder 3 and as perforated plates with from
• Electrolytes 7 through which openings are formed.
• the two distributor plates 14, 15 of the respective flow generator 2a, 2b are arranged in its housing 10.
• the two distributor plates 14, 15 of the respective flow generator 2a, 2b divide the housing 10 into a first chamber 16, a second chamber 17 and a flow channel 18, the first chamber 16 from a parallel to the outflow opening 11 side wall 19 of the housing 10 to the first distributor plate 14 he stretches, the second chamber 17 extends from the first distributor plate 14 to the second distributor plate 15 and the flow channel 18 from the second distributor plate 15 over the remaining part of the housing 10 extends.
• the separating device 1 also has in each of the two housings 10 a through which the electrolyte 7, lattice-shaped anode 20, which is arranged between the electrolyte distribution device 13 of the respective flow generator 2a, 2b and the object holder 3.
• Both the respective anode 20 and the outflow opening 11 of the respective housing 10 are dimensioned such that their width and height correspond approximately to the width and height of the object 4 to be coated.
• the term “width” refers to an extension perpendicular to the plane of the drawing of FIG. 1.
• the separating device 1 comprises a first pump 21 for pumping the electrolyte 7 out of the collecting basin 8 and for conveying the electrolyte 7 pumped out of the collecting basin 8 to the electrolyte supply device 12 of the respective flow generator 2a, 2b.
• the separating device 1 comprises a second pump 22 for pumping the electrolyte 7 out of the drain pipe 9 and for conveying the electrolyte 7 pumped out of the drain pipe 9 into the collecting basin 8.
• the first pump 21 is connected to the collecting basin 8 via a fluid line 23 and connected via a further fluid line 23 to the electrolyte supply devices 12 of the two flow generators 2a, 2b, while the second pump 22 is connected via a fluid line 23 to the drain pipe 9 and via a further fluid line 23 to the catch basin 8. Further comprising the separator 1 for each of its pump 21, 22, a flow sensor 24 for measuring a Volu menstroms a respective pump 21, 22 by flowing electrolyte trömung S.
• the separating device 1 comprises a DC voltage source 25 for each of its flow generators 2a, 2b.
• the respective DC voltage source 25, as can be seen from FIG. 1, is via electrical lines 26 with the anode 20 arranged in the associated flow generator 2a, 2b and with the object holder 3 connected.
• the respective flow generator 2a, 2b in its housing 10, a flow aperture 27 which is disposed between the in the housing 10 of the respective flow generator 2a, 2b arranged anode 20 and the object holder 3 and trömung for partially shielding an electrolyte S and the partial shielding from the anode 20 outgoing electrical field lines.
• FIG. 2 shows the aforementioned object holder 3 and the object 4 to be coated, which is detachably attached to the object holder 3, in a frontal view.
• the object holder 3 is designed as a frame and has an opening provided for receiving the object 4, which, however, is not visible in FIG. 2 because the object 4 to be coated is arranged therein.
• the object holder 3 has on its front a plurality of contacting points 29, in the present case eight contacting points 29, for electrical contacting of the object 4, which are in electrical contact on the front of the object 4 with its edge 30.
• the object holder 3 On its rear side, which is not visible in FIG. 2, the object holder 3 has the same number of contact points 29 for electrical contacting of the object 3, which are in electrical contact on the rear side of the object 4 with its edge 30.
• the front contact points 29 are electrically connected to one of the two DC voltage sources 25, while the rear contact points 29 are electrically connected to the other of the two DC voltage sources 25.
• the contact points 29 are equidistantly distributed over the edge of the opening intended for receiving the object 4 opening of the object holder 3 and thus also equidistantly distributed over the edge 30 of the object 4.
• the mode of operation of the separating device 1 is described below with reference to FIG. 1. Since, as previously mentioned, the two flow generators 2a, 2b are constructed identically to one another, the operation of the separating device 1 is, for the sake of simplicity, described by way of example using one of the two flow generators 2a, 2b, more precisely using the first flow generator 2a.
• the following explanations apply analogously to the second flow generator 2b. That is, both flow generators 2a, 2b are used to coat the object 4 to be coated with the electrolyte 7 flow towards, so that the object 4 is homogeneously coated on both sides.
• the electrolyte 7 is introduced into the housing 10 of the first flow generator 2a, more precisely into the first chamber 16 of the housing 10, via the electrolyte supply device 12 of the first flow generator 2a.
• an electrolyte S tro mung 31 which flows through the first manifold plate 14 and is thereby pre-homogenized by the first manifold plate 14 forms.
• the pre-homogenized electrolyte S flow 31 then flows through the second chamber 17 of the housing 10 and the further distributor plate 15, the electrolyte S flow 31 during
• Flow through the further distribution plate 15 is further homogenized. From the flow channel 18 of the housing 10, the homogenized electrolyte flows S trömung 31 then through the flow orifice 11 of the housing 10 perpendicularly or substantially perpendicularly onto the object to be coated. 4
• the electrolyte S is trömung on the surface to be coated 28 of the object 4 is deflected 31 and parallel or Wesentli surfaces parallel to said surface 28 of the object 4 Wegge leads.
• a portion of the electrolyte S trömung 31 is deflected upward and forms a reverse upward flow section 32a.
• Another part of the electrolyte S trömung 31 is deflected downward, forming a downward partial flow 32b.
• Said partial flows 32a, 32b flow through a gap between the object holder 3 and the housing 10 of the first flow generator 2a.
• the volume flow of the downward partial flow 32b is set such that the volume flow of the downward partial flow 32b is equal to the volume flow of the downstream upstream partial flow 32a. This can be achieved, for example, by setting the delivery rates of the two pumps 21, 22 such that the two flow sensors 24 measure the same volume flow.
• the downward partial flow 32b flows through the holes of the drain pipe 9 into the drain pipe 9, while the upward partial flow 32a flows over the overflow weir 6 out of the overflow basin 5.
• the electrolyte 7 is pumped out of the drain pipe 9 and conveyed into the collecting basin 8.
• the electrolyte 7 located in the collecting basin 8 is pumped out of the collecting basin 8 and conveyed to the electrolyte supply device 12 of the first flow generator 2a.
• an electrical voltage is present between the anode 20 arranged in the housing 10 of the first flow generator 2a and the object holder 3, an electrical voltage is present. Since the object 4 is in electrical contact with the object holder 3 via the contact points 29, the same voltage is also present between said anode 20 and the object 4. Consequently, there is an electric field between said anode 20 and the object holder 3, through which ions contained in the electrolyte 7 are guided to the object 4 to be coated. Due to the previously described configuration of the anode 20 and the object holder 3, this electric field has homogeneous electric field lines, so that the object 4 is acted upon by a homogeneous ion current.
• FIG. 3 shows a schematic illustration of a second deposition device 33 for depositing a material, in particular for the galvanic deposition of a metal layer, on a surface of an object.
• This separating device 33 also has a first and egg nen second flow generator 2a, 2b, the two flow generators 2a, 2b being constructed identically to one another.
• the electrolyte distribution device 13 of the respective flow generator 2a, 2b does not have two distributor plates, but rather only a single distributor plate 14.
• the electrolyte distribution device 13 of the respective flow generator 2a, 2b has a distributor tube 34 which is arranged between the distributor plate 14 and the side wall 19 of the housing 10 arranged parallel to the flow opening 11 and on its side facing away from the distributor plate 14 or the side wall 19 facing side has a plurality of outlets.
• the distributor pipe 34 of the respective flow generator 2a, 2b is connected to its electrolyte supply device 12.
• the operation of the separating device 33 is, for the sake of simplicity, exemplarily based on one of the two flow generators 2a, 2b, more precisely on the basis of the first flow generator 2a.
• the following explanations apply analogously to the second flow generator 2b.
• the electrolyte 7 is introduced into the distributor pipe 34 of the first flow generator 2a via the electrolyte supply device 12 of the first flow generator 2a.
• the electrolyte 7 exits via the outlet openings of the distributor pipe 34 from the distributor pipe 34, a pre-homogenized electric lyt flow 31 being formed.
• This prehomogenized elect rolyte flow 31 meets the side wall 19 of the housing 10 of the first flow generator 2a, is deflected thereon and flows from the side wall 19 further to the distributor plate 14.
• the electrolyte S flow 31 then flows through the distributor plate 14, the electrolyte S flow 31 is further homogenized when flowing through the distributor plate 14.
• FIG. 4 shows a schematic illustration of a third deposition device 35 for depositing a material, in particular for the galvanic deposition of a metal layer, on a surface of an object.
• This separator 35 also has an overflow basin 5 and a catch basin 8, in the present exemplary embodiment only part of the overflow basin 5, more precisely only the upper part of the overflow basin 5, is arranged within the catch basin 8.
• the separating device 35 from FIG. 4 does not have two pumps, but only a single pump 21.
• the separating device 35 has a reservoir 36 and a valve 37.
• Said pump 21 is connected on the input side via a fluid line 23 to the reservoir 36 and on the output side via a further fluid line 23 to the electrolyte supply devices 12 of the flow generators 2a, 2b.
• the memory 36 is on the input side via a fluid line 23 with the catch basin 8 and via a further fluid line 23, to which a flow sensor 38 is connected, with the drain pipe 9 connected.
• the electrolyte 7 located in the collecting basin 8 and the electrolyte 7 located in the drain pipe 9 are removed by means of gravity from the catch basin 8 or from the drain pipe 9.
• the valve 37 more precisely by a corresponding setting of the valve position, it can be achieved that the volume flow of the overflow basin 5 via the flow pipe 9 leaving partial flow of the electrolyte 7 is equal to the volume flow of a partial flow leaving the overflow basin 5 via the overflow weir 6 of the electrolyte 7.
• Whether the volume flow of the overflow basin 5 via the drain pipe 9 partial flow is equal to the volume flow of the partial flow leaving the overflow basin 5 via the overflow weir 6 can be determined by means of the two flow sensors 24, 38 of the separating device 35.
• the flow sensor 38 which is connected to the fluid line 23 between the reservoir 36 and the drain pipe 9, measures half the value as the other flow sensor 24, the on If the fluid line 23 is connected between the pump 21 and the electrolyte supply devices 12 of the two flow generators 2a, 2b, the volume flow of the partial flow leaving the overflow basin 5 via the drain pipe 9 is equal to the volume flow of the overflow basin 5 leaving the overflow weir 6 partial flow.
• the electrolyte 7 is pumped out of the reservoir 36 and conveyed to the electrolyte supply devices 12 of the two flow generators 2a, 2b.

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• Chemical Kinetics & Catalysis (AREA)
• Electrochemistry (AREA)
• Materials Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• Electroplating Methods And Accessories (AREA)
• Electrolytic Production Of Metals (AREA)

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• 2019
  • 2019-07-30 EP EP19758331.3A patent/EP3830320A1/de active Pending
  • 2019-07-30 US US17/265,002 patent/US20210324535A1/en active Pending
  • 2019-07-30 KR KR1020217004582A patent/KR20210035833A/ko unknown
  • 2019-07-30 JP JP2021504310A patent/JP7553429B2/ja active Active
  • 2019-07-30 WO PCT/DE2019/100699 patent/WO2020025090A1/de unknown
  • 2019-07-30 CN CN201980051057.5A patent/CN112513341A/zh active Pending
  • 2019-07-30 TW TW108126936A patent/TW202012705A/zh unknown
• 2023
  • 2023-12-19 JP JP2023213447A patent/JP2024037950A/ja active Pending

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